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    • 105. 发明申请
    • Substrate assembly apparatus and substrate assembly method
    • 基板装配装置和基板装配方法
    • US20070052914A1
    • 2007-03-08
    • US11439953
    • 2006-05-25
    • Masaaki ItoYukinori NakayamaTatsuharu YamamotoHiroaki Imai
    • Masaaki ItoYukinori NakayamaTatsuharu YamamotoHiroaki Imai
    • G02F1/1339
    • G02F1/1341G02F1/1303G02F2001/133354G02F2001/13415G02F2202/28
    • With substrates to be bonded together becoming larger, there are problems in that a bonding apparatus needs to be built larger to maintain accuracy of products and operation of such a bonding apparatus becomes more complicated. A bonding apparatus includes Z-axis drive mechanisms, an upper chamber, and a lower chamber. The Z-axis drive mechanisms for moving an upper frame vertically are disposed at four corners of a mount. The upper chamber is suspended from the upper frame and has an upper table inside. The lower chamber has a lower table inside. The lower table is supported on the mount via a plurality of support legs. The upper chamber and the lower chamber are united together through a seal ring to define a vacuum chamber. The upper table is coupled to the upper frame and moved by the Z-axis drive mechanisms via the upper frame. Moving the upper frame moves the upper chamber vertically to open or close the vacuum chamber. The lower table is supported via a free joint stage between the plurality of support legs and the table. Further, the lower table is moved horizontally by a side thrust mechanism disposed on the outside of the vacuum chamber.
    • 随着接合的基板变得越来越大,存在的问题是需要将接合装置建立得更大以保持产品的精度,并且这种接合装置的操作变得更加复杂。 接合装置包括Z轴驱动机构,上室和下室。 用于垂直移动上框架的Z轴驱动机构设置在底座的四个角处。 上部室从上部框架悬挂并具有上部工作台。 下室内有一个较低的桌子。 下表通过多个支撑腿支撑在支架上。 上室和下室通过密封环结合在一起以限定真空室。 上表与上框架联接,并通过上框架由Z轴驱动机构移动。 移动上框架使上室垂直移动以打开或关闭真空室。 下表通过多个支撑腿和桌子之间的自由关节台支撑。 此外,下台由设置在真空室外侧的侧推力机构水平移动。
    • 108. 发明申请
    • Mask blanks inspection tool
    • 面罩毛坯检查工具
    • US20060138338A1
    • 2006-06-29
    • US11299202
    • 2005-12-09
    • Yoshihiro TezukaMasaaki Ito
    • Yoshihiro TezukaMasaaki Ito
    • G01J1/42
    • G01N21/9505G01N21/47G01N21/9501G01N2021/8822G01N2021/95676
    • Embodiments include determining whether defects exist in an extreme ultraviolet (EUV) light mask blank. Incident EUV light scattered or diffused by abnormalities in the layers of the mask blank may be measured, normalized, and compared to threshold values to determine if and where a defect exists. Normalizing may be performed by dividing a light intensity value for a pixel by the average of light intensity values for one or more rings of surrounding pixels. A defect may be determined by considering whether the normalized intensity value for a pixel is greater than a pixel threshold to identify the pixel is a candidate for a location with a defect; and by determining whether the sum of normalized light intensity values for a block of pixels including the pixel satisfies a pixel block threshold to determine whether the block scatters or diffuses a critical amount of light to identify a defect.
    • 实施例包括确定在极紫外(EUV)光掩模坯中是否存在缺陷。 可以测量,归一化和掩模掩模层中的异常散射或扩散的事件EUV光,并与阈值进行比较,以确定是否存在缺陷以及存在缺陷。 归一化可以通过将像素的光强度除以周围像素的一个或多个环的光强度值的平均值来执行。 可以通过考虑像素的归一化强度值是否大于像素阈值来识别像素来确定具有缺陷的位置的候选者来确定缺陷; 并且通过确定包括像素的像素块的归一化光强度值的和是否满足像素块阈值,以确定块是散射或扩散临界量的光以识别缺陷。
    • 109. 发明授权
    • Game device, game processing method and information recording medium
    • 游戏装置,游戏处理方法和信息记录介质
    • US06999094B1
    • 2006-02-14
    • US09660187
    • 2000-09-12
    • Masaaki Ito
    • Masaaki Ito
    • G09G5/00
    • A63F13/52A63F13/10A63F13/803A63F13/95A63F2300/206A63F2300/207A63F2300/64A63F2300/66A63F2300/8017
    • Smooth, stable and high quality game image is provided by accurately pre-reading background data required for image processing each time. The game device therefore reads background data required for a game that displays a condition of a moving vehicle within a virtual three-dimensional space together with a background in the main memory from a CD-ROM (recording medium) prior to image processing. This device comprises a pre-reading unit for pre-reading background data from a recording medium when reading a start line (reference line) set at a distant position in a specified distance away from the limit line of the visual field direction of display is crossing a new area. A recording medium is a medium that records background data by dividing it into a plurality of areas in advance, and the pre-reading unit comprises a unit for judging on which of the areas the reference line is crossing, and a reading unit for reading in memory the background data of the area judged as being crossed with the reference line.
    • 通过准确预读每次图像处理所需的背景数据,提供平滑,稳定和高质量的游戏图像。 因此,游戏装置从图像处理之前的CD-ROM(记录介质)读取显示虚拟三维空间内的移动车辆的状态以及主存储器中的背景所需的游戏所需的背景数据。 该装置包括预读单元,用于在读取距离显示器的视野方向的限制线正在交叉的指定距离处的远距离位置处读取起始线(参考线)时从记录介质预读取背景数据 一个新的领域。 记录介质是通过将背景数据预先分成多个区域来记录背景数据的介质,并且预读单元包括用于判断参考线正在交叉的区域的单元和用于读取的读取单元 记录被判断为与参考线交叉的区域的背景数据。