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    • 111. 发明授权
    • Low-profile image formation apparatus
    • 低调图像形成装置
    • US6011586A
    • 2000-01-04
    • US759497
    • 1996-12-04
    • Bill LepiorE. John McGarryFariborz RostamiGilbert Chiang
    • Bill LepiorE. John McGarryFariborz RostamiGilbert Chiang
    • H04N7/18G02B13/16
    • H04N7/18
    • An apparatus is provided for forming an image of the periphery of an object with a camera having optics disposed at a working distance that is significantly less than the focal length of the optics, without introducing image distortion. The invention provides an image formation apparatus having a reduced effective profile height by exploiting a folded optical path to provide reduced working distance between a camera and an object of interest, such as a semiconductor wafer, as compared with direct viewing of the object. In a preferred embodiment, the invention includes two reflecting substrates, a first reflecting substrate and a second reflecting substrate. The distance between the first and second reflecting substrates determines the number of times the light rays that form the image will bounce therebetween, and consequently, the number of images of an object periphery that will appear in the field of view (FOV) of the camera. The invention provides an image formation system that can operate within the small or narrow enclosures of some existing wafer fabrication equipment. The invention also provides reduced camera vibration.
    • 提供了一种装置,用于利用具有光学器件的照相机来形成物体的周边的图像,该光学器件设置在远远小于光学器件的焦距的工作距离处,而不引入图像失真。 本发明提供了一种图像形成装置,其具有通过利用折叠的光学路径降低的有效轮廓高度,以提供相机和感兴趣对象(例如半导体晶片)之间相对于对象的直接观看而减小的工作距离。 在优选实施例中,本发明包括两个反射基板,第一反射基板和第二反射基板。 第一和第二反射基板之间的距离决定了形成图像的光线将在它们之间弹起的次数,因此,将会出现在相机的视野(FOV)中的物体周边的图像数量 。 本发明提供一种图像形成系统,其可以在一些现有的晶片制造设备的小或窄的外壳内操作。 本发明还提供减少的相机振动。
    • 112. 发明授权
    • Apparatus and method for inspecting wirebonds on leads
    • 用于检查引线上的引线的装置和方法
    • US5991436A
    • 1999-11-23
    • US491335
    • 1995-06-30
    • Juha Tapio KoljonenJohn Phillip Petry, III
    • Juha Tapio KoljonenJohn Phillip Petry, III
    • G01N21/88G01R31/28G01R31/311G06K9/00
    • G01R31/311G01N21/88G01R31/2853H01L2224/48247H01L2224/48455H01L2224/78301H01L2224/859
    • An apparatus and method are provided for automatic visual inspection of crescent-shaped wire bonds. The apparatus includes image acquisition means for acquiring an image of a wire and an image of a crescent-shaped wire bond. A search model is used that includes a crescent-modeling portion, and can also advantageously include a wire modeling portion. Search functionality is used to find an image of the crescent-shaped wire bond, using the search model, so as to provide location information regarding the location of the crescent base, and shape-match information regarding the reliability of the found location information. The invention is useful for verifying the correct position of the crescent bond to ensure good electrical contact. In addition, the invention greatly simplifies the task of two other important automated visual inspection steps: wire location and crescent shape determination. Presence/absence of the crescent bond can also be determined using this information.
