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    • 137. 发明授权
    • Ultrasonic inspection method, ultrasonic test method and ultrasonic inspection apparatus
    • 超声波检测方法,超声波检测方法和超声波检测仪器
    • US09423380B2
    • 2016-08-23
    • US13652941
    • 2012-10-16
    • Hitachi, Ltd.
    • Hirohisa MizotaNaoyuki Kono
    • G01N29/24G06F17/00G01N29/06G01N29/265
    • G01N29/24G01N29/069G01N29/265G06F17/00
    • The invention is directed to an ultrasonic inspection method, an ultrasonic test method, and an ultrasonic inspection apparatus that enable sizing to be executed even for a minute defect using an ultrasonic wave. A holder holds a transmitting probe for executing an angle beam method and a receiving probe for executing a vertical beam method. A motor and a guide rail form a movement mechanism for the transmitting probe and the receiving probe. In an ultrasonic test mode, the transmitting probe executes the angle beam method and transmits and receives an ultrasonic wave. In a sizing mode, the transmitting probe transmits an ultrasonic wave and the receiving probe receives this wave. A tip echo of a wave diffracted from a tip of a defect on a sample and a corner echo reflected from a corner of the defect are measured from a waveform received by the receiving probe.
    • 本发明涉及超声波检查方法,超声波检测方法和超声波检查装置,即使对于使用超声波的微小缺陷也能够进行施胶。 保持器保持用于执行角度束法的发射探头和用于执行垂直波束法的接收探头。 电动机和导轨形成用于发射探针和接收探针的运动机构。 在超声波测试模式中,发射探头执行角束法并发送和接收超声波。 在尺寸模式中,发射探头发射超声波,接收探头接收该波。 从接收探针接收的波形测量从样本上的缺陷尖端衍射的波的尖端回波和从缺陷的角部反射的角回波。