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    • 5. 发明申请
    • INKJET HEAD AND ELECTROSTATIC ATTRACTION TYPE INKJET HEAD
    • 喷头和静电吸引式喷头
    • US20100259582A1
    • 2010-10-14
    • US12745750
    • 2008-10-30
    • Hiroshi Miyakoshi
    • Hiroshi Miyakoshi
    • B41J2/14
    • B41J2/14233B41J2/06B41J2/175B41J2/17596B41J2/18B41J2202/08B41J2202/12
    • The inkjet head has a first silicon substrate 10 having ink ejection ports 11 formed, a glass substrate 20 bonded to the first silicon substrate 10, having ink channel holes 21 formed thereon, and a second silicon substrate 30 having ink chambers 31 grooved, piezoelectric elements 35 provided on the back side of the ink chambers 31 and the ink chamber forming surface bonded to the glass substrates 20. In the second silicon substrate 30, there are formed an ink flow channel 32 communicating with the ink chambers 31 and through holes 34 communicating with the ink flow channel 32 on the ink chamber forming surface, wherein an ink circulation tubes 50 made of glass tubes are bonded to the through holes 34, and the first silicon substrate 10, the glass substrate 20, the second silicon substrate 30 and an bonding surface of the ink circulation tube are anodically-bonded.
    • 喷墨头具有形成有喷墨口11的第一硅基板10,接合到第一硅基板10的玻璃基板20,其上形成有墨通道孔21,以及具有凹槽的墨腔31的第二硅基板30,压电元件 35设置在油墨室31的背面和与玻璃基板20结合的油墨室形成面上。在第二硅基板30中,形成有与油墨室31连通的油墨流路32, 在油墨室形成表面上具有油墨流动通道32,其中由玻璃管制成的油墨循环管50接合到通孔34,并且第一硅衬底10,玻璃衬底20,第二硅衬底30和 油墨循环管的接合表面被阳极结合。