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    • 103. 发明授权
    • Apparatus for dry etching
    • 干蚀刻设备
    • US5076877A
    • 1991-12-31
    • US523422
    • 1990-05-15
    • Tetsuya UedaKohsaku Yano
    • Tetsuya UedaKohsaku Yano
    • H01L21/302H01L21/00
    • H01L21/67069
    • An apparatus for dry etching, which comprises a stage for supporting a substrate, a rotor having a center shaft, the stage and an arm connecting the stage to the center shaft, and a driving means for turning the rotor at the center shaft as a turning center in the direction tangential to the circumference of a circle established by turning of the surface of the substrate at the center shaft as a turning center, the rotor being housed in a chamber, can make uniform perpendicular submicron etching with radicals or a reactive gas without using ions and without damages on the substrate.
    • 一种用于干蚀刻的装置,包括用于支撑基板的台,具有中心轴的转子,所述台和将所述台与所述中心轴连接的臂,以及用于在所述中心轴处转动所述转子作为转动的驱动装置 中心在与通过在作为转动中心的中心轴处的基板的表面的转动而形成的圆的圆周方向上,转子被容纳在室中,可以进行具有自由基或反应气体的均匀的垂直亚微米蚀刻而没有 在基板上使用离子而不损坏。
    • 106. 发明授权
    • Semiconductor device
    • 半导体器件
    • US4949158A
    • 1990-08-14
    • US217975
    • 1988-07-12
    • Tetsuya Ueda
    • Tetsuya Ueda
    • H01L21/60H01L23/495H01L23/498
    • H01L23/49572H01L23/49827H01L2224/73253H01L2924/15173
    • A semiconductor device provided with a film having an opening and first and second surfaces; a semiconductor chip having first and second surfaces corresponding to the first and second surfaces of the film and positioned inside the opening along the film; a plurality of first leads fixed to the first surface of the film, a tip of each first lead being electrically connected to a first electrode provided on the first surface of the semiconductor chip; at least one second lead fixed to the first surface of the film; an electroconductive member in the form of, e.g., a film, fixed to the second surface of the film and electrically connected to a second electrode provided on the second surface of the semiconductor chip; and a connection member passing through the film and electrically connecting the second lead and the electroconductive member to each other. The second electrode on the second surface of the semiconductor chip is connected to the second lead on the first surface of the film via the electroconductive member and the connection member. There is also provided a method of manufacturing this type of semiconductor device.
    • 一种具有膜的半导体器件,具有开口和第一和第二表面; 半导体芯片,其具有与薄膜的第一和第二表面对应的第一和第二表面,并且沿着薄膜定位在开口内部; 多个第一引线固定在该膜的第一表面上,每个第一引线的末端电连接到设置在该半导体芯片的第一表面上的第一电极; 至少一个第二引线固定在该膜的第一表面上; 固定到膜的第二表面并且电连接到设置在半导体芯片的第二表面上的第二电极的例如薄膜形式的导电构件; 以及通过所述膜并将所述第二引线和所述导电构件彼此电连接的连接构件。 半导体芯片的第二表面上的第二电极经由导电构件和连接构件连接到膜的第一表面上的第二引线。 还提供了制造这种类型的半导体器件的方法。