    • 提供一种用于自动目视检查月牙形引线接合的装置和方法。 该装置包括用于获取线的图像和月牙形线接合的图像的图像获取装置。 使用包括新月形建模部分的搜索模型,并且还可以有利地包括线建模部分。 搜索功能用于使用搜索模型来查找新月形线键的图像,以便提供关于新月基座的位置的位置信息,以及关于找到的位置信息的可靠性的形状匹配信息。 本发明可用于验证新月形粘合剂的正确位置以确保良好的电接触。 此外,本发明大大简化了另外两个重要的自动化视觉检查步骤的任务:线定位和月牙形确定。 也可以使用该信息来确定月牙形的存在/不存在。
    • 114. 发明授权
    • Machine vision methods using feedback to determine an orientation, pixel
width and pixel height of a field of view
    • 机器视觉方法使用反馈来确定视场的方向,像素宽度和像素高度
    • US5978080A
    • 1999-11-02
    • US938443
    • 1997-09-25
    • David J. MichaelAaron S. Wallack
    • David J. MichaelAaron S. Wallack
    • G01B11/00G01J1/02
    • G01B11/002
    • The invention provides machine vision methods and apparatus for determining a calibration relationship between the imaging reference frame of an image acquisition device (e.g., a camera) and the motion reference frame of a moveable object (e.g., a motion stage) by positioning the object so that a fiducial thereon (e.g., a calibration mark) lies at a first fiducial position in the field of view and recording the corresponding position of the object in the motion reference frame. The object is then repositioned so that the fiducial moves to a second fiducial position in the field of view. Again, the corresponding position of the object in the motion reference frame is recorded. Likewise, the object is moved to a third fiducial position in the field of view, and its corresponding position in the motion reference frame is recorded. A calibration relationship between the motion reference frame of the object and the imaging reference frame of the camera as a function of the first, second and third fiducial positions and as a function of the first, second and third object positions.
    • 本发明提供了一种机器视觉方法和装置,用于通过定位对象来确定图像采集装置(例如,相机)的成像参考系和可移动对象(例如,运动舞台)的运动参考系之间的校准关系。 其上的基准(例如,校准标记)位于视场中的第一基准位置,并将物体的对应位置记录在运动参考系中。 然后将对象重新定位,使得基准在视野中移动到第二基准位置。 再次,记录对象在运动参考系中的对应位置。 同样地,物体被移动到视野中的第三基准位置,并记录其在运动参考系中的对应位置。 作为第一,第二和第三基准位置的函数,并且作为第一,第二和第三对象位置的函数的对象的运动参考帧和摄像机的成像参考帧之间的校准关系。
    • 115. 发明授权
    • Machine vision methods for determining characteristics of an object
using boundary points and bounding regions
    • 用于使用边界点和边界区域确定对象特征的机器视觉方法
    • US5974169A
    • 1999-10-26
    • US820870
    • 1997-03-20
    • Ivan A. Bachelder
    • Ivan A. Bachelder
    • G06T5/00G06K9/00
    • G06T7/0083G06T2207/10016G06T2207/30141
    • Machine vision methods for determining a characteristic (such as position, orientation, size, center of mass, and boundary) of an object in an image include finding points in the image on the boundary of the object; identifying bounding boxes, or regions, in the image that correspond to edges of the object; and labeling boundary points to denote which respective edges, if any, to which they belong based on (i) the locations and orientations of those points, and (ii) locations of the plural bounding boxes. Points apparently lying on a boundary of the object, but outside a bounding box, can be ignored--and, more particularly, are denoted as not corresponding to an edge. Likewise, apparent boundary points lying within a bounding box, but at an angle not associated with the corresponding to the respective edge of the object, can also be ignored. Characteristics of the imaged object are determined as a function of those boundary points found to correspond to an edge of the object (e.g., points lying within a bounding box, at the expected angle, and not too far from a line connecting similarly situated points). Characteristics of the object, such as position, orientation, size, center of mass, and boundary points, can be determined in the image reference frame.
