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    • 103. 发明申请
    • METHOD AND APPARATUS FOR GENERATING HIGHLY REPETITIVE PULSED PLASMAS
    • 用于产生高度重复脉冲等离子体的方法和装置
    • US20140263181A1
    • 2014-09-18
    • US13860393
    • 2013-04-10
    • Jaeyoung Park
    • Jaeyoung Park
    • H05H1/46C23F1/08C23C16/509
    • H05H1/46C23C16/0245C23C16/452C23C16/453C23C16/45557C23C16/505C23C16/515H01J37/32082H01J37/321H01J37/3211H01J37/32146H01L21/3065H05H2001/4667H05H2001/4682
    • A pulsed radio frequency inductive plasma source and method are provided. The source may generate plasma at gas pressures from 1 torr to 2000 torr. By utilizing high power RF generation from fast solid state switches such as Insulated-Gate Bipolar Transistor (IGBT) combined with the resonance circuit, large inductive voltages can be applied to RF antennas to allow rapid gas breakdown from 1-100 μs. After initial breakdown, the same set of switches or an additional rf pulsed power systems are utilized to deliver large amount of rf power, between 10 kW to 10 MW, to the plasmas during the pulse duration of 10 μs-10 ms. In addition, several methods and apparatus for controlling the pulse power delivery, timing gas and materials supply, constructing reactor and substrate structure, and operating pumping system and plasma activated reactive materials delivery system will be disclosed. When combined with the pulsed plasma generation, these apparatuses and the methods can greatly improve the applicability and the efficacy of the industrial plasma processing.
    • 提供脉冲射频感应等离子体源和方法。 源可以在1托至2000托的气体压力下产生等离子体。 通过利用与谐振电路相结合的诸如绝缘栅双极晶体管(IGBT)的快速固态开关的高功率射频产生,可以对RF天线施加大的感应电压,以允许从1-100μs的快速气体击穿。 在初始故障之后,在10μs-10 ms的脉冲持续时间期间,使用相同组的开关或附加的rf脉冲功率系统在10 kW至10 MW之间向等离子体提供大量的功率。 此外,将公开用于控制脉冲功率输送,正时气体和材料供应,构建反应器和基底结构以及操作泵送系统和等离子体激活反应物质输送系统的几种方法和装置。 当与脉冲等离子体产生相结合时,这些装置和方法可以大大提高工业等离子体处理的适用性和有效性。
    • 105. 发明授权
    • Method and device for coating a polymer film with an oxide layer
    • 用氧化物层涂覆聚合物膜的方法和装置
    • US08486488B2
    • 2013-07-16
    • US12092363
    • 2006-11-02
    • Pierre FayetTorsten OlofssonHans-Jurgen TillerThomas Richter
    • Pierre FayetTorsten OlofssonHans-Jurgen TillerThomas Richter
    • C23C16/00
    • C23C16/453C23C16/401C23C16/54
    • A web of a polymer film (1) is coated with an oxide layer, in particular with an SiOx barrier layer, by transporting the web with the aid of a rotatable drum (12) through a plurality of flame bands, which are directed in a radial direction from above against the circumferential surface of the drum, which extend at a distance from each other across the width of the web being supported and transported on this circumferential surface, and which are fed with a gas mixture including a combustible gas, an oxidant, and a silicon containing compound. Therein the circumferential surface of the rotatable drum is cooled to a predetermined temperature and the web is transported through the area of the tip of the inner flame region. Polymer films with barrier layers produced in the named way have at small layer thicknesses of less than 10 nm very good barrier properties.
    • 聚合物膜(1)的网由氧化物层,特别是用SiO x阻挡层涂覆,借助可旋转的鼓(12)通过多个火焰带传送网 径向方向从滚筒的圆周表面延伸,该圆周表面在该圆周表面上被支撑和输送的幅材的宽度上彼此间隔一定距离,并且被馈送有包括可燃气体,氧化剂 ,和含硅化合物。 其中,可旋转滚筒的圆周表面被冷却到预定温度,并且幅材被输送通过内火焰区域的尖端区域。 具有以指定方式制造的阻挡层的聚合物膜具有小于10nm的小层厚度非常好的阻隔性能。