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1. 发明申请

US20110290031A1 CAPACITANCE TYPE PRESSURE SENSOR 有权
标题翻译：电容式压力传感器
公开(公告)号：US20110290031A1
公开(公告)日：2011-12-01
申请号：US13115361
申请日：2011-05-25
申请人： Akira Kuwahara , Takehisa Hataita , Soutaro Kishida
发明人： Akira Kuwahara , Takehisa Hataita , Soutaro Kishida
IPC分类号： G01L9/12
CPC分类号： G01L9/0072 , G01L19/04 , G01L19/0627
摘要： The present invention is adapted to prevent a diaphragm from being deformed by a thermal stress caused by thermal expansion coefficients of a sensor main unit and a fixing member and includes a sensor main unit to which a fixed electrode is fixed, a diaphragm structure that forms a sealed space between the diaphragm structure and the sensor main unit and a fixing member that is jointed to the diaphragm structure in a manner of surrounding a pressure receiving part of the diaphragm structure so as to lead a fluid to the pressure receiving part, wherein the diaphragm structure includes a flat plane diaphragm main unit and first and second ring members each having a known thermal expansion coefficient that are respectively provided on both sides of a circumference of the diaphragm main unit.
摘要翻译：本发明适用于防止由于传感器主体和固定部件的热膨胀系数引起的热应力而使膜片变形，并且包括固定固定电极的传感器主单元，形成固定电极的膜结构隔膜结构和传感器主单元之间的密封空间和以围绕隔膜结构的受压部分的方式接合到隔膜结构的固定构件，以便将流体引导到受压部分，其中隔膜结构包括平面隔膜主单元和分别设置在隔膜主体的圆周的两侧上的具有已知的热膨胀系数的第一和第二环构件。

2. 发明授权

US08429979B2 Capacitance type pressure sensor 有权
标题翻译：电容式压力传感器
公开(公告)号：US08429979B2
公开(公告)日：2013-04-30
申请号：US13115361
申请日：2011-05-25
申请人： Akira Kuwahara , Takehisa Hataita , Soutaro Kishida
发明人： Akira Kuwahara , Takehisa Hataita , Soutaro Kishida
IPC分类号： G01L9/12
CPC分类号： G01L9/0072 , G01L19/04 , G01L19/0627
摘要： The present invention is adapted to prevent a diaphragm from being deformed by a thermal stress caused by thermal expansion coefficients of a sensor main unit and a fixing member and includes a sensor main unit to which a fixed electrode is fixed, a diaphragm structure that forms a sealed space between the diaphragm structure and the sensor main unit and a fixing member that is jointed to the diaphragm structure in a manner of surrounding a pressure receiving part of the diaphragm structure so as to lead a fluid to the pressure receiving part, wherein the diaphragm structure includes a flat plane diaphragm main unit and first and second ring members each having a known thermal expansion coefficient that are respectively provided on both sides of a circumference of the diaphragm main unit.
摘要翻译：本发明适用于防止由于传感器主体和固定部件的热膨胀系数引起的热应力而使膜片变形，并且包括固定固定电极的传感器主单元，形成固定电极的膜结构隔膜结构和传感器主单元之间的密封空间和以围绕隔膜结构的受压部分的方式接合到隔膜结构的固定构件，以便将流体引导到受压部分，其中隔膜结构包括平面隔膜主单元和分别设置在隔膜主体的圆周的两侧上的具有已知的热膨胀系数的第一和第二环构件。

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