    • 用于确定图像中的对象的特征(诸如位置,方向,大小,质心和边界)的机器视觉方法包括在对象边界上的图像中找到点; 识别对应于对象边缘的图像中的边界框或区域; 并标注边界点,以根据(i)这些点的位置和方向,以及(ii)多个边界框的位置来表示它们属于哪些相应边缘(如果有的话)。 明显地位于物体边界上,而在边界框之外的点可以被忽略,并且更具体地,被表示为不对应于边缘。 类似地,也可以忽略位于边界框内但与对应于对象的相应边缘不相关的角度的明显边界点。 根据与对象边缘相对应的边界点(例如,位于边界框内的点,处于预期角度,并且距离连接类似位置的点不太远的点)确定成像对象的特征, 。 可以在图像参考框架中确定物体的特征,例如位置,方向,尺寸,质心和边界点。
    • 116. 发明授权
    • Labeled projection of digital images
    • 数字图像的标注投影
    • US5901241A
    • 1999-05-04
    • US759853
    • 1996-12-02
    • Juha KoljonenDavid J. Michael
    • Juha KoljonenDavid J. Michael
    • G01B11/00G01B11/24G06T1/00G06T7/00G06T7/60G06K9/46
    • G06K9/4633G06T7/0004G06T7/004G06T7/602G06T7/606G06T2207/30152
    • The invention automatically inspects the bond of a wire to a contact pad on a semiconductor chip. The apparatus includes a movable platform for holding semiconductor chips situated in lead frames; a video camera for sensing images; illumination means for illuminating a chip in a lead frame; an image processor to digitize and analyze the images; a bonding mechanism; and a host controller electronically connected to bonding mechanism, movable platform, video camera, and image processor. Image processor locates a bond on a pad in a digitized image and provides a first nominal center of ball bond image. The invention aligns the center of a polar coordinate transform image having one or more segments with the nominal center of ball bond image and evaluates ball bond image using the polar coordinate transform image to create a polar projection histogram array and store it. An edge filter is applied to histogram array to detect peaks and store their number and values. Polar coordinate transform image is aligned with a next nominal ball center location until a predetermined number of potential ball center locations is exhausted. The maximum peak in the list of stored peaks is selected as the radius of bond from which the size and position of bond is computed and reported to host controller for further action.
    • 本发明自动检查导线与半导体芯片上接触焊盘的接合。 该装置包括用于保持位于引线框架中的半导体芯片的可移动平台; 用于感测图像的摄像机; 用于照亮引线框架中的芯片的照明装置; 图像处理器,用于数字化和分析图像; 粘合机制; 以及主机控制器,电连接到接合机构,可移动平台,摄像机和图像处理器。 图像处理器将数字化图像中的焊盘定位在焊盘上,并提供第一个标称中心的焊球图像。 本发明将具有一个或多个段的极坐标变换图像的中心与球形接合图像的标称中心对准,并使用极坐标变换图像评估球接合图像,以创建极性投影直方图阵列并将其存储。 边缘滤波器应用于直方图阵列以检测峰值并存储其数量和值。 极坐标变换图像与下一个标称球中心位置对齐,直到预定数量的潜在球中心位置被耗尽。 选择存储峰值列表中的最大峰值作为键的半径,从中计算结合的大小和位置并将其报告给主机控制器进行进一步的操作。
    • 117. 发明授权
    • Golden template comparison for rotated and/or scaled images
    • 旋转和/或缩放图像的金色模板比较
    • US5850466A
    • 1998-12-15
    • US391842
    • 1995-02-22
    • Jean-Pierre Schott
    • Jean-Pierre Schott
    • G06K9/64G06T3/40G06K9/68G06T3/20G06T3/60
    • G06T3/403G06K9/6203
    • A method for Golden Template Comparison (GTC) is provided that can be used to efficiently perform flaw and defect detection on a two-dimensional test image that is at least rotated and/or scaled and/or sub-pixel translated. Run-time inspection speed and accuracy is substantially improved by retreiving a golden template image that is rotated and/or scaled and/or translated in a manner substantially similar to the test image. This is accomplished by storing, in an array, a varied plurality of golden template images, each golden template image being characterized by a different combination of at least rotation and/or scale and/or sub-pixel translation. The array is indexed by the respective quantized rotation and/or quantized scale and/or sub-pixel translation of each version of the golden template image. The array can be either one-dimensional or multi-dimensional. At run-time, the values of the rotation and/or scale and/or sub-pixel translation of each test image are measured, and then quantized, thereby providing a unique index into the multi-dimensional array of reference and threshold images. The reference and threshold images stored at the memory location corresponding to the index are retrieved and then used for comparison with the test image to provide a difference image to be analyzed for flaws or defects.
