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    • 113. 发明授权
    • Vacuum tube and vacuum tube manufacturing apparatus and method
    • 真空管及真空管制造装置及方法
    • US08502450B2
    • 2013-08-06
    • US10594896
    • 2005-03-31
    • Tadahiro OhmiAkihiro Morimoto
    • Tadahiro OhmiAkihiro Morimoto
    • H01J61/12H01J61/22H01J17/20
    • H01J9/395H01J7/02H01J9/38H01J9/385H01J17/20H01J21/00H01J37/18H01J61/20H01J61/24
    • With respect to a vacuum tube having a reduced pressure vessel containing an electric discharge gas sealed therein, problems such as the lowering of discharge efficiency owing to an organic material, moisture or oxygen remaining in the reduced pressure vessel have taken place conventionally. It has been now found that the selection of the number of water molecules, the number of molecules of an organic gas and the number of oxygen molecules remaining in the reduced pressure vessel, in a relation with the number of molecules of a gas contributing the electric discharge allows the reduction of the adverse effect by the above-mentioned remaining gas. Specifically, the selection of the number of molecules of the above electric discharge gas being about ten times that of the above-mentioned remaining gas or more can reduce the adverse effect by the above-mentioned remaining gas.
    • 对于具有密封在其中的放电气体的减压容器的真空管,常规地发生诸如由于有机材料引起的排出效率降低,残留在减压容器中的水分或氧气的问题。 现在已经发现,选择水分子的数量,有机气体的分子数和残留在减压容器中的氧分子的数量与导致电气的气体的分子数的关系 放电允许通过上述剩余气体减少不利影响。 具体而言,选择上述放电气体的分子数为上述剩余气体的10倍以上的分子数量,可以减少上述剩余气体的不利影响。
    • 116. 发明授权
    • Diaphragm valve for the vacuum exhaustion system
    • 用于真空排气系统的隔膜阀
    • US07416165B2
    • 2008-08-26
    • US10546032
    • 2004-02-09
    • Tadahiro OhmiNobukazu IkedaMichio YamajiMasafumi KitanoAkihiro Morimoto
    • Tadahiro OhmiNobukazu IkedaMichio YamajiMasafumi KitanoAkihiro Morimoto
    • F16K31/122F16K7/17
    • F16K7/16F16K51/02
    • A diaphragm valve 1 is provided with a body 2 having a flow-in passage 6, a flow-out passage 7, and a valve seat 8 formed between the passages; a diaphragm 3 installed in the body 2 and permitted to rest on and move away from the valve seat 8; and a driving means 4 installed on the body 2 to allow the diaphragm 3 to rest on and move away from the valve seat 8, wherein synthetic resin films 5 of predetermined thickness are coated on fluid-contacting parts 25 of the afore-mentioned body 2 and diaphragm 3. A diaphragm valve in accordance with the present invention prevents corrosion of the valve members caused by accumulation and adherence of substances produced by thermal decomposition, and prevents clogging caused by substances produced, and prevents seat leakage when applied in the vacuum exhaust system of a semiconductor manufacturing facility.
    • 隔膜阀1设置有主体2,主体2具有形成在通道之间的流入通道6,流出通道7和阀座8; 隔膜3安装在主体2中并允许搁置在阀座8上并远离阀座8; 以及安装在主体2上的驱动装置4,以允许隔膜3搁置在阀座8上并远离阀座8,其中预定厚度的合成树脂膜5涂覆在上述主体2的流体接触部分25上 和隔膜3.根据本发明的隔膜阀防止由热分解产生的物质的积聚和粘附引起的阀构件的腐蚀,并且防止由所产生的物质引起的堵塞,并且当应用于真空排气系统时防止阀座泄漏 的半导体制造设施。