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121. 发明申请

US20130186499A1 FLUID RESISTANCE DEVICE 有权
标题翻译：流体阻力装置
公开(公告)号：US20130186499A1
公开(公告)日：2013-07-25
申请号：US13748506
申请日：2013-01-23
申请人： HORIBA STEC, CO., LTD.
发明人： Hidetaka Yada , Takehisa Hataita , Soutaro Kishida
IPC分类号： F16L55/027
CPC分类号： F16L55/027 , G01F1/34
摘要： In order to provide a fluid resistance device that is easily manufactured, compact, accurate, and uniform in performance, the fluid resistance device comprises two members that have facing surfaces that face each other and a downstream end of the upstream side flow channel and an upstream end of the downstream side flow channel open at positions displaced from each other on the facing surfaces, and a ring body that is arranged to surround the downstream end opening and the upstream end opening and that forms the fluid resistance channel between the downstream end opening and the upstream end opening by being sandwiched by the facing surfaces, and is so configured that the ring body is made of a material harder than that of each member, and the ring body breaks into the facing surfaces by fastening two members so as to make the facing surfaces approach each other.
摘要翻译：为了提供容易制造，紧凑，精确和性能均匀的流体阻力装置，流体阻力装置包括两个构件，其具有彼此相对的相对表面和上游侧流动通道的下游端以及上游侧下游侧流路的端部在面对面上彼此偏移的位置开口，环状体设置成包围下游端开口和上游端开口，并在下游端开口与下游端开口之间形成流体阻力通道所述上游端开口被所述相对表面夹持，并且被构造成使得所述环形主体由比每个构件更硬的材料制成，并且所述环体通过紧固两个构件而分裂成相对表面，以使面对面。

122. 发明申请

US20120298221A1 MASS FLOW CONTROLLER SYSTEM 有权
标题翻译：质量流量控制系统
公开(公告)号：US20120298221A1
公开(公告)日：2012-11-29
申请号：US13519115
申请日：2010-12-22
申请人： Hiroyuki Takeuchi , Yutaka Yoneda , Yasuhiro Isobe
发明人： Hiroyuki Takeuchi , Yutaka Yoneda , Yasuhiro Isobe
IPC分类号： F16K31/12
CPC分类号： G05D7/0652 , Y10T137/7784
摘要： A mass flow controller with high accuracy flow rate output control is disclosed. In the mass flow controller, relation data that indicates a corresponding relation between a flow rate of a reference gas and a CF value of a sample gas is stored, a target flow rate is converted into a reference gas flow rate by the use of a predetermined CF value, a sample gas flow rate is calculated from the converted reference gas flow rate and a CF value corresponding to the reference gas flow rate, the sample gas flow rate is compared with the target flow rate, and the CF value that is used for conversion of the reference gas flow rate or calculation of the sample gas flow rate is updated by the use of the corresponding relation based on the error between the sample gas flow rate and the target flow rate.
摘要翻译：公开了一种具有高精度流量输出控制的质量流量控制器。在质量流量控制器中，存储指示参考气体的流量与样品气体的CF值之间的对应关系的关系数据，通过使用预定的流量将目标流量转换为参考气体流量 CF值，根据转换的参考气体流量和与参考气体流量对应的CF值计算样品气体流量，将样品气体流量与目标流量进行比较，将用于通过使用基于样品气体流量与目标流量之间的误差的对应关系来更新参考气体流量的转换或样品气体流量的计算。