    • 提供了一种用于金模板比较(GTC)的方法,其可用于在至少旋转和/或缩放和/或子像素翻译的二维测试图像上有效地执行缺陷和缺陷检测。 通过以基本上类似于测试图像的方式回溯以旋转和/或缩放和/或翻译的金色模板图像来大大改善运行时检查速度和精度。 这是通过以阵列形式存储不同的多个金色模板图像来实现的,每个黄金模板图像的特征在于至少旋转和/或缩放和/或子像素平移的不同组合。 通过金色模板图像的每个版本的相应的量化旋转和/或量化尺度和/或子像素平移来对阵列进行索引。 阵列可以是一维还是多维。 在运行时,测量每个测试图像的旋转和/或缩放和/或子像素平移的值,然后进行量化,从而向参考和阈值图像的多维阵列提供唯一的索引。 检索存储在与索引对应的存储器位置处的参考和阈值图像,然后用于与测试图像进​​行比较,以提供要分析缺陷或缺陷的差异图像。
    • 118. 发明授权
    • Vision coprocessing
    • 视觉协同处理
    • US5657403A
    • 1997-08-12
    • US891955
    • 1992-06-01
    • Robert Anthony WolffSteven Mark RosenthalWilliam Michael SilverJean-Pierre Schott
    • Robert Anthony WolffSteven Mark RosenthalWilliam Michael SilverJean-Pierre Schott
    • G06T5/20G06K9/54G06K9/60
    • G06T5/20
    • A coprocessor in an image processing system is coupled to the bus to which a CPU and RAM holding image data are also coupled. The coprocessor extracts an input pixel stream corresponding to input images from selected bus transactions, performs computations on the input stream to produce output pixel streams corresponding to output images, and inserts the output pixel streams into selected CPU-to-memory bus transactions so that the memory stores the data. The CPU generates the selected bus transactions with specially marked address and/or control signals. The coprocessor includes a lookup table, and a first row delay. The row delay accumulates the three most recent rows of input pixels, which are sent to Sobel and rank processing sections for neighborhood processing. The results are thresholded and formatted, and are either output directly or passed through an additional pair of row delays to accumulate three rows of result data for neighborhood peak detection.
    • 图像处理系统中的协处理器耦合到总线,CPU和RAM保持图像数据也被耦合到总线上。 协处理器从所选择的总线事务中提取与输入图像相对应的输入像素流,对输入流执行计算,以产生与输出图像相对应的输出像素流,并将输出像素流插入到选定的CPU到存储器总线事务中, 内存存储数据。 CPU通过特别标记的地址和/或控制信号生成所选择的总线事务。 协处理器包括查找表和第一行延迟。 行延迟累积输入像素的三个最近行,其被发送到Sobel和等级处理部分用于邻域处理。 结果被阈值化和格式化,或者直接输出或通过附加的一对行延迟,以累积三行用于邻域峰值检测的结果数据。
    • 119. 发明授权
    • Automated optical inspection apparatus
    • 自动光学检测仪器
    • US5532739A
    • 1996-07-02
    • US389437
    • 1995-02-15
    • Arman M. GarakaniJuha Koljonen
    • Arman M. GarakaniJuha Koljonen
    • B23K20/00B23K31/12B23K37/04G01R31/04G01R31/309G06T3/00G06T11/00H04N7/18
    • H01L24/85B23K20/007B23K31/12B23K37/04G01R31/04G01R31/309G06T11/00G06T7/001G06T7/0024H01L24/78G06T2207/30152H01L2224/48091H01L2224/48247H01L2224/48463H01L2224/49171H01L2224/7865H01L2224/85205H01L2224/859H01L2924/00014H01L2924/01006H01L2924/01015H01L2924/01033H01L2924/01039H01L2924/01082H01L2924/01322H01L2924/14
    • This invention provides a method and apparatus for automatically locating the bond of a wire to a lead flame and semiconductor chip or similar device as an in-process operation to facilitate in-process inspection. The apparatus includes a wire bonding machine, or similar apparatus, having a movable platform such as an X-Y table for holding semiconductor chips situated in lead frames; a video camera or other optical sensing or imaging device for generating images, which camera is typically positioned over the target chip and lead flame to be bonded; illumination means for illuminating the chip in a lead flame; an image processor capable of digitizing and analyzing the optically sensed images; a bonding mechanism; and a host controller connected to the bonding mechanism, the movable platform, the camera and the image processor. The apparatus generates and stores a pre-bond digital image of the semiconductor chip in the lead flame before bonding has occurred; connects one or more wires between the chip and lead frame by any of a number of means such as ultrasonic bonding, heat bonding, conductive glue bonding or other means; generates and stores a post-bond digital image of the now-bonded chip in its lead frame; registers the pre-bond and post-bond stored digital images so that analysis can be done; and permits inspection of the results of the wire bonds according to appropriate criteria.
