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91. 发明申请

US20150053000A1 MICROMECHANICAL SENSOR 有权
标题翻译：微生物传感器
公开(公告)号：US20150053000A1
公开(公告)日：2015-02-26
申请号：US14468204
申请日：2014-08-25
申请人： Lars TEBJE , Chunyu WANG
发明人： Lars TEBJE , Chunyu WANG
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5712 , Y10T29/49826
摘要： A micromechanical sensor is provided having a substrate having a main plane of extension and having a movable element, the movable element being pivotable about an axis of rotation that is essentially parallel to the main plane of extension, from a rest position into a deflected position, the movable element having an asymmetrical mass distribution relative to the axis of rotation, so that, as a function of a force exerted on the movable element oriented essentially perpendicular to the main plane of extension, a deflection movement of the movable element is produced in the form of a pivot movement about the axis of rotation, the micromechanical sensor having a damping element, the damping element being pivotable about the axis of rotation, the damping element being connected to the movable element so as to be capable of rotational movement, or the damping element being integrated with the movable element.
摘要翻译：提供了一种微机械传感器，其具有具有延伸的主平面并具有可移动元件的基板，所述可移动元件围绕基本上平行于主平面的旋转轴线从静止位置枢转到偏转位置，所述可移动元件具有相对于所述旋转轴线的不对称质量分布，使得根据施加在所述可移动元件上的力基本上垂直于所述主平面延伸的力的函数，所述可移动元件的偏转运动在关于旋转轴线的枢转运动的形式，微机械传感器具有阻尼元件，该阻尼元件围绕旋转轴线可枢转，阻尼元件连接到可移动元件以便能够旋转运动，或者阻尼元件与可移动元件集成。

92. 发明授权

US08955380B2 Rotation rate sensor 有权
标题翻译：转速传感器
公开(公告)号：US08955380B2
公开(公告)日：2015-02-17
申请号：US13234878
申请日：2011-09-16
申请人： Mirko Hattass , Benjamin Schmidt
发明人： Mirko Hattass , Benjamin Schmidt
IPC分类号： G01C19/56 , G01C19/5726
CPC分类号： G01C19/5726 , G01C19/5719 , G01C25/00
摘要： A micromechanical rotation rate sensor, in particular for use in motor vehicles, includes a substrate, at least one seismic mass, which is arranged in a sprung manner on the substrate, drive means for production of a periodic movement of the seismic mass, force detection means for detection of a Coriolis force, which acts on the seismic mass as a result of rotation about a rotation axis which is at right angles to the excitation direction, and measurement means, wherein the measurement means are designed for measurement of structural deviations of the rotation rate sensor.
摘要翻译：特别是用于机动车辆的微机械转速传感器包括基板，至少一个地震质量块，以弹簧方式布置在基板上，驱动装置，用于产生地震质量块的周期性运动，力检测用于检测科里奥利力的装置，其作为围绕与激励方向成直角的旋转轴旋转的结果作用在地震质量上;以及测量装置，其中测量装置被设计用于测量结构偏差转速传感器

93. 发明授权

US08943891B2 Yaw-rate sensor 有权
标题翻译：偏光率传感器
公开(公告)号：US08943891B2
公开(公告)日：2015-02-03
申请号：US13365740
申请日：2012-02-03
申请人： Torsten Ohms , Burkhard Kuhlmann , Robert Sattler , Rolf Scheben , Daniel Christoph Meisel
发明人： Torsten Ohms , Burkhard Kuhlmann , Robert Sattler , Rolf Scheben , Daniel Christoph Meisel
IPC分类号： G01C19/56 , G01C19/5747
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element.
摘要翻译：提出了一种摆动速率传感器和用于操作具有第一科里奥利元件和第二科里奥利元件的偏航率传感器的方法，所述偏航速率传感器具有具有主平面延伸的基板，偏航速率传感器具有用于与第二轴平行地驱动第一科里奥利元件的第一驱动元件，所述偏航速率传感器具有用于平行于所述第二轴驱动所述第二科里奥利元件的第二驱动元件，所述偏航率传感器具有用于检测偏转的检测装置的第一科里奥利元件和由于科里奥利力而与第一轴平行的第二科里奥利元件，第二轴线垂直于第一轴线定位，第一和第二轴线平行于主平面延伸，所述第一和第二驱动元件经由驱动联接元件彼此机械耦合。

94. 发明授权

US08939026B2 Frequency modulated micro gyro 有权
标题翻译：调频微陀螺仪
公开(公告)号：US08939026B2
公开(公告)日：2015-01-27
申请号：US13893092
申请日：2013-05-13
申请人： Ying W. Hsu
发明人： Ying W. Hsu
IPC分类号： G01C19/56 , G01C19/5719
CPC分类号： G01C19/56 , G01C19/5719
摘要： A sensing device comprises a rotationally oscillating proof mass resonator and a detector resonator. The detector resonator, actuated to produce an oscillating signal, is coupled to the proof mass resonator and the frequency of the oscillating signal is modulated by a change of motion of the proof mass resonator.
摘要翻译：感测装置包括旋转振动质量谐振器和检测器谐振器。被激励以产生振荡信号的检测器谐振器耦合到检测质量谐振器，并且振荡信号的频率由检测质量谐振器的运动变化来调制。