123. 发明授权

US08262877B2 Glass electrode and sensitive glass for the glass electrode 有权
标题翻译：用于玻璃电极的玻璃电极和敏感玻璃
公开(公告)号：US08262877B2
公开(公告)日：2012-09-11
申请号：US12440234
申请日：2007-09-06
申请人： Yasukazu Iwamoto , Yuji Nishio
发明人： Yasukazu Iwamoto , Yuji Nishio
IPC分类号： G01N27/26 , C03C3/095 , C03C3/15
CPC分类号： G01N27/36 , C03C3/095 , C03C4/18
摘要： Disclosed is a sensitive glass for use in a pH-sensitive glass electrode, which comprises at least Me2O3 (Me represents a lanthanoid) and further comprises Y2O3 or Sc2O3 in an amount smaller than that of the Me2O3. Also disclosed is a sensitive glass for use in a cation-sensitive glass electrode, which comprises at least Y2O3 or Sc2O3.
摘要翻译：公开了一种用于pH敏感玻璃电极的敏感玻璃，其至少含有Me 2 O 3（Me表示镧系元素），并且还含有少于Me 2 O 3的量的Y 2 O 3或Sc 2 O 3。还公开了一种用于阳离子敏感性玻璃电极的敏感玻璃，其至少包括Y 2 O 3或Sc 2 O 3。

124. 发明申请

US20120180876A1 FLOW RATE MEASURING MECHANISM, MASS FLOW CONTROLLER, AND PRESSURE SENSOR 有权
标题翻译：流量测量机构，质量流量控制器和压力传感器
公开(公告)号：US20120180876A1
公开(公告)日：2012-07-19
申请号：US13499671
申请日：2010-09-17
申请人： Shigeyuki Hayashi , Akira Kuwahara
发明人： Shigeyuki Hayashi , Akira Kuwahara
IPC分类号： F16K31/36 , G01L7/00 , G01F1/34
CPC分类号： G01F1/36 , G01F1/88 , G05D7/0635 , Y10T137/7759
摘要： The present invention is a flow rate measuring mechanism provided with: a body unit that has an internal flow path through which a target fluid to be measured is configured to flow; and a pressure sensor that is attached to the body unit and senses a pressure of the internal flow path, and configured to calculate a flow rate of the fluid on the basis of the fluid pressure sensed by the pressure sensor, wherein the body unit has a length direction and a surface parallel to the length direction, which is set as a component attachment surface, and to the component attachment surface, the pressure sensor is attached such that a pressure sensitive surface thereof is substantially vertical to the component attachment surface and substantially parallel to the length direction, and thereby, without causing a reduction in pressure measurement sensitivity, makes a width direction size dramatically smaller than before.
摘要翻译：本发明是一种流量测量机构，其具有：具有内部流路的主体单元，被测定对象流体通过该内部流路流动; 以及压力传感器，其附接到所述主体单元并感测所述内部流路的压力，并且被配置为基于由所述压力传感器感测到的所述流体压力计算所述流体的流量，其中所述主体单元具有长度方向和平行于长度方向的表面，其被设置为部件附接表面，并且附接到部件附接表面，压力传感器被安装成使得其压敏表面基本上垂直于部件安装表面并且基本平行从而不会导致压力测量灵敏度的降低，使得宽度方向尺寸比以前大得多。

125. 发明申请

US20120139238A1 PIPE CONNECTION STRUCTURE 审中-公开
标题翻译：管道连接结构
公开(公告)号：US20120139238A1
公开(公告)日：2012-06-07
申请号：US13308398
申请日：2011-11-30
申请人： Miyoshi Kimura , Tetsuya Yamada , Tokuo Nakano
发明人： Miyoshi Kimura , Tetsuya Yamada , Tokuo Nakano
IPC分类号： F16L25/00 , F16L23/00
CPC分类号： F16L23/10
摘要： To prevent attachment in an inclined state, a coupling ring with an inner concave groove is fitted to an outer circumferences of abutting flange portions, and is fastened to reduce an inner diameter thereof so that an inclined surface formed on each side surface of the concave groove presses an inclined surface formed on an opposite surface of each of the flange portions. The pair of flange portions are coupled by force generated at the time of pressing. An attachment correcting surface is provided on each of the flange portions or each of the pipes so that, only where the coupling ring is attached and fastened in an orientation inclined at an angle equal to or larger than a prescribed angle, the attachment correcting surface is abutted to a part of the coupling ring prior to completion of the fastening so as to prohibit the part from being brought closer.
摘要翻译：为了防止在倾斜状态下的附接，具有内凹槽的联接环安装在邻接的凸缘部分的外周上，并且被紧固以减小其内径，使得形成在凹槽的每个侧表面上的倾斜表面按压形成在每个凸缘部分的相对表面上的倾斜表面。一对凸缘部分通过在按压时产生的力联接。在每个凸缘部分或每个管中设置附接校正表面，使得只有在以等于或大于规定角度的角度倾斜的方向安装和紧固联接环的情况下，附接校正表面是在紧固结束之前，与联接环的一部分相接，以防止部件更靠近。

