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    • 132. 发明申请
    • DISPLAY AND ELECTRONIC UNIT
    • 显示和电子单元
    • US20130044510A1
    • 2013-02-21
    • US13565109
    • 2012-08-02
    • Tatsuya YataMasashi MitsuiYoshihiro Watanabe
    • Tatsuya YataMasashi MitsuiYoshihiro Watanabe
    • F21V8/00
    • G02F1/133504G02B5/0257G02B5/0278G02F1/133553G02F1/133615G02F2001/133616G02F2001/133626G02F2203/02
    • A display includes: a reflective or semi-transmissive display panel; a light-scattering layer disposed on a top surface of the display panel; and an auxiliary light source. The light-scattering layer is an anisotropic front scattering layer which relatively strongly scatters light incident from a specific direction within a first angle range and a second angle range. The light-scattering layer has a first scattering central axis and a second scattering central axis. The first angle range and a third angle range overlap each other in an angle sub-range not including a first specific angle and an incident-plane symmetrical angle symmetrical to a second specific angle. The auxiliary light source allows light therefrom incident from a side closer to the auxiliary light source or from a side closer to the display panel to mainly enter the light-scattering layer within the second angle range.
    • 显示器包括:反射或半透明显示面板; 设置在所述显示面板的上表面上的光散射层; 和辅助光源。 光散射层是从第一角度范围和第二角度范围内相对强烈地散射从特定方向入射的光的各向异性前向散射层。 光散射层具有第一散射中心轴和第二散射中心轴。 第一角度范围和第三角度范围在不包括与第二特定角度对称的第一特定角度和入射平面对称角度的角度子范围内彼此重叠。 辅助光源允许从更靠近辅助光源的一侧或从靠近显示面板的一侧入射的光主要在第二角度范围内进入光散射层。
    • 137. 发明授权
    • Method of manufacturing an electrostatic chuck
    • 制造静电卡盘的方法
    • US08051548B2
    • 2011-11-08
    • US12676834
    • 2008-09-03
    • Kinya MiyashitaYoshihiro Watanabe
    • Kinya MiyashitaYoshihiro Watanabe
    • H01S4/00
    • H01L21/67109H01L21/6831H02N13/00Y10T29/49002Y10T29/49117Y10T29/49126Y10T29/4913Y10T137/8593
    • Provided is a method of manufacturing a gas supply structure for use in an electrostatic chuck apparatus having an electrostatic chuck on the upper surface side of a metal base (1), the gas supply structure being capable of eliminating contamination due to nonuniform cooling gas jetting quantities and deposition of a thermally spraying material and the like. The method of manufacturing the gas supply structure for supplying a cooling gas supplied from the lower surface side of the metal base (1) to the back surface of a substrate (W) attracted to an upper insulating layer (6) side, through a gas supply path (3) provided on the metal base (1), the method including: prior to a step of forming a lower insulating layer (4) by thermally spraying a ceramic powder on the upper surface side of the metal base (1), a step of forming an attracting electrode (5), and a step of forming the upper insulating layer (6), a step of blocking a gas supply path outlet (3a) on the upper surface side of the metal base (1) with an adhesive (8), the adhesive containing a filler made of the same material as that of the ceramic powder that is used for forming the lower insulating layer (4); and a step of opening a hole toward the gas supply path outlet (3a) of the metal base (1) after forming the upper insulating layer (6), to thereby form a through hole (9) reaching the gas supply path (3).
