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    • 125. 发明授权
    • Method of fabricating MOS transistor having shallow source/drain junction regions
    • 制造具有浅源极/漏极结区域的MOS晶体管的方法
    • US06620668B2
    • 2003-09-16
    • US10117001
    • 2002-04-05
    • Seong-jae LeeWon-ju ChoKyoung-wan Park
    • Seong-jae LeeWon-ju ChoKyoung-wan Park
    • H01L218238
    • H01L29/6659H01L21/2255H01L21/26586H01L21/823814H01L29/7833
    • A method of fabricating a MOS transistor having shallow source/drain junction regions is provided. A diffusion source layer is formed on a semiconductor substrate on which gate patterns are formed. Same type or different type of impurities are implanted into the diffusion source layer several times in different directions. As a result, dislocation does not occur and the impurity concentration of the diffusion source layer can be nonuniformly controlled so that damage to the crystal structure of the semiconductor substrate does not occur. Also, the impurities nonuniformly contained in the diffusion source layer are diffused into the semiconductor substrate by a solid phase diffusion method to form shallow source/drain junction regions having LDD regions and highly doped source/drain regions by a self-alignment method.
    • 提供一种制造具有浅源极/漏极结区域的MOS晶体管的方法。 扩散源层形成在其上形成有栅极图案的半导体衬底上。 相同类型或不同类型的杂质在不同方向上多次注入扩散源层。 结果,不会发生位错,扩散源层的杂质浓度可能被不均匀地控制,从而不会发生对半导体衬底的晶体结构的损坏。 此外,扩散源层中不均匀地包含的杂质通过固相扩散法扩散到半导体衬底中,以通过自对准方法形成具有LDD区和高掺杂源极/漏极区的浅源极/漏极结区域。
    • 127. 发明授权
    • Method of manufacturing a quantum diffraction transistor
    • 量子衍射晶体管的制造方法
    • US5940696A
    • 1999-08-17
    • US932616
    • 1997-09-17
    • Kyoung Wan ParkSeong Jae LeeMin Cheol Shin
    • Kyoung Wan ParkSeong Jae LeeMin Cheol Shin
    • H01L29/06H01L21/335H01L29/66H01L29/772H01L29/80H01L21/338
    • B82Y10/00H01L29/66446H01L29/66977H01L29/772Y10S438/962
    • The present invention discloses a technique for applying diffraction characteristics of electrons to a two-dimensional electronic device to manufacture multi-functional transistor having various ON/OFF states. Method of manufacturing a quantum diffraction transistor according to the present invention is capable of adjusting the amplitude of drain current and having various ON/OFF states utilizing diffraction characteristics of electrons by interposing a reflection-type diffraction grating in a bent electron path. In the inventive multi-functional quantum diffraction transistor using a two dimensional electron gas in quantum well structure formed at a different species junction in a heterostructure semiconductor device and having a bent electron path between the source electrode and the drain electrode with a reflection-type diffraction grating, the quantum diffraction effect of the electrons is used for the control of the diffracted drain current.
    • 本发明公开了一种将电子衍射特性应用于二维电子器件以制造具有各种ON / OFF状态的多功能晶体管的技术。 根据本发明的量子衍射晶体管的制造方法能够通过在弯曲的电子路径中插入反射型衍射光栅来利用电子的衍射特性来调节漏极电流的振幅并具有各种导通/截止状态。 在本发明的多功能量子衍射晶体管中,使用在异质结构半导体器件中形成于不同物质结的量子阱结构中的二维电子气,并且在源电极和漏电极之间具有反射型衍射 光栅,电子的量子衍射效应用于衍射漏极电流的控制。
    • 129. 发明授权
    • Quantum interference device
    • 量子干扰装置
    • US5519232A
    • 1996-05-21
    • US352046
    • 1994-11-30
    • Kyoung-Wan ParkSeong-Jae LeeMin-Cheol Shin
    • Kyoung-Wan ParkSeong-Jae LeeMin-Cheol Shin
    • H01L29/68H01L21/338H01L29/205H01L29/66H01L29/778H01L29/80H01L29/812H01L31/0328H01L31/0336
    • B82Y10/00H01L29/66977
    • A quantum interference device comprises a semi-insulating GaAs substrate; GaAs and AlGaAs layers sequentially formed with high purity on the substrate; a two-dimensional electron gas layer formed in the GaAs layer and serving as a channel; source/drain regions formed on the semi-insulating GaAs substrate and at both ends of a laminated portion composed of the GaAs/AlGaAs layers; and a gate formed on the AlGaAs layer and having a periodic structure wherein the length thereof varies in a periodic manner in a transverse direction. In the device, the electron gas layer formed in the GaAs layer is used as an electron path, and the phases of electrons passing along different electron paths are caused to interfere with each other by the gate, thereby causing the current of a drain therein to be maximized or minimized. The transconductance can be significantly increased.
    • 量子干涉装置包括半绝缘GaAs衬底; 在衬底上依次形成高纯度的GaAs和AlGaAs层; 形成在GaAs层中并用作沟道的二维电子气层; 在半绝缘GaAs衬底上形成的源极/漏极区域和由GaAs / AlGaAs层构成的层叠部分的两端; 以及形成在AlGaAs层上并且具有周期性结构的栅极,其中其长度在横向上以周期性方式变化。 在该器件中,使用形成在GaAs层中的电子气层作为电子通路,使通过不同的电子路径的电子相被栅极相互干扰,从而使其中的漏极的电流 最大化或最小化。 跨导可以显着增加。