126. 发明申请

US20120116596A1 MASS FLOW CONTROLLER 审中-公开
标题翻译：质量流量控制器
公开(公告)号：US20120116596A1
公开(公告)日：2012-05-10
申请号：US13290984
申请日：2011-11-07
申请人： Yutaka Yoneda , Yuki Tanaka
发明人： Yutaka Yoneda , Yuki Tanaka
IPC分类号： G05D7/00
CPC分类号： G05D7/0635
摘要： The present invention comprises a flow rate sensor part and control valve; a calculation part that performs a proportional calculation on a deviation between a flow rate measurement value and setting value to calculate a feedback control value for the flow rate control valve; and an opening level control signal output part that generates an opening level control signal on the basis of the feedback control value to output the opening level control signal to the flow rate control valve. A gain value to be multiplied by the deviation is calculated by using a function that, in a predetermined period after the time point when the flow rate setting value decreases by a predetermined amount or more, calculates a larger value as a calculation value obtained by using a variation between the flow rate setting value before the decrease and a flow rate setting value after the decrease decreases.
摘要翻译：本发明包括流量传感器部件和控制阀; 计算部，其对流量测量值和设定值之间的偏差进行比例计算，以计算流量控制阀的反馈控制值; 以及开度电平控制信号输出部，其基于反馈控制值生成开度水平控制信号，将开度水平控制信号输出到流量控制阀。通过使用在流量设定值减少预定量以上的时间点之后的预定时间内计算作为通过使用得到的计算值的较大值的函数来计算乘以偏差的增益值降低前的流量设定值与减少后的流量设定值之间的变化减小。

127. 发明申请

US20120011943A1 LIQUID SAMPLE HEATING VAPORIZER 有权
标题翻译：液体样品加热蒸发器
公开(公告)号：US20120011943A1
公开(公告)日：2012-01-19
申请号：US13182401
申请日：2011-07-13
申请人： Hidenori Oba , Tadayuki Nagano
发明人： Hidenori Oba , Tadayuki Nagano
IPC分类号： G01N1/44
CPC分类号： H01L21/67109 , B01B1/06 , G01K1/18
摘要： The present invention is intended to improve response property and accuracy of temperature control of a liquid sample, and is provided with a vaporization tank that retains the liquid sample, one or more heaters that are provided in the vaporization tank and respectively have heating parts that come into contact with the liquid sample to heat the liquid sample, a temperature detection part that is provided in contact with an outer surface including the heating part of any of the heaters and detects a temperature of the outer surface, and a control part that receives a temperature detection signal from the temperature detection part to control electric power supplied to the heaters.
摘要翻译：本发明旨在提高液体样品的温度控制的响应特性和精度，并且设置有保持液体样品的蒸发槽，设置在蒸发箱中的一个或多个加热器，并且分别具有来自的加热部件与液体样品接触以加热液体样品;温度检测部分，其设置成与包括任何加热器的加热部分的外表面接触并检测外表面的温度;以及控制部件，其接收来自温度检测部的温度检测信号，以控制提供给加热器的电力。