    • 提供一种在金属基体(1)的上表面侧具有静电卡盘的静电卡盘装置中制造供气结构的方法,该气体供给结构能够消除由于不均匀的冷却气体喷射量引起的污染 以及沉积热喷涂材料等。 制造从金属基体(1)的下表面侧供给到通过气体吸引到上绝缘层(6)侧的基板(W)的背面的冷却气体的供气结构体的制造方法, 供给路径(3),该方法包括:在通过在金属基体(1)的上表面侧上热喷涂陶瓷粉末而形成下绝缘层(4)的步骤之前, 形成吸引电极(5)的步骤和形成上绝缘层(6)的步骤,用金属基底(1)的上表面侧封闭气体供给路径出口(3a)的步骤, 粘合剂(8),含有与用于形成下绝缘层(4)的陶瓷粉末相同材料制成的填料的粘合剂; 以及在形成上绝缘层(6)之后向金属基底(1)的气体供给路径出口(3a)开口的步骤,从而形成到达气体供给路径(3)的通孔(9) 。
    • 139. 发明申请
    • FEEDING STRUCTURE OF ELECTROSTATIC CHUCK, METHOD FOR PRODUCING THE SAME, AND METHOD FOR REGENERATING FEEDING STRUCTURE OF ELECTROSTATIC CHUCK
    • 静电切割机的进给结构及其制造方法,以及再生静电切割机进料结构的方法
    • US20100065300A1
    • 2010-03-18
    • US12441767
    • 2006-09-19
    • Kinya MiyashitaYoshihiro Watanabe
    • Kinya MiyashitaYoshihiro Watanabe
    • H01B3/00C23C4/06B23B31/28H01L21/683
    • H02N13/00H01L21/6831H01L21/6833Y10T29/5193Y10T29/53235Y10T279/23
    • Provided is a power feeding structure of an electrostatic chuck including a lower insulation layer, an electrode layer and a surface insulation dielectric layer formed on an upper surface side of a metal substrate in order from the metal substrate, in which the lower insulation layer, the electrode layer and the surface insulation dielectric layer are not cracked easily. The power feeding structure of an electrostatic chuck includes: a through hole formed through an upper surface and a lower surface of the metal substrate; a power feeding terminal disposed in the through hole for supplying a voltage supplied from a lower surface side of the metal substrate to the electrode layer formed on the upper surface side of the metal substrate; and an insulation holding member formed of an electric insulating material for insulating an inner wall of the through hole from the power feeding terminal and for holding the power feeding terminal, and the power feeding terminal includes a power feeding end portion that protrudes to the upper surface side of the metal substrate, and a tip of the power feeding end portion is positioned at the electrode layer side with respect to an interface between the electrode layer and the lower insulation layer, and on and under an interface between the electrode layer and the surface insulation dielectric layer.
    • 本发明提供了一种静电卡盘的供电结构,该静电卡盘包括从金属基板依次形成在金属基板的上表面侧的下绝缘层,电极层和表面绝缘电介质层,其中下绝缘层, 电极层和表面绝缘介电层不容易破裂。 静电卡盘的供电结构包括:通过金属基板的上表面和下表面形成的通孔; 馈电端子,设置在所述通孔中,用于将从所述金属基板的下表面侧提供的电压提供到形成在所述金属基板的上表面侧上的电极层; 以及由电绝缘材料形成的绝缘保持构件,用于将通孔的内壁与供电端子绝缘并保持供电端子,并且供电端子包括向上表面突出的供电端部 并且所述供电端部的前端相对于所述电极层与所述下绝缘层之间的界面位于所述电极层侧,并且位于所述电极层与所述表面之间的界面上 绝缘介电层。
    • 140. 发明申请
    • Article Such as Surfboard and Production Method Thereof
    • 冲浪板及其制作方法等
    • US20090286433A1
    • 2009-11-19
    • US12085747
    • 2006-12-16
    • Yoshihiro Watanabe
    • Yoshihiro Watanabe
    • B63B35/79B29C35/08
    • B63B35/7909B29C64/106B29C64/135B29L2031/5272B63B5/24B63B35/793
    • An article such as a surfboard with a hollow structure and a production method thereof achieve a wide range of selections for users. The article is established with sufficient strength and durability, and is capable of achieving low cost and short delivery time. The article is configured by an outer shell having a hollow structure for forming an outer shape of a main body of the surfboard, a partition wall arranged within an internal space of the outer shell for connecting inner surfaces facing one another in said internal space, sectioned spaces separated and sealed by said partition wall and the inner surfaces of the outer shell, and a vent hole formed on said partition wall so that the sectioned spaces adjacent to one another can properly communicate with one another.
    • 诸如具有中空结构的冲浪板和其制造方法的物品为用户实现了广泛的选择。 该物品具有足够的强度和耐久性,并且能够实现低成本和短的输送时间。 所述物品由具有用于形成所述冲浪板主体的外形的中空结构的外壳构成,所述隔壁布置在所述外壳的内部空间内,用于连接在所述内部空间中彼此面对的内表面, 由所述分隔壁和外壳的内表面分隔和密封的空间以及形成在所述分隔壁上的通气孔,使得彼此相邻的分隔空间可以彼此适当地连通。