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111. 发明授权

US07626319B2 Three-dimensional electroactive polymer actuated devices 有权
标题翻译：三维电活性聚合物致动装置
公开(公告)号：US07626319B2
公开(公告)日：2009-12-01
申请号：US11361676
申请日：2006-02-24
申请人： Jonathan R. Heim
发明人： Jonathan R. Heim
IPC分类号： H01L41/00
CPC分类号： F04B43/04 , B64C33/02 , F04B43/0054 , F21V14/02 , F21V14/04 , H01L41/0986 , Y10S310/80
摘要： Devices employing electroactive polymer actuators are disclosed. Acrylic dielectric material based actuators are optionally provided in which architectures are presented that allow for improved power output as compared with other known acrylic dielectric material based transducers. Such technology may be applied in motor-driven applications, lightweight flight applications and lighting applications among others.
摘要翻译：公开了使用电活性聚合物致动器的装置。可选地提供基于丙烯酸类介电材料的致动器，其中提出了与其它已知的基于丙烯酸介电材料的换能器相比，能够提供更好的功率输出的结构。这种技术可以应用于电动机应用，轻型飞行应用和照明应用等。

112. 发明授权

US07615833B2 Film bulk acoustic resonator package and method of fabricating same 有权
标题翻译：薄膜体声波谐振器封装及其制造方法
公开(公告)号：US07615833B2
公开(公告)日：2009-11-10
申请号：US10890343
申请日：2004-07-13
申请人： John D. Larson, III , Qing Bai , Farid Matta , Tracy Verhoeven
发明人： John D. Larson, III , Qing Bai , Farid Matta , Tracy Verhoeven
IPC分类号： H01L41/00
CPC分类号： H03H9/105 , H03B5/326 , H03H3/02 , H03H9/0547 , H03H9/706
摘要： A microfabricated device has a first substrate, a second substrate, a film bulk acoustic resonator (FBAR) device, and a circuit. The second substrate is bonded to the first substrate to define a chamber. The FBAR device is located on a surface of the first substrate and inside the chamber. The circuit is located on a surface of the second substrate and inside the chamber. An electrical connection connects the circuit and the FBAR device.
摘要翻译：微加工装置具有第一基板，第二基板，薄膜体声波谐振器（FBAR）装置和电路。第二基板被结合到第一基板以限定室。 FBAR装置位于第一基板的表面和室内。电路位于第二基板的表面和室内。电气连接连接电路和FBAR设备。

113. 发明授权

US07612953B2 Optical element module and image pickup device 失效
标题翻译：光学元件模块和图像拾取装置
公开(公告)号：US07612953B2
公开(公告)日：2009-11-03
申请号：US12242405
申请日：2008-09-30
申请人： Nobuyuki Nagai , Akira Ono , Yasuhiro Watanabe
发明人： Nobuyuki Nagai , Akira Ono , Yasuhiro Watanabe
IPC分类号： G02B7/02 , H01L41/00
CPC分类号： H04N5/2253 , G02B27/646 , G03B5/00 , H04N5/2254 , H04N5/23258 , H04N5/23287
摘要： An optical element module includes an optical element, and a plurality of actuator elements. In the module, each actuator element has an ion conductive polymer film and electrodes arranged on both sides of the film, and a whole of the actuator element is bent in a direction of thickness by applying a voltage between the electrodes, and the direction of the thickness of the actuator elements is a direction of an optical axis of the optical element, the actuator elements are arranged at equal intervals around the optical axis on a plane perpendicular to the optical axis, and a displacement due to the bend of one end part of at least one actuator element acts on one of a side surface and a bottom surface of the optical element to effect one of tilting and movement in the direction of the optical axis of the optical element.
摘要翻译：光学元件模块包括光学元件和多个致动元件。在该模块中，每个致动器元件具有离子导电聚合物膜和布置在膜的两侧上的电极，并且通过在电极之间施加电压，致动器元件的整体在厚度方向上弯曲，并且致动器元件的厚度是光学元件的光轴的方向，致动器元件在垂直于光轴的平面上围绕光轴以相等的间隔布置，并且由于一端部的弯曲而产生的位移至少一个致动器元件作用在光学元件的侧表面和底表面中的一个上，以实现在光学元件的光轴的方向上的倾斜和移动之一。

