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    • 96. 发明授权
    • Method for controlling charging of sample and scanning electron microscope
    • 用于控制样品充电的方法和扫描电子显微镜
    • US08487251B2
    • 2013-07-16
    • US13059537
    • 2009-08-08
    • Ritsuo FukayaNobuhiro OkaiKoki MiyaharaZhigang Wang
    • Ritsuo FukayaNobuhiro OkaiKoki MiyaharaZhigang Wang
    • G01N23/00
    • H01J37/026H01J37/09H01J37/15H01J37/28H01J2237/0041H01J2237/0045H01J2237/0458
    • An object of the present invention is to provide a scanning electron microscope aiming at making it possible to control the quantity of electrons generated by collision of electrons emitted from a sample with other members, and a sample charging control method using the control of electron quantity. To achieve the object, a scanning electron microscope including a plurality of apertures through which an electron beam can pass and a mechanism for switching the apertures for the electron beam, and a method for controlling sample charging by switching the apertures are proposed. The plurality of apertures are at least two apertures. Portions respectively having different secondary electron emission efficiencies are provided on peripheral portions of the at least two apertures on a side opposed to the sample. The quantity of electrons generated by collision of electrons emitted from the sample can be controlled by switching the apertures.
    • 本发明的目的是提供一种扫描电子显微镜,其目的在于可以控制从样品与其他部件发射的电子的碰撞产生的电子的量,以及使用电子量的控制的样品充电控制方法。 为了实现该目的,提出了一种扫描电子显微镜,其包括电子束可以通过的多个孔,以及用于切换电子束的孔的机构,以及通过切换孔来控制样品充电的方法。 多个孔是至少两个孔。 分别具有不同二次电子发射效率的部分设置在与样品相对的一侧上的至少两个孔的周边部分上。 可以通过切换孔来控制从样品发射的电子的碰撞产生的电子的量。
    • 97. 发明申请
    • Scanning Electron Microscope Optical Condition Setting Method and Scanning Electron Microscope
    • 扫描电子显微镜光学条件设置方法和扫描电子显微镜
    • US20120318977A1
    • 2012-12-20
    • US13578179
    • 2011-02-09
    • Zhigang WangNobuhiro OkaiRitsuo Fukaya
    • Zhigang WangNobuhiro OkaiRitsuo Fukaya
    • H01J37/26
    • H01J37/28H01J37/026H01J37/244H01J2237/24592H01J2237/2817
    • It is an object of the present invention to provide an optical-condition setting method for a charged-particle beam device, and the charged-particle beam device which make it possible to set the following optical condition: Namely, an optical condition which allows the suppression of a lowering in the measurement and inspection accuracy caused by the influence of electrification, even if there exist a large number of measurement and inspection points.In order to accomplish the above-described object, the following scanning electron microscope or optical-condition setting method is proposed: Namely, a scanning electron microscope or an optical-condition setting method for measuring a pattern on a sample based on the detection of electrons, the electrons being emitted from the sample by scanning the sample surface with an electron beam, wherein a change in measurement values relative to the number of measurements is determined from the measurement values at a plurality of measurement points on the sample, and the sample-surface electric field is controlled so that the inclination of the change becomes equal to zero, or becomes close to zero.
    • 本发明的目的是提供一种带电粒子束装置的光学条件设定方法以及使得能够设定以下光学条件的带电粒子束装置:即,允许 即使存在大量的测量点和检查点,也抑制了电气化影响引起的测量和检查精度的降低。 为了实现上述目的,提出了以下扫描电子显微镜或光学条件设定方法:即,基于电子检测来测量样品上的图案的扫描电子显微镜或光学条件设定方法 通过用电子束扫描样品表面从样品发射电子,其中相对于测量次数的测量值的变化根据样品上的多个测量点的测量值确定, 控制表面电场使得变化的倾斜度等于零,或变得接近零。
    • 100. 发明授权
    • Method and apparatus for broadcasting test patterns in a scan-based integrated circuit
    • 用于在基于扫描的集成电路中广播测试模式的方法和装置
    • US07721172B2
    • 2010-05-18
    • US12216640
    • 2008-07-09
    • Laung-Terng (L.-T.) WangBoryau (Jack) SheuZhigang JiangZhigang WangShianling Wu
    • Laung-Terng (L.-T.) WangBoryau (Jack) SheuZhigang JiangZhigang WangShianling Wu
    • G01R31/28G06F17/50
    • G01R31/318547G01R31/318533G01R31/318591G01R31/31926
    • A broadcaster, system, and method for reducing test data volume and test application time in an ATE (automatic test equipment) in a scan-based integrated circuit. The scan-based integrated circuit contains multiple scan chains, each scan chain comprising multiple scan cells coupled in series. The broadcaster is a combinational logic network coupled to an optional virtual scan controller and an optional scan connector. The virtual scan controller controls the operation of the broadcaster. The system transmits virtual scan patterns stored in the ATE and generates broadcast scan patterns through the broadcaster for testing manufacturing faults in the scan-based integrated circuit. The number of scan chains that can be supported by the ATE is significantly increased. Methods are further proposed to reorder scan cells in selected scan chains, to generate the broadcast scan patterns and virtual scan patterns, and to synthesize the broadcaster and a compactor in the scan-based integrated circuit.The scan architecture used can also be random access scan based, where the integrated circuit comprises an array of random access scan (RAS) cells that are randomly and uniquely addressable. In random access scan, test patterns can be applied by selectively updating RAS cells and test responses can be observed through a direct read-out process. Eliminating the shifting process inherent in serial scan, random access scan produces much lower test power dissipation than serial scan.
    • 用于在基于扫描的集成电路中的ATE(自动测试设备)中降低测试数据量和测试应用时间的广播,系统和方法。 基于扫描的集成电路包含多个扫描链,每个扫描链包括串联耦合的多个扫描单元。 广播公司是组合逻辑网络,耦合到可选的虚拟扫描控制器和可选的扫描连接器。 虚拟扫描控制器控制广播机构的操作。 系统发送存储在ATE中的虚拟扫描模式,并通过广播机构生成广播扫描模式,以测试基于扫描的集成电路中的制造故障。 ATE可以支持的扫描链数显着增加。 进一步提出了方法来重新排列所选择的扫描链中的扫描单元,以产生广播扫描图案和虚拟扫描图案,并且在基于扫描的集成电路中合成广播器和压缩器。 所使用的扫描结构也可以是基于随机存取扫描的集成电路,其中集成电路包括随机访问扫描(RAS)阵列,其随机且唯一可寻址。 在随机存取扫描中,可以通过选择性地更新RAS细胞来应用测试模式,并且可以通过直接读出过程来观察测试响应。 消除串行扫描固有的移位过程,随机访问扫描产生比串行扫描低得多的测试功耗。