    • 本发明提供了一种用于自动地将引线键合到引线火焰和半导体芯片或类似装置的方法和装置,作为在线操作以便于在线检查。 该装置包括具有诸如X-Y工作台的可移动平台的引线接合机或类似装置,用于保持位于引线框架中的半导体芯片; 用于产生图像的摄像机或其他光学感测或成像装置,该相机通常位于目标芯片上方并且要接合的引导火焰; 用于在铅火焰中照射芯片的照明装置; 能够数字化和分析光学感测图像的图像处理器; 粘合机制; 以及连接到接合机构,可移动平台,相机和图像处理器的主机控制器。 在发生接合之前,该装置产生并存储在铅火焰中的半导体芯片的预结合数字图像; 通过诸如超声波接合,热粘合,导电胶粘或其它方式的任何一种手段来连接芯片和引线框架之间的一条或多条线; 在其引线框中产生并存储现在粘合的芯片的后绑定数字图像; 注册预先存储和后结合存储的数字图像,以便进行分析; 并且可以根据适当的标准检查引线结果。
    • 120. 发明授权
    • Method and apparatus for interactively generating a computer program for
machine vision analysis of an object
    • 用于交互地生成用于对象的机器视觉分析的计算机程序的方法和装置
    • US5481712A
    • 1996-01-02
    • US43295
    • 1993-04-06
    • William M. SilverSamuel DrukerPhilip RomanikCarroll Arbogast
    • William M. SilverSamuel DrukerPhilip RomanikCarroll Arbogast
    • G06F9/44
    • G06F8/34
    • A system for interactively generating a computer program for machine vision analysis insures that the program is correct by permitting the operator to make only syntactically correct modifications to the program. The system includes an element for storing the computer program being generated. A further element displays the program to the operator. A positioning element demarks a location of interest within the program. A menu element displays permissible programming modifications for the location of interest. The menu element incorporates in its display of permissible programming modifications statements for machine vision analysis of an object image, e.g., calls to machine vision subroutines and functions. To facilitate specification of input parameters to those subroutines and functions, the imaging element can generate a candidate image of the object upon which the machine vision analysis is to be run. A graphical input element displays over that candidate image a graphical icon that the operator can manipulate to specify the parameters. A textual input element can display an icon, e.g., a dialog box, prompting the operator to designate textually input parameters for the machine vision tool. An update element responds to the operator selection by appropriately modifying the stored program.
    • 用于交互地生成用于机器视觉分析的计算机程序的系统通过允许操作者仅对程序进行语法正确的修改来确保程序是正确的。 该系统包括用于存储正在生成的计算机程序的元件。 另一个元素显示程序给操作员。 定位元素在程序中标出感兴趣的位置。 菜单元素显示对感兴趣的位置的允许的编程修改。 菜单元素包括对对象图像的机器视觉分析的允许编程修改语句的显示,例如对机器视觉子程序和功能的调用。 为了便于对这些子程序和功能的输入参数的指定,成像元件可以生成要在其上运行机器视觉分析的对象的候选图像。 图形输入元件在该候选图像上显示操作者可以操纵以指定参数的图形图标。 文本输入元件可以显示图标,例如对话框,提示操作者为机器视觉工具指定文本输入参数。 更新元件通过适当修改存储的程序来响应操作者的选择。