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    • 91. 发明授权
    • Optically excitable luminescent sensor elements
    • 光学可激发的发光传感元件
    • US4539473A
    • 1985-09-03
    • US625619
    • 1984-06-28
    • Torgny BrogardhChrister Ovren
    • Torgny BrogardhChrister Ovren
    • G01J5/08G01J5/58G01K11/20G01L1/00G01L1/24G01L11/02H01L31/10H01L31/14H01L33/00
    • G01L11/02G01K11/20G01L1/24
    • A sensor element adaptable for measurement of a physical parameter formed of a crystalline material and emitting luminescent spectra upon excitation by light spectra and the influence of said physical parameter. A first layer emitting luminescent spectra is formed of a semiconductor material containing dopant providing shallow energy levels and recombination centers with a concentration between 10.sup.15 to 10.sup.18 cm.sup.-3, and sandwiched between second and third layers of semiconductor material having low absorption for light excitation of the first layer, and the respective lattice constants of the second and third layers being substantially coincidental with the lattice constant of the first layer. The sensor element is formed of GaAs for the substrate and AlGaAs for the semiconductor layers, with appropriate variation in the concentration Al, Ga, and As for the various layers. Generally, the energy band gap of the layers sandwiching the luminescent emitting layer are higher than that of the emitting layer. In a modified embodiment, GaAs is used as the luminescence emitting layer with covering semiconductor layers of AlGaAs, with appropriate variation in the concentration of Al, Ga and As. In a further modification an additional semiconductor layer of AlGaAs is sandwiched between the active semiconductor layer and a non-active semiconductor layer to reduce or eliminate a shift in the wavelength emission of the sensor element.
    • 一种传感器元件,适用于测量由结晶材料形成的物理参数,并通过光谱激发后发射发光光谱以及所述物理参数的影响。 发射发光光谱的第一层由含有提供浅能级的掺杂剂的半导体材料和浓度在1015至1018cm-3之间的复合中心形成,并且被夹在具有低吸收的第二和第三半导体层之间,用于光激发 第一层和第二层和第三层的各自的晶格常数基本上与第一层的晶格常数一致。 传感器元件由用于衬底的GaAs和用于半导体层的AlGaAs形成,并且各层的浓度Al,Ga和As的适当变化。 通常,夹着发光层的层的能带隙高于发光层的能带隙。 在修改实施例中,GaAs被用作具有AlGaAs覆盖半导体层的发光发射层,Al,Ga和As的浓度具有适当的变化。 在另外的修改中,将AlGaAs的附加半导体层夹在有源半导体层和非有源半导体层之间以减少或消除传感器元件的波长发射的偏移。