114. 发明授权

US07596841B2 Micro-electromechanical devices and methods of fabricating thereof 有权
标题翻译：微机电装置及其制造方法
公开(公告)号：US07596841B2
公开(公告)日：2009-10-06
申请号：US11568114
申请日：2004-04-23
申请人： Kui Yao , Xiao Song Eric Tang , Peng Gao , Xujiang He , Jian Zhang , Santiranjan Shannigrahi
发明人： Kui Yao , Xiao Song Eric Tang , Peng Gao , Xujiang He , Jian Zhang , Santiranjan Shannigrahi
IPC分类号： H01L41/22 , H01L41/00
CPC分类号： H01L41/0946 , H01L41/1876 , H01L41/25 , H01L41/318 , Y10T29/42 , Y10T29/435 , Y10T29/49005 , Y10T29/4902 , Y10T29/49144 , Y10T29/49153
摘要： An electromechanical device includes a support structure formed by attaching inner surfaces of second and third substrates to a first substrate. The support structure includes at least one cavity between the second and third layers. An electromechanical active element is provided on an outer surface of at least one of the second or third layers.
摘要翻译：机电装置包括通过将第二和第三基板的内表面附接到第一基板而形成的支撑结构。支撑结构包括在第二和第三层之间的至少一个空腔。机电有源元件设置在第二层或第三层中的至少一层的外表面上。

115. 发明授权

US07594307B2 Method for manufacturing piezoelectric resonator 有权
标题翻译：制造压电谐振器的方法
公开(公告)号：US07594307B2
公开(公告)日：2009-09-29
申请号：US11188981
申请日：2005-07-25
申请人： Tetsuya Morimura , Yoshihiro Ikeda , Makoto Irie , Motonori Matsushita
发明人： Tetsuya Morimura , Yoshihiro Ikeda , Makoto Irie , Motonori Matsushita
IPC分类号： H01L41/22 , H01L41/00
CPC分类号： H03H9/177 , H03H3/04 , H03H9/131 , H03H9/132 , H03H9/56 , H03H2003/0428 , H04R17/10 , Y10T29/42 , Y10T29/49128 , Y10T29/4913 , Y10T29/49135 , Y10T29/49156
摘要： A method of manufacturing a piezoelectric resonator includes forming first electrodes larger than vibrating electrodes in an area D1 including the vibrating electrodes on obverse and reverse surfaces of a piezoelectric substrate, and measuring the resonant frequency fr1 of a resonator including the first electrodes. The thickness of a metallic thin film required for frequency adjustment is determined based on the measured resonant frequency. Then, second electrodes formed of the metallic thin film having the determined thickness are formed in an area D2 including at least the vibrating electrodes of the piezoelectric substrate. By removing unnecessary portions of the first and second electrodes, a pattern of the resulting vibrating electrodes is formed. Thus, high-accuracy frequency adjustment can be achieved without the need for complicated positioning.
摘要翻译：制造压电谐振器的方法包括在压电基片的正面和反面上形成包括振动电极的区域D1中的大于振动电极的第一电极，以及测量包括第一电极的谐振器的谐振频率fr1。基于所测得的谐振频率来确定频率调节所需的金属薄膜的厚度。然后，在至少包括压电基板的振动电极的区域D2中形成具有确定厚度的金属薄膜形成的第二电极。通过去除第一和第二电极的不需要的部分，形成所得到的振动电极的图案。因此，可以实现高精度的频率调整，而不需要复杂的定位。