95. 发明授权

US08925383B2 Angular speed sensor 有权
标题翻译：角速度传感器
公开(公告)号：US08925383B2
公开(公告)日：2015-01-06
申请号：US13384694
申请日：2010-07-20
申请人： Hideyuki Murakami , Takashi Kawai , Kouji Nabetani , Takehiko Ogawa
发明人： Hideyuki Murakami , Takashi Kawai , Kouji Nabetani , Takehiko Ogawa
IPC分类号： G01C19/56 , G01C19/5614
CPC分类号： G01C19/5614
摘要： An angular velocity sensor includes a vibration body, first and second sensor electrodes generating an electric charge responsive to an angular velocity applied to the vibration body, first and D/A converters each outputting at least two levels of an electric charge, first and second integrator circuits integrating the electric charge generated by the first and second sensor electrodes and the electric charges output from the first and second D/A converters, respectively, a comparator unit comparing output signals from the first and second integrator circuits, first and second D/A switching units switching levels of the output signals from the first and second D/A converters according to a comparison result of the comparator unit, a first disconnection detecting switch connected between the first sensor electrode and the first integrator circuit, a first voltage source for injecting an electric charge into a point between the first sensor electrode and the first integrator circuit via the first disconnection detecting switch, a second disconnection detecting switch connected between the second sensor electrode and the second integrator circuit, and a second voltage source for injecting an electric charge into a point between the second sensor electrode and the second integrator circuit via the second disconnection detecting switch. This angular velocity sensor has a high reliability and performs stable operation even if ambient environment changes.
摘要翻译：角速度传感器包括：振动体，响应于施加到振动体的角速度产生电荷的第一和第二传感器电极，第一和D / A转换器，每个转换器输出至少两个电荷的电平，第一和第二积分器将由第一和第二传感器电极产生的电荷和从第一和第二D / A转换器输出的电荷分别积分的电路，比较来自第一和第二积分器电路的输出信号的比较器单元，第一和第二D / A 开关单元根据比较器单元的比较结果，从第一和第二D / A转换器输出信号的开关电平，连接在第一传感器电极和第一积分器电路之间的第一断开检测开关，用于注入的第一电压源电荷进入第一传感器电极和第一积分器电路通路之间的点第一断开检测开关，连接在第二传感器电极和第二积分器电路之间的第二断开检测开关，以及用于经由第二断开将电荷注入到第二传感器电极和第二积分器电路之间的点的第二电压源检测开关。该角速度传感器具有高可靠性，并且即使环境变化也能够稳定地操作。

96. 发明申请

US20140305205A1 SELF-OSCILLATION CIRCUIT AND METHOD THEREOF 审中-公开
标题翻译：自振荡电路及其方法
公开(公告)号：US20140305205A1
公开(公告)日：2014-10-16
申请号：US14056812
申请日：2013-10-17
申请人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
发明人： Chang Hyun KIM
IPC分类号： G01C19/56
CPC分类号： G01C19/5776
摘要： Disclosed herein are a self-oscillation circuit and a method thereof.The self-oscillation circuit includes: a gyroscope sensor receiving a driving signal at its input terminal to resonate with and output it; a sensor driver outputting the driving signal for driving the gyroscope sensor; a phase shifter receiving a signal from the gyroscope sensor and shifting a phase of the received signal; and a time delay unit receiving the shifted signal from the phase shifter and delaying it for a predetermined time period, and then feeding the delayed signal back to the sensor driver.
摘要翻译：本文公开了一种自振荡电路及其方法。该自振荡电路包括：陀螺仪传感器，其在其输入端接收驱动信号，使其共振并输出; 输出用于驱动陀螺仪传感器的驱动信号的传感器驱动器; 移相器，接收来自陀螺仪传感器的信号，并移位接收信号的相位; 以及时间延迟单元，接收来自移相器的移位信号并将其延迟预定的时间段，然后将延迟的信号反馈给传感器驱动器。

97. 发明授权

US08857259B2 Reading circuit of gyroscope 有权
标题翻译：陀螺仪阅读电路
公开(公告)号：US08857259B2
公开(公告)日：2014-10-14
申请号：US13430685
申请日：2012-03-26
申请人： Yu-Wen Hsu , Sheng-Ren Chiu , Lu-Po Liao , Shih-Ting Lin
发明人： Yu-Wen Hsu , Sheng-Ren Chiu , Lu-Po Liao , Shih-Ting Lin
IPC分类号： G01C19/56
CPC分类号： G01C19/5776
摘要： A reading circuit of a gyroscope is provided. The reading circuit includes a driving unit, a high pass filter, a signal processing unit, and a low pass filter. The driving unit generates a resonance signal for a resonator of the gyroscope and generates a demodulation signal for the signal processing unit. The signal processing unit provides a modulation signal to a Coriolis accelerometer of the gyroscope. An input terminal of the high pass filter receives an output signal of the Coriolis accelerometer. The signal processing unit processes and demodulates an output of the high pass filter according to the demodulation signal and outputs a demodulation result to the low pass filter.
摘要翻译：提供陀螺仪的读取电路。读取电路包括驱动单元，高通滤波器，信号处理单元和低通滤波器。驱动单元产生用于陀螺仪的谐振器的谐振信号，并产生信号处理单元的解调信号。信号处理单元向陀螺仪的科里奥利加速度计提供调制信号。高通滤波器的输入端接收科里奥利加速度计的输出信号。信号处理单元根据解调信号对高通滤波器的输出进行处理和解调，并向低通滤波器输出解调结果。

