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    • 91. 发明授权
    • Apparatus and method for removing coating film
    • 去除涂膜的设备和方法
    • US07641763B2
    • 2010-01-05
    • US10920407
    • 2004-08-18
    • Shinji KobayashiNorihisa Koga
    • Shinji KobayashiNorihisa Koga
    • C23C16/00B08B7/00
    • C03C17/002C03C2218/328C03C2218/355G03F7/168Y10S134/902
    • An apparatus and a method for removing a coating film capable of stable treatment for removing unnecessary coating film at a substrate edge are provided. A substrate is clamped by approach stages from front and rear directions on a chuck, and fixed when accurate registration thereof is achieved. Then, the substrate edge is moved back and forth together with the chuck and the approach stage, so that the edge of the substrate is introduced in a space between an upper piece and a lower piece of a fixed arm portion. While the substrate is being moved, a solvent is fed from a nozzle portion onto a surface thereof and a purge gas is fed through a purge gas feeding pipe, so as to remove the coating film from the surface of the substrate by sucking and discharging the solvent and dissolved coating film through a discharge pipe.
    • 提供了一种用于去除能够在基板边缘去除不需要的涂膜的稳定处理的涂膜的设备和方法。 基板通过卡盘上的前后方向的夹持夹紧,并且在实现精确对准时固定。 然后,基板边缘与卡盘和接近台一起前后移动,使得基板的边缘被引入到固定臂部分的上部件和下部件之间的空间中。 在基板移动的同时,将溶剂从喷嘴部分供给到其表面,并且净化气体通过吹扫气体供给管进给,从而通过吸附和排出基板从基板的表面除去涂膜 溶剂和溶解的涂膜通过排放管。
    • 94. 发明申请
    • Electronic device
    • 电子设备
    • US20080291038A1
    • 2008-11-27
    • US11904441
    • 2007-09-27
    • Shinji KobayashiKeiji SeoAkira SagoAtsushi KasugaiHiroaki Kita
    • Shinji KobayashiKeiji SeoAkira SagoAtsushi KasugaiHiroaki Kita
    • G08B21/00
    • B41J29/13
    • There is provided an electronic device that enables and ensures the detection of the open/close condition and attached condition of a plurality of cover bodies by only one detection switch. Therefore, an electronic device comprises an upper cover, a front cover, an actuator, and a mechanical switch. The upper cover is provided openable and closable with respect to a rolled sheet holder storing case, and the front cover is removably attached on the rolled sheet holder storing case for covering a component, which is housed in the rolled sheet holder storing case. The actuator is provided on the front cover, and it makes an action when the upper cover is closed to the rolled sheet holder storing case, and the mechanical switch detects the action of the actuator. This arrangement forms a system that detects sequentially the action taken for closing the upper cover to the rolled sheet holder storing case, by relaying the action via the actuator, which is provided on the front cover, to the mechanical switch, which detects the action.
    • 提供了一种电子设备,其通过仅一个检测开关来实现并确保多个盖体的打开/关闭状态和附接状态的检测。 因此,电子设备包括上盖,前盖,致动器和机械开关。 上盖相对于卷筒纸保持架收纳箱可开闭地设置,前盖可拆卸地安装在卷筒纸保持架上,用于覆盖容纳在卷筒纸收纳盒内的部件。 致动器设置在前盖上,并且当上盖关闭到卷绕的保持架存放箱时,其起作用,并且机械开关检测致动器的动作。 这种布置形成了一种系统,其通过经由设置在前盖上的致动器将动作中继到检测动作的机械开关来顺序地检测用于将上盖关闭到卷板保持器存放盒的动作。
    • 97. 发明授权
    • Buckling actuator
    • 弯曲执行器
    • US07304556B2
    • 2007-12-04
    • US10527731
    • 2004-06-25
    • Masaya TamuraShinji Kobayashi
    • Masaya TamuraShinji Kobayashi
    • H01H51/22
    • G02B6/358B81B3/0051B81B2201/033B81B2201/045G02B6/3514G02B6/3518G02B6/3544G02B6/357G02B6/3572G02B6/3584G02B26/0833H02N1/008
    • A buckling actuator has a connecting section of a supporting beam that is provided with a rotatable supporter for allowing a movable member to be stably maintained at one of two switch positions. A substrate, stationary members, rotatable supporters, and supporting beams support a movable member in a shiftable manner in a y-axis direction, such that the movable member can be shifted between first and second switch positions. Moreover, the rotatable supporters are each provided with arm portions which extend in a radial fashion and support the corresponding supporting beam in a rotatable manner. When the movable member is being shifted, each supporting beam can be rotated without having to bend a corresponding end by a significant amount. Thus, a large barrier ΔE of potential energy of the movable member is set between the first and second switch positions. The movable member can therefore be stably maintained at each of the switch positions even when electric power is not supplied to electrodes. Furthermore, each arm portion prevents the movable member from being displaced in an x-axis direction.
    • 弯曲致动器具有支撑梁的连接部分,该连接部分设置有用于允许可动构件稳定地保持在两个开关位置之一的可旋转支撑件。 基板,固定构件,旋转支撑件和支撑梁在y轴方向上以可移动的方式支撑可移动构件,使得可移动构件能够在第一和第二开关位置之间移动。 此外,旋转的支撑件各自设置有以径向方式延伸并以可旋转方式支撑相应的支撑梁的臂部分。 当可移动部件移动时,可以使每个支撑梁旋转,而不必使相应的端部弯曲大量。 因此,在第一和第二开关位置之间设置可动构件的势能的大阻挡DeltaE。 因此,即使不向电极供电,也可以将可动构件稳定地维持在开关位置的各个位置。 此外,每个臂部防止可动构件在x轴方向上移位。