128. 发明申请

US20110290031A1 CAPACITANCE TYPE PRESSURE SENSOR 有权
标题翻译：电容式压力传感器
公开(公告)号：US20110290031A1
公开(公告)日：2011-12-01
申请号：US13115361
申请日：2011-05-25
申请人： Akira Kuwahara , Takehisa Hataita , Soutaro Kishida
发明人： Akira Kuwahara , Takehisa Hataita , Soutaro Kishida
IPC分类号： G01L9/12
CPC分类号： G01L9/0072 , G01L19/04 , G01L19/0627
摘要： The present invention is adapted to prevent a diaphragm from being deformed by a thermal stress caused by thermal expansion coefficients of a sensor main unit and a fixing member and includes a sensor main unit to which a fixed electrode is fixed, a diaphragm structure that forms a sealed space between the diaphragm structure and the sensor main unit and a fixing member that is jointed to the diaphragm structure in a manner of surrounding a pressure receiving part of the diaphragm structure so as to lead a fluid to the pressure receiving part, wherein the diaphragm structure includes a flat plane diaphragm main unit and first and second ring members each having a known thermal expansion coefficient that are respectively provided on both sides of a circumference of the diaphragm main unit.
摘要翻译：本发明适用于防止由于传感器主体和固定部件的热膨胀系数引起的热应力而使膜片变形，并且包括固定固定电极的传感器主单元，形成固定电极的膜结构隔膜结构和传感器主单元之间的密封空间和以围绕隔膜结构的受压部分的方式接合到隔膜结构的固定构件，以便将流体引导到受压部分，其中隔膜结构包括平面隔膜主单元和分别设置在隔膜主体的圆周的两侧上的具有已知的热膨胀系数的第一和第二环构件。

129. 发明申请

US20110106319A1 MASS FLOW CONTROLLER 有权
标题翻译：质量流量控制器
公开(公告)号：US20110106319A1
公开(公告)日：2011-05-05
申请号：US12613397
申请日：2009-11-05
申请人： Akito Takahashi , Yukimasa Furukawa , Yuki Tanaka
发明人： Akito Takahashi , Yukimasa Furukawa , Yuki Tanaka
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , G05B11/06 , Y10T137/0318 , Y10T137/0324
摘要： To improve PI performance of a mass flow controller, the mass flow controller changes a proportional coefficient, an integral coefficient, and a derivative coefficient used for PID operation in a stable state based on at least two out of a primary pressure, a time change amount of the primary pressure, and a flow rate set value.
摘要翻译：为了提高质量流量控制器的PI性能，质量流量控制器基于至少两个初级压力，时间变化量来改变在稳定状态下用于PID操作的比例系数，积分系数和微分系数的初级压力和流量设定值。

130. 发明申请

US20100145633A1 FLOW CONTROLLER, FLOW MEASURING DEVICE TESTING METHOD, FLOW CONTROLLER TESTING SYSTEM, AND SEMICONDUCTOR MANUFACTURING APPARATUS 有权
标题翻译：流量控制器，流量测量装置测试方法，流量控制器测试系统和半导体制造设备
公开(公告)号：US20100145633A1
公开(公告)日：2010-06-10
申请号：US12517796
申请日：2007-12-05
申请人： Tadahiro Yasuda
发明人： Tadahiro Yasuda
IPC分类号： G01F25/00 , G06F19/00
CPC分类号： G05D7/0635
摘要： A testing method for testing a flow controller with high accuracy by shortening as much as possible the time required for the test including the wait time. A testing-subject flow controller and a testing-standard flow controller are arranged in that order in series from the upstream side in a flow channel through which a fluid whose flow is to be controlled flows. In a flow-uncontrolled state in which the valve of the testing-subject flow controller is practically in the full-open state, and with the fluid flow controlled to a predetermined flow rate by the testing-standard flow controller, whether the actual flow-rate measurement according to the testing-subject flow controller falls within a predetermined range of actual flow-rate measurements according to the testing-standard flow controller is determined.
摘要翻译：一种用于通过尽可能缩短测试所需时间（包括等待时间）来高精度测试流量控制器的测试方法。测试对象流量控制器和测试标准流量控制器以流动通道中的上游侧串联布置，流体将通过该流动通道流动。在测试对象流量控制器的阀实际上处于全开状态并且通过测试标准流量控制器将流体流量控制到预定流量的流量不受控状态下，根据测试对象流量控制器的速率测量落在根据测试标准流量控制器的实际流量测量的预定范围内。

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