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    • 91. 发明申请
    • Solid state membrane channel device for the measurement and characterization of atomic and molecular sized samples
    • 用于测量和表征原子和分子大小样品的固态膜通道器件
    • US20020025277A1
    • 2002-02-28
    • US09815461
    • 2001-03-23
    • Matthew P. DugasGregory L. Wagner
    • G01N027/00
    • G01N33/48721B81C1/00087Y10S977/721Y10S977/781
    • A solid state device is formed through thin film deposition techniques which results in a self-supporting thin film layer that can have a precisely defined channel bored therethrough. The device is useful in the chacterization of polymer molecules by measuring changes in various electrical characteristics as molecules pass through the channel. To form the device, a thin film layer having various patterns of electrically conductive leads are formed on a silicon substrate. Using standard lithography techniques, a relatively large or micro-scale aperture is bored through the silicon substrate which in turn exposes a portion of the thin film layer. This process does not affect the thin film. Subsequently, a high precision material removal process is used (such as a focused ion beam) to bore a precise nano-scale aperture through the thin film layer that coincides with the removed section of the silicon substrate.
    • 通过薄膜沉积技术形成固态器件,其产生可以具有穿过其中的精确定义的通道的自支撑薄膜层。 该装置通过在分子通过通道时测量各种电特性的变化来用于聚合物分子的特征。 为了形成器件,在硅衬底上形成具有各种导电引线图案的薄膜层。 使用标准光刻技术,相对较大或微尺度的孔径穿过硅衬底,硅衬底又暴露薄膜层的一部分。 该过程不影响薄膜。 随后,使用高精度的材料去除工艺(例如聚焦的离子束)来穿过与硅衬底的去除部分重合的薄膜层的精确的纳米尺度孔。
    • 97. 发明授权
    • Light coupler between an optical fiber and a waveguide made on an SOI substrate
    • 在SOI衬底上制造的光纤和波导之间的光耦合器
    • US08238704B2
    • 2012-08-07
    • US12569417
    • 2009-09-29
    • Badhise Ben BakirJean-Marc Fedeli
    • Badhise Ben BakirJean-Marc Fedeli
    • G02B6/30G02B6/26H01L21/00C23F1/00
    • G02B6/1228G02B6/305Y10S977/721Y10S977/932
    • A light coupler between an optical fiber (6) and a waveguide is made on a semiconductor-on-insulator substrate (1), this substrate (1) comprising a thin layer of semiconducting material in which the waveguide is made. The coupler comprises a light injector (5) and an adiabatic collector (4) made up with an inverted nanotip formed from the thin layer of semiconducting material. The injector (5) is formed on the insulator (3) and has a face (7) for receiving an end of the optical fiber (6). The adiabatic collector (4) has a cross-section which increases from a first end located on the side of said end of the optical fiber (6) right up to a second end which is connected to the waveguide, the injector (5) covering the adiabatic collector (4) and having a rib waveguide shape.
    • 在绝缘体上半导体衬底(1)上制造光纤(6)和波导管之间的光耦合器,该衬底(1)包括其中制成波导的半导体材料薄层。 耦合器包括光注射器(5)和由半导体材料薄层形成的倒置的纳米尖管构成的绝热收集器(4)。 喷射器(5)形成在绝缘体(3)上并且具有用于接收光纤(6)的端部的面(7)。 绝热收集器(4)具有从位于光纤(6)的所述端部侧的第一端直到连接到波导的第二端部的横截面,所述喷射器(5)覆盖 绝热收集器(4)并具有肋波导形状。
    • 100. 发明授权
    • Fast p-i-n photodetector with high responsitivity
    • 快速p-i-n光电探测器,具有高响应能力
    • US08119434B2
    • 2012-02-21
    • US12541235
    • 2009-08-14
    • Guy M. Cohen
    • Guy M. Cohen
    • H01L29/72
    • H01L31/03529B82Y10/00H01L29/0665H01L29/0673H01L29/0676H01L31/105H01L31/1804Y02E10/547Y02P70/521Y10S977/712Y10S977/721Y10S977/749Y10S977/762Y10S977/763Y10S977/932Y10S977/954
    • A lateral p-i-n photodetector is provided that includes an array of vertical semiconductor nanowires of a first conductivity type that are grown over a semiconductor substrate also of the first conductivity type. Each vertically grown semiconductor nanowires of the first conductivity type is surrounded by a thick epitaxial intrinsic semiconductor film. The gap between the now formed vertically grown semiconductor nanowires-intrinsic semiconductor film columns (comprised of the semiconductor nanowire core surrounded by intrinsic semiconductor film) is then filled by forming an epitaxial semiconductor material of a second conductivity type which is different from the first conductivity type. In a preferred embodiment, the vertically grown semiconductor nanowires of the first conductivity type are n+ silicon nanowires, the intrinsic epitaxial semiconductor layer is comprised of intrinsic epitaxial silicon, and the epitaxial semiconductor material of the second conductivity type is comprised of p+ silicon.
    • 提供了一种横向p-i-n光电探测器,其包括在第一导电类型的半导体衬底上生长的第一导电类型的垂直半导体纳米线阵列。 第一导电类型的每个垂直生长的半导体纳米线被厚的外延本征半导体膜包围。 现在形成的垂直生长的半导体纳米线 - 本征半导体膜柱(由本征半导体膜包围的半导体纳米线芯构成)之间的间隙然后通过形成与第一导电类型不同的第二导电类型的外延半导体材料来填充 。 在优选实施例中,第一导电类型的垂直生长的半导体纳米线是n +硅纳米线,本征外延半导体层由本征外延硅组成,并且第二导电类型的外延半导体材料由p +硅组成。