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    • 93. 发明授权
    • Flux assisted solid phase epitaxy
    • 助焊剂固相外延
    • US07507290B2
    • 2009-03-24
    • US10593897
    • 2005-03-22
    • Hideomi KoinumaYuji MatsumotoRyota Takahashi
    • Hideomi KoinumaYuji MatsumotoRyota Takahashi
    • C30B1/10
    • C30B9/08C30B3/00C30B19/02C30B29/22C30B29/30C30B29/32H01L21/3147H01L21/31691
    • A flux assisted solid phase epitaxy that can make a thin film having a crystalline perfection comparable with that of a bulk crystal and at a reduced cost is provided in which an amorphous film of a mixture of an objective substance to be grown epitaxially and a flux of a substance producing a eutectic with the objective substance but not producing any compound therewith is deposited on a substrate at a temperature less than a eutectic point of the substances, and the substrate is heat-treated at a temperature not less than the eutectic point of the objective and flux substances. A solid phase reaction, namely solid phase diffusion causes the objective and flux substances to be mixed together to form a liquid phase in their eutectic state from which the objective substance precipitates and epitaxially grows on the substrate.
    • 可以提供能够使具有与本体晶体相当的结晶完整性的薄膜并且以降低的成本制成的助熔剂固相外延,其中外延生长的目标物质的混合物的非晶膜和 在物质的共晶点以下的温度下,在基板上沉积与目标物质共生而不产生任何化合物的物质,并且在不低于该物质的共晶点的温度下对基材进行热处理 客观和通量物质。 固相反应,即固相扩散,使目标物质和助熔剂物质混合在一起形成其共晶状态的液相,目标物质从该物质析出并外延生长在基底上。
    • 94. 发明授权
    • Method of producing single-polarized lithium tantalate crystal and single-polarized lithium tantalate crystal
    • 单极化钽酸锂晶体和单极化钽酸锂晶体的制备方法
    • US07374612B2
    • 2008-05-20
    • US10942960
    • 2004-09-17
    • Yoshiyuki Shiono
    • Yoshiyuki Shiono
    • C30B29/30
    • C30B29/30C30B33/02
    • A method of producing a lithium-tantalate crystal comprising, at least subjecting a single-polarized lithium-tantalate crystal wherein an optical absorption coefficient at a wave number of 3480 cm−1 is 0.3 cm−1 or less to a heat treatment under a reducing atmosphere at a temperature of not lower than 250° C. and not higher than Curie temperature and a single-polarized lithium-tantalate crystal wherein an optical absorption coefficient at a wave number of 3480 cm−1 is 0.3 cm−1 or less and an electric conductivity is 1×10−12 Ω−1·cm−1 or more. There can be provided a method of producing a single-polarized lithium-tantalate crystal in a short time efficiently wherein the surface charge generated due to a pyroelectric property can be decayed quickly by improving the electric conductivity and a single-polarized lithium-tantalate crystal.
    • 一种锂钽酸锂晶体的制造方法,其特征在于,至少使波长为3480cm -1的光吸收系数为0.3cm -1的单极化锂钽酸盐晶体, 在不低于250℃并且不高于居里温度的还原气氛下进行热处理的1%以下的单极化锂 - 钽酸锂晶体,其中波数的光吸收系数 为3480cm -1,为0.3cm -1以下,导电率为1×10 -6Ω-1以上 > .cm -1 或更多。 可以提供一种在短时间内有效地制造单极化钽酸锂晶体的方法,其中由于热电性能而产生的表面电荷可以通过改善导电性和单极化的锂 - 钽酸盐晶体而快速衰变。
    • 97. 发明申请
    • Flux Assisted Solid Phase Epitaxy
    • 助焊剂固相外延
    • US20070209571A1
    • 2007-09-13
    • US10593897
    • 2005-03-22
    • Hideomi KoinumaYuji MatsumotoRyota Takahashi
    • Hideomi KoinumaYuji MatsumotoRyota Takahashi
    • C30B19/02
    • C30B9/08C30B3/00C30B19/02C30B29/22C30B29/30C30B29/32H01L21/3147H01L21/31691
    • A flux assisted solid phase epitaxy that can make a thin film having a crystalline perfection comparable with that of a bulk crystal and at a reduced cost is provided in which an amorphous film of a mixture of an objective substance to be grown epitaxially and a flux of a substance producing a eutectic with the objective substance but not producing any compound therewith is deposited on a substrate at a temperature less than a eutectic point of the substances, and the substrate is heat-treated at a temperature not less than the eutectic point of the objective and flux substances. A solid phase reaction, namely solid phase diffusion causes the objective and flux substances to be mixed together to form a liquid phase in their eutectic state from which the objective substance precipitates and epitaxially grows on the substrate.
    • 可以提供能够使具有与本体晶体相当的结晶完整性的薄膜并且以降低的成本制成的助熔剂固相外延,其中外延生长的目标物质的混合物的非晶膜和 在物质的共晶点以下的温度下,在基板上沉积与目标物质共生而不产生任何化合物的物质,并且在不低于该物质的共晶点的温度下对基材进行热处理 客观和通量物质。 固相反应,即固相扩散,使目标物质和助熔剂物质混合在一起形成其共晶状态的液相,目标物质从该物质析出并外延生长在基底上。