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    • 138. 发明授权
    • Method for transferring a pattern
    • 传送图案的方法
    • US07082876B2
    • 2006-08-01
    • US10515830
    • 2003-06-05
    • Lennart Olsson
    • Lennart Olsson
    • B41K1/00
    • G03F9/7053B29C59/02B29L2017/003B82Y10/00B82Y40/00G03F7/0002G11B5/855
    • A method and a device for forming at least a first pattern on a substrate (6,28), which is coated with a layer (5) on at least a first planar surface, are described. According to the method, a first pressing means (27) is arranged with a first structure (32) that defines the pattern, and the substrate (28) is arranged so that the first pressing means (27) is separated from the substrate (28) and so that the first pressing means (27) and the substrate (28) are unable to move transversely of the common center line (50) but are able to move freely in a direction along the center line (50). Subsequently, the first pressing means (27) is contacted with the substrate (28) while maintaining the common center line, and a pressure is applied to the substrate (28) and the first pressing means (27) to form said at least one pattern in the layer (30)
    • 描述了在至少在第一平面上涂覆有层(5)的衬底(6,28)上至少形成第一图案的方法和装置。 根据该方法,第一按压装置(27)布置有限定图案的第一结构(32),并且基板(28)被布置成使得第一按压装置(27)与基板(28)分离 ),并且使得第一按压装置(27)和基板(28)不能横向于公共中心线(50)移动,而是能够沿着中心线(50)的方向自由移动。 随后,第一按压装置(27)在保持公共中心线的同时与基板(28)接触,并且向基板(28)和第一按压装置(27)施加压力以形成所述至少一个图案 在层(30)中