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    • 11. 发明授权
    • MEMS in-plane resonators
    • MEMS平面内谐振器
    • US08593155B2
    • 2013-11-26
    • US12853619
    • 2010-08-10
    • Andrew SparksMilind Bhagavat
    • Andrew SparksMilind Bhagavat
    • G01R27/04
    • G01N29/022G01N29/036G01N2291/014G01N2291/0256G01N2291/0422H03H9/1057H03H9/2463H03H2009/02511
    • MEMS in-plane resonators include a substrate wafer, at least one resonant mass supported by the substrate wafer and configured to resonate substantially in-plane, and at least one transducer coupled to the at least one resonant mass for at least one of driving and sensing in-plane movement of the at least one resonant mass, wherein at least part of one surface of the resonant mass is configured for exposure to an external environment and wherein the at least one transducer is isolated from the external environment. Such MEMS in-plane resonators may be fabricated using conventional surface micromachining techniques and high-volume wafer fabrication processes and may be configured for liquid applications (e.g., viscometry, densitometry, chemical/biological sensing), gas sensing (e.g., where a polymer film is added to the sensor surface, further degrading the damping performance), or other applications.
    • MEMS平面内谐振器包括衬底晶片,由衬底晶片支撑并被配置为基本上共面谐振的至少一个谐振块,以及耦合到至少一个谐振块的至少一个谐振器,用于至少一个驱动和感测 所述至少一个谐振质量块的平面内运动,其中所述谐振块的一个表面的至少一部分被配置为暴露于外部环境,并且其中所述至少一个换能器与所述外部环境隔离。 这样的MEMS平面内谐振器可以使用传统的表面微加工技术和大容量晶片制造工艺来制造,并且可以被配置用于液体应用(例如,粘度测定,密度测定,化学/生物感测),气体感测(例如,其中聚合物膜 被添加到传感器表面,进一步降低阻尼性能)或其他应用。
    • 15. 发明申请
    • Single camera multi-spectral imager
    • 单相机多光谱成像仪
    • US20070159541A1
    • 2007-07-12
    • US11327417
    • 2006-01-09
    • Andrew SparksMichael DeWeert
    • Andrew SparksMichael DeWeert
    • H04N9/04
    • H04N9/045H04N5/332
    • An imaging system has a single focal plane array that does not require the precise alignment of multiple cameras relative to one another. It incorporates a multi-band, band pass filter that includes filter elements corresponding to pixel regions of a detector within a camera. The imaging system may further incorporate a detector that vertically discriminates among radiation in different spectral bands incident on an image plane of the detector. In this manner, spectral content may be determined in each spatial region without the need for beam splitting or multiple cameras. The filter itself may further comprise different filter elements, for example, filter elements A and B arranged in a checkerboard pattern, where filter element A passes different spectral bands than filter element B. In this manner, multi-spectral, high resolution images may be generated using a single camera that significantly improves upon image discrimination as compared to, for example, the Bayer color filter array pattern. The single camera implementation is well suited for incorporation into marine, land and air vehicles.
    • 成像系统具有单个焦平面阵列,其不需要相对于彼此的多个相机的精确对准。 它包括一个多频带通滤波器,其包括对应于相机内的检测器的像素区域的滤波器元件。 成像系统还可以并入检测器,其垂直地区分入射在检测器的图像平面上的不同光谱带中的辐射。 以这种方式,可以在每个空间区域中确定频谱内容,而不需要分束或多个相机。 滤波器本身还可以包括不同的滤波器元件,例如布置在棋盘图案中的滤波器元件A和B,其中滤波器元件A通过与滤波器元件B不同的频谱带。以这种方式,多光谱,高分辨率图像可以是 使用单个相机生成,与例如拜耳滤色器阵列图案相比,显着地改善了图像鉴别。 单个摄像机实现非常适合并入海洋,陆地和空中的车辆。