116. 发明申请

US20090231395A1 METHOD OF DRIVING PIEZOELECTRIC ACTUATOR AND METHOD OF DRIVING LIQUID EJECTION HEAD 有权
标题翻译：驱动压电致动器的方法和驱动液体喷射头的方法
公开(公告)号：US20090231395A1
公开(公告)日：2009-09-17
申请号：US12401074
申请日：2009-03-10
申请人： Ryuji TSUKAMOTO
发明人： Ryuji TSUKAMOTO
IPC分类号： B41J2/045 , H01L41/00
CPC分类号： B41J2/14233 , B41J2/04581 , B41J2/155 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1642 , B41J2/1646 , B41J2002/14459 , B41J2202/20
摘要： A method of driving a piezoelectric actuator has the step of driving a piezoelectric actuator including a diaphragm, a lower electrode formed on one surface of the diaphragm, a piezoelectric film formed in epitaxial growth or oriented growth on an opposite side of the lower electrode to the diaphragm so as to be preferentially oriented in a (111) direction, and an upper electrode formed on an opposite side of the piezoelectric film to the lower electrode, by application of an electric field in a direction opposite to a direction of polarization of the piezoelectric film.
摘要翻译：驱动压电致动器的方法具有驱动压电致动器的步骤，所述压电致动器包括隔膜，形成在隔膜的一个表面上的下电极，在下电极的相对侧上以外延生长或取向生长形成的压电膜，通过在与压电体的偏振方向相反的方向上施加电场，使得在（111）方向上优先取向的膜片和形成在压电膜的相对侧的上电极与下电极电影。

117. 发明申请

US20090207214A1 PIEZOELECTRIC ELEMENT SUBSTRATE, LIQUID DROPLET EJECTING HEAD, LIQUID DROPLET EJECTING DEVICE, AND PIEZOELECTRIC ELEMENT SUBSTRATE MANUFACTURING METHOD 有权
标题翻译：压电元件基板，液滴喷射头，液滴喷射装置和压电元件基板制造方法
公开(公告)号：US20090207214A1
公开(公告)日：2009-08-20
申请号：US12243039
申请日：2008-10-01
申请人： Takashi Yagi , Hiroyuki Usami
发明人： Takashi Yagi , Hiroyuki Usami
IPC分类号： B41J2/045 , H01L41/00
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2/1645 , B41J2/1646 , H01L41/0973 , H01L41/316
摘要： A piezoelectric element substrate is provided with a support substrate, an insulating orientation auxiliary layer formed on the support substrate, a lower electrode layer formed on the orientation auxiliary layer so that an uncoated portion where the orientation auxiliary layer is not coated with the lower electrode layer is constituted at least a portion thereof, a piezoelectric substance layer formed on the lower electrode layer and the uncoated portion of the orientation auxiliary layer, and an upper electrode layer formed on the piezoelectric substance layer, wherein the orientation auxiliary layer and the piezoelectric substance layer comprise a material of the same crystal system.
摘要翻译：压电元件基板设置有支撑基板，形成在支撑基板上的绝缘取向辅助层，形成在取向辅助层上的下部电极层，使得未涂覆有取向辅助层的未涂覆部分的下部电极层构成其至少一部分，形成在下电极层和取向辅助层的未涂覆部分上的压电体层和形成在压电体层上的上电极层，其中定向辅助层和压电体层包括相同晶体系的材料。

