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    • 11. 发明授权
    • Hollow optical waveguide by omni-directional reflectors
    • 空心光波导由全向反射器
    • US07239786B2
    • 2007-07-03
    • US11162495
    • 2005-09-13
    • Shih-Shou LoChii-Chang Chen
    • Shih-Shou LoChii-Chang Chen
    • G02B6/10
    • G02B6/1225B82Y20/00
    • A semiconductor hollow optical waveguide (SHOW-ODR) device. The semiconductor hollow optical waveguide device comprises a bottom substrate having a trench within, a first omni-directional reflector conformal located on the bottom substrate, and a top substrate having a second omni-directional reflector and located on the bottom substrate with the second omni-directional reflector in contact with the first omni-directional reflector. In addition, a portion of the first omni-directional reflector in the trench and a portion of the second omni-directional reflector over the trench together form an air channel.
    • 半导体中空光波导(SHOW-ODR)器件。 半导体中空光波导器件包括在底部衬底上具有沟槽的底部衬底,位于底部衬底上的第一全向反射器共形器,以及具有第二全向反射器并且位于底部衬底上的第二全向反射器的顶部衬底, 定向反射器与第一全向反射器接触。 此外,沟槽中的第一全向反射器的一部分和沟槽上的第二全向反射器的一部分一起形成空气通道。
    • 13. 发明授权
    • Displacement measurement system and method thereof
    • 位移测量系统及其方法
    • US08089631B2
    • 2012-01-03
    • US12483263
    • 2009-06-12
    • Kuei-Chu HsuChii-Chang ChenChia-Hua ChanYin-Chieh Lai
    • Kuei-Chu HsuChii-Chang ChenChia-Hua ChanYin-Chieh Lai
    • G01B11/02
    • G01B11/002G01D5/38
    • A displacement measurement system including a coherent light source, a two-dimensional grating, a photo sensor, and a signal processing apparatus is provided. After the coherent light beam enters the two-dimensional grating, a zero-order light beam and a plurality of first-order diffraction beams are generated. The zero-order light beam interferes with two of the first-order beams in different directions, so that corresponding interference fringes are formed on the photo sensor. Accordingly, when the two-dimensional grating moves, displacements of the two-dimensional grating in the different directions are obtained by calculating phase differences of the interference fringes in the corresponding directions. Besides, when the two-dimensional grating rotates, the rotational angle of the two-dimensional grating is obtained from the corresponding rotational angle of a diffraction pattern of the first-order diffraction beams.
    • 提供了包括相干光源,二维光栅,光传感器和信号处理装置的位移测量系统。 在相干光束进入二维光栅之后,产生零级光束和多个一阶衍射光束。 零级光束在不同方向上干扰两个一级光束,从而在光传感器上形成对应的干涉条纹。 因此,当二维光栅移动时,通过计算相应方向上的干涉条纹的相位差来获得二维光栅在不同方向上的位移。 此外,当二维光栅旋转时,二维光栅的旋转角度由第一级衍射光束的衍射图形的相应旋转角度获得。
    • 17. 发明申请
    • WAFER BONDING METHOD
    • WAFER BONDING方法
    • US20080124895A1
    • 2008-05-29
    • US11309105
    • 2006-06-23
    • Shih-Shou LoChii-Chang Chen
    • Shih-Shou LoChii-Chang Chen
    • H01L21/30
    • H01L21/187B82Y20/00G02B6/02304G02B6/1225
    • The invention is directed to a wafer bonding method for bonding a first wafer with a second wafer, wherein the first wafer has a first top surface and the second wafer has a second top surface formed thereon and the first wafer bonds with the second wafer in a manner that the first top surface of the first wafer is opposite the second top surface of the second wafer. The wafer bonding method comprises steps of adding a hydroxyl-ion-containing solution between the first top surface and the second top surface and then applying an external pressure on the first wafer and the second wafer. An annealing process is performed.
    • 本发明涉及一种用于将第一晶片与第二晶片接合的晶片接合方法,其中所述第一晶片具有第一顶表面,并且所述第二晶片具有形成在其上的第二顶表面,并且所述第一晶片与所述第二晶片接合 使得第一晶片的第一顶表面与第二晶片的第二顶表面相对。 晶片接合方法包括以下步骤:在第一顶表面和第二顶表面之间加入含羟基离子的溶液,然后在第一晶片和第二晶片上施加外部压力。 进行退火处理。