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    • 95. 发明申请
    • PATTERNED DUMMY WAFERS LOADING IN BATCH TYPE CVD
    • 刻板式CVD中加载的图案式加湿器
    • US20120202355A1
    • 2012-08-09
    • US13022517
    • 2011-02-07
    • Rinji SuginoBradley Marc DavisLei XueKenichi Ohtsuka
    • Rinji SuginoBradley Marc DavisLei XueKenichi Ohtsuka
    • H01L21/465H01L21/46
    • H01L21/02271C23C16/045C23C16/44C23C16/56H01L21/02164H01L27/11568
    • A method for semiconductor device fabrication is provided. Embodiments of the present invention are directed towards using at least one patterned dummy wafer along with one or more product wafers in a film deposition system to create a sidewall layer thickness variation that is substantially uniform across all product wafers. The at least one patterned dummy wafer may have a high density patterned substrate surface with a topography that is different from or substantially similar to a topography of the one or more product wafers. Furthermore, in a batch type Chemical Vapor Deposition (CVD) system, the at least one patterned dummy wafer may be placed near a gas inlet of the CVD system. In another embodiment, at least one patterned dummy wafer may be placed near an exhaust of the CVD system. Additionally, the patterned dummy wafers may be reusable in subsequent film deposition processes.
    • 提供了半导体器件制造方法。 本发明的实施例涉及在膜沉积系统中使用至少一个图案化虚设晶圆以及一个或多个产品晶片,以产生在所有产品晶片上基本均匀的侧壁层厚度变化。 至少一个图案化的虚设晶片可以具有高密度图案化的衬底表面,其具有不同于或基本类似于一个或多个产品晶片的形貌的形貌。 此外,在间歇式化学气相沉积(CVD)系统中,至少一个图案化的虚设晶片可以放置在CVD系统的气体入口附近。 在另一个实施例中,至少一个图案化虚设晶片可以放置在CVD系统的排气附近。 此外,图案化的虚拟晶片可以在随后的成膜工艺中可重复使用。
    • 99. 发明授权
    • Flash memory device comprising bit-line contact region with dummy layer between adjacent contact holes
    • 闪存器件包括在相邻的接触孔之间具有虚设层的位线接触区域
    • US08183622B2
    • 2012-05-22
    • US11495116
    • 2006-07-27
    • Masatomi Okanishi
    • Masatomi Okanishi
    • H01L27/115H01L29/792
    • H01L27/11568H01L21/28282H01L27/115
    • A semiconductor device includes bit lines (12) that are provided in a semiconductor substrate (10) an ONO film (14) that is provided on the semiconductor substrate; word lines that are provided on the ONO film (14) and extend in a width direction of the bit lines (12); and a dummy layer (44) that extends in the width direction of the bit lines (12) and is provided in a bit-line contact region (40) having contact holes formed to connect the bit lines (12) with wiring layers (34). In accordance with the present invention, the proximity effect at the time of word line formation can be restrained, and the variation in the widths of the word lines can be made smaller, or current leakage between the bit lines and the semiconductor substrate can be restrained.
    • 半导体器件包括设置在半导体衬底(10)中的设置在半导体衬底上的ONO膜(14)的位线(12) 设置在ONO膜(14)上并在位线(12)的宽度方向上延伸的字线; 以及在位线(12)的宽度方向上延伸并设置在具有形成为将位线(12)与布线层(34)连接的接触孔的位线接触区域(40)中的虚设层(44) )。 根据本发明,可以抑制字线形成时的邻近效应,并且可以使字线宽度的变化更小,或者可以抑制位线和半导体衬底之间的电流泄漏 。