118. 发明授权

US07560852B2 Piezoelectric actuator, method for manufacturing piezoelectric actuator, and liquid transporting apparatus 有权
标题翻译：压电致动器，压电致动器的制造方法以及液体输送装置
公开(公告)号：US07560852B2
公开(公告)日：2009-07-14
申请号：US12070407
申请日：2008-02-19
申请人： Hiroto Sugahara
发明人： Hiroto Sugahara
IPC分类号： H01L41/00
CPC分类号： B41J2/1626 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1634 , B41J2/1642 , B41J2/1646 , B41J2002/14266 , B41J2002/14491 , H01L41/0973 , H05K3/0058 , H05K3/363 , H05K2201/0367 , H05K2201/09036 , Y10T29/42
摘要： A piezoelectric actuator includes a supporting member in which pressure chambers are formed, a vibration plate which is joined to a joining section of the supporting member, a piezoelectric layer formed on the vibration plate, and an FPC provided on the piezoelectric layer. A contact section of an electrode formed on the piezoelectric layer and a terminal section of the FPC are electrically connected via a bump formed on the terminal section. A recess is formed on an upper surface of the supporting member right below the bump. While joining the piezoelectric layer and a wire member, any damage of the piezoelectric layer and any poor connection do not occur.
摘要翻译：压电致动器包括形成有压力室的支撑构件，与支撑构件的接合部接合的振动板，形成在振动板上的压电层和设置在压电层上的FPC。形成在压电层上的电极的接触部分和FPC的端子部分经由形成在端子部分上的凸块电连接。在凸起正下方的支撑构件的上表面上形成凹部。在连接压电层和线构件时，不会发生压电层的任何损坏和连接不良。

119. 发明申请

US20090152998A1 MICRORESONATOR 有权
标题翻译：微型计算机
公开(公告)号：US20090152998A1
公开(公告)日：2009-06-18
申请号：US12266471
申请日：2008-11-06
申请人： Nicolas Abele , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stephane Monfray , Fabrice Cassett
发明人： Nicolas Abele , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stephane Monfray , Fabrice Cassett
IPC分类号： H01L41/00 , H01L21/20
CPC分类号： H03H9/2405 , H03H3/0072 , H03H2009/02496
摘要： A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.
摘要翻译：一种微谐振器，包括单晶硅谐振元件和靠近谐振元件放置的至少一个激活电极，其中谐振元件放置在覆盖衬底的半导体层的开口中，激活电极形成在半导体层中并在开幕式的水平。

120. 发明申请

US20090146529A1 STARTING-PROCESS CONTROLLER FOR STARTING A PIEZOMOTOR 审中-公开
标题翻译：起动过程控制器，用于启动电动机
公开(公告)号：US20090146529A1
公开(公告)日：2009-06-11
申请号：US12369783
申请日：2009-02-12
申请人： MATTHIAS WENDT , HANS STEINBUSCH , GERHARD DIEFENBACH , CHRISTIAN REICHINGER
发明人： MATTHIAS WENDT , HANS STEINBUSCH , GERHARD DIEFENBACH , CHRISTIAN REICHINGER
IPC分类号： H01L41/00
CPC分类号： H02N2/142
摘要： A starting-process controller for starting a piezomotor, having a voltage-controlled oscillator, a power output stage, and a resonant converter. The oscillator generates the control signals required for the power output stage and the resonance converter converts the stepped output voltage from the power output stage into a sinusoidal voltage at the output. The resonance converter drives the piezomotor with the voltage. The motor current that flows when the piezomotor is driven is measured and compared with the phase of the drive voltage in a phase comparator. The comparison output signal is a measure of the phase difference at the time between current and voltage. A phase-locked loop filter smoothes the phase-difference signal for controling the oscillator. The controller includes a start-assisting circuit element that fixes the output voltage from the phase-locked loop filter at start-up and thus applies a constant voltage to the input of the voltage-controlled oscillator.
摘要翻译：用于启动具有压控振荡器，功率输出级和谐振转换器的压电机的启动过程控制器。振荡器产生功率输出级所需的控制信号，并且谐振变换器将来自功率输出级的阶梯式输出电压转换为输出端的正弦电压。谐振转换器用电压驱动压电电动机。在驱动压电电动机时流动的电动机电流被测量并与相位比较器中的驱动电压的相位进行比较。比较输出信号是电流和电压之间相位差的度量。锁相环滤波器平滑用于控制振荡器的相位差信号。控制器包括启动辅助电路元件，其在启动时固定来自锁相环滤波器的输出电压，从而对压控振荡器的输入端施加恒定电压。

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