98. 发明申请

US20140260609A1 MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS AND A FORCING STAGE, AND METHOD OF CONTROLLING A MICROELECTROMECHANICAL DEVICE 有权
标题翻译：具有振荡质量和强度的微电子设备，以及控制微电子设备的方法
公开(公告)号：US20140260609A1
公开(公告)日：2014-09-18
申请号：US13799243
申请日：2013-03-13
申请人： STMICROELECTRONICS S.R.L.
发明人： Marco Garbarino , Andrea Donadel , Davide Magnoni , Carlo Valzasina
IPC分类号： G01C19/56
CPC分类号： G01C19/5762 , G01C19/5726
摘要： A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.
摘要翻译：微机电装置包括：主体; 弹性联接到所述主体并且相对于所述主体可根据自由度而可振动的可动质量块; 频率检测器，被配置为检测所述可移动质量块的当前振荡频率; 以及强制级，其电容耦合到所述可移动质量块，并且被配置为至少在第一瞬态操作条件下通过强制具有等于由所述频率检测器检测到的当前振荡频率的强制频率的信号向所述可移动质量块提供能量。

99. 发明授权

US08813564B2 MEMS multi-axis gyroscope with central suspension and gimbal structure 有权
标题翻译：具有中心悬架和万向节结构的MEMS多轴陀螺仪
公开(公告)号：US08813564B2
公开(公告)日：2014-08-26
申请号：US13755841
申请日：2013-01-31
申请人： Fairchild Semiconductor Corporation
发明人： Cenk Acar
IPC分类号： G01C19/56 , B81B3/00 , B81C1/00 , G01C19/5712
CPC分类号： B81B3/0018 , B81B3/0059 , B81B2201/0242 , B81B2203/0154 , B81C1/00134 , G01C19/56 , G01C19/5712
摘要： Various examples include microelectromechanical die for sensing motion that includes symmetrical proof-mass electrodes interdigitated with asymmetrical stator electrodes. Some of these examples include electrodes that are curved around an axis orthogonal to the plane in which the electrodes are disposed. An example provides vertical flexures coupling an inner gimbal to a proof-mass in a manner permitting flexure around a horizontal axis.
摘要翻译：各种示例包括用于感测运动的微机电模具，其包括与不对称定子电极相互指向的对称的证明质量电极。这些示例中的一些包括围绕垂直于其中布置电极的平面的轴线弯曲的电极。一个例子提供垂直弯曲，其以允许围绕水平轴线弯曲的方式将内万向架耦合到校验块。

100. 发明申请

US20140224015A1 ANGULAR VELOCITY SENSOR 有权
标题翻译：角速度传感器
公开(公告)号：US20140224015A1
公开(公告)日：2014-08-14
申请号：US14241950
申请日：2012-09-03
申请人： Masahide Tamura , Osamu Kawasaki , Takayuki Nakano , Shouhei Niikawa , Hidekazu Yano , Tetsuji Imamura
发明人： Masahide Tamura , Osamu Kawasaki , Takayuki Nakano , Shouhei Niikawa , Hidekazu Yano , Tetsuji Imamura
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5733 , G01P15/12 , G01P15/18 , H01L41/047 , H01L41/0475 , H01L41/0805 , H01L41/0973 , H01L41/1132
摘要： Provided herein is a vibration-type angular velocity sensor capable of improving detection precision of angular velocities around the Z axis and preventing detection precision of angular velocities around the X and Y axes from deteriorating. A weight 3 is columnar or conic. The outline of an outer peripheral portion of a diaphragm 1 has such shape that a straight portion ST is formed at each of four corner portions of a square. Four vibration exciting electrodes 11 are respectively located in four regions partitioned by a first imaginary line L1 and a second imaginary line L2. Four angular velocity sensing electrodes 13 are respectively located in four regions partitioned by a first imaginary diagonal line CL1 and a second imaginary diagonal line Cl2.
摘要翻译：本发明提供能够提高Z轴周围的角速度的检测精度的振动型角速度传感器，能够防止X轴和Y轴的角速度的检测精度降低。重量3是圆柱形或圆锥形。隔膜1的外周部的轮廓具有在正方形的四个角部的每一个处形成直线部ST的形状。四个振动激励电极11分别位于由第一虚线L1和第二虚线L2分隔的四个区域中。四个角速度感测电极13分别位于由第一虚拟对角线CL1和第二虚拟对角线C12分隔的四个区域中。

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