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    • 146. 发明申请
    • High Voltage Device and Manufacturing Method Thereof
    • 高压器件及其制造方法
    • US20130217196A1
    • 2013-08-22
    • US13844926
    • 2013-03-16
    • Tsung-Yi HuangHuan-Ping Chu
    • Tsung-Yi HuangHuan-Ping Chu
    • H01L29/66
    • H01L29/0878H01L29/0847H01L29/1083H01L29/42368H01L29/66659H01L29/66681H01L29/7835
    • The present invention discloses a high voltage device and a manufacturing method thereof. The high voltage device is formed in a first conductive type substrate, wherein the substrate has an upper surface. The high voltage device includes: a second conductive type buried layer, which is formed in the substrate; a first conductive type well, which is formed between the upper surface and the buried layer; and a second conductive type well, which is connected to the first conductive type well and located at different horizontal positions. The second conductive type well includes a well lower surface, which has a first part and a second part, wherein the first part is directly above the buried layer and electrically coupled to the buried layer; and the second part is not located above the buried layer and forms a PN junction with the substrate.
    • 本发明公开了一种高压器件及其制造方法。 高压器件形成在第一导电型衬底中,其中衬底具有上表面。 高压器件包括:形成在衬底中的第二导电型掩埋层; 第一导电型阱,其形成在上表面和埋层之间; 以及第二导电型阱,其连接到第一导电类型阱并且位于不同的水平位置。 第二导电类型阱包括井下表面,其具有第一部分和第二部分,其中第一部分直接在掩埋层的上方并电耦合到掩埋层; 并且第二部分不位于掩埋层的上方并与衬底形成PN结。
    • 148. 发明申请
    • Trench Schottky Barrier Diode and Manufacturing Method Thereof
    • 沟槽肖特基势垒二极管及其制造方法
    • US20130181319A1
    • 2013-07-18
    • US13543844
    • 2012-07-08
    • Tsung-Yi HuangChien-Hao Huang
    • Tsung-Yi HuangChien-Hao Huang
    • H01L29/872H01L21/329
    • H01L29/872H01L29/0615H01L29/402H01L29/66143H01L29/8725
    • The present invention discloses a trench Schottky barrier diode (SBD) and a manufacturing method thereof. The trench SBD includes: an epitaxial layer, formed on a substrate; multiple mesas, defined by multiple trenches; a field plate, formed on the epitaxial layer and filled in the multiple trenches, wherein a Schottky contact is formed between the field plate and top surfaces of the mesas; a termination region, formed outside the multiple mesas and electrically connected to the field plate; a field isolation layer, formed on the upper surface and located outside the termination region; and at least one mitigation electrode, formed below the upper surface outside the termination region, and is electrically connected to the field plate through the field isolation layer, wherein the mitigation electrode and the termination region are separated by part of a dielectric layer and part of the epitaxial layer.
    • 本发明公开了一种沟槽肖特基势垒二极管(SBD)及其制造方法。 沟槽SBD包括:形成在衬底上的外延层; 由多个沟槽限定的多个台面; 场板,形成在所述外延层上并填充在所述多个沟槽中,其中在所述场板和所述台面的顶表面之间形成肖特基接触; 终端区域,形成在多个台面之外并电连接到场板; 场隔离层,形成在上表面并位于端接区域外部; 以及形成在终端区域外的上表面下方的至少一个缓解电极,并且通过场隔离层电连接到场板,其中缓解电极和端接区域被介电层的一部分分隔开, 外延层。
    • 150. 发明授权
    • Lateral power MOSFET with high breakdown voltage and low on-resistance
    • 具有高击穿电压和低导通电阻的侧向功率MOSFET
    • US08129783B2
    • 2012-03-06
    • US12329285
    • 2008-12-05
    • Tsung-Yi HuangPuo-Yu ChiangRuey-Hsin LiuShun-Liang Hsu
    • Tsung-Yi HuangPuo-Yu ChiangRuey-Hsin LiuShun-Liang Hsu
    • H01L29/78
    • H01L29/0847H01L29/063H01L29/0634H01L29/0878H01L29/42368H01L29/66659H01L29/7835
    • A semiconductor device with high breakdown voltage and low on-resistance is provided. An embodiment comprises a substrate having a buried layer in a portion of the top region of the substrate in order to extend the drift region. A layer is formed over the buried layer and the substrate, and high-voltage N-well and P-well regions are formed adjacent to each other. Field dielectrics are located over portions of the high-voltage N-wells and P-wells, and a gate dielectric and a gate conductor are formed over the channel region between the high-voltage P-well and the high-voltage N-well. Source and drain regions for the transistor are located in the high-voltage P-well and high-voltage N-well. Optionally, a P field ring is formed in the N-well region under the field dielectric. In another embodiment, a lateral power superjunction MOSFET with partition regions located in the high-voltage N-well is manufactured with an extended drift region.
    • 提供具有高击穿电压和低导通电阻的半导体器件。 一个实施例包括在衬底的顶部区域的一部分中具有掩埋层的衬底,以便延伸漂移区域。 在掩埋层和衬底之上形成层,并且彼此相邻地形成高压N阱和P阱区。 场电介质位于高压N阱和P阱的部分上方,并且在高压P阱和高压N阱之间的沟道区上形成栅极电介质和栅极导体。 晶体管的源极和漏极区位于高压P阱和高压N阱中。 可选地,在场电介质下的N阱区域中形成P场环。 在另一个实施例中,具有位于高压N阱中的分配区域的横向功率超结MOSFET被制造为具有延伸漂移区域。