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91. 发明授权

US07366219B2 Line narrowing module 有权
公开(公告)号：US07366219B2
公开(公告)日：2008-04-29
申请号：US11000684
申请日：2004-11-30
申请人： J. Martin Algots , Robert A. Bergstedt , Walter D. Gillespie , Vladimir A. Kulgeyko , William N. Partlo , German E. Rylov , Richard L. Sandstrom , Brian Strate , Timothy S. Dyer
发明人： J. Martin Algots , Robert A. Bergstedt , Walter D. Gillespie , Vladimir A. Kulgeyko , William N. Partlo , German E. Rylov , Richard L. Sandstrom , Brian Strate , Timothy S. Dyer
IPC分类号： H01S3/22
CPC分类号： H01S3/1055 , G03F7/70025 , G03F7/70041 , H01S3/005 , H01S3/036 , H01S3/08 , H01S3/08004 , H01S3/08059 , H01S3/097 , H01S3/106 , H01S3/2251
摘要： A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a nominal optical path are disclosed which may comprise: a dispersive center wavelength selection optic moveably mounted within an optical path of the line narrowing module, selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a first tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic, by selecting an angle of transmission of the laser light pulse beam containing the pulse toward the dispersive center wavelength selection optic; a second tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse by changing the position of the dispersive center wavelength selection optic relative to the nominal optical path of the line narrowing module; wherein the second tuning mechanism coarsely selects a value for the center wavelength and the first tuning mechanism more finely selects the value for the center wavelength. The apparatus and method may further comprise at least one beam expanding and redirecting prism in the optical path of the line narrowing module; the first tuning mechanism selecting an angle of incidence of the at least a first spatially defined portion of the laser light pulse beam by changing the position of the at least one beam expanding prism relative to the nominal optical path of the line narrowing module. The first and second tuning mechanisms may be controlled by a center wavelength controller during a burst based upon feedback from a center wavelength detector detecting the center wavelength of at least one other pulse in the burst of pulses and the controller providing the feedback based upon an algorithm employing the detected center wavelength for the at least one other pulse in the burst. The first tuning mechanism may comprise an electro-mechanical course positioning mechanism and a fine positioning mechanism comprising an actuatable material that changes position or shape when actuated.

92. 发明授权

US06621846B1 Electric discharge laser with active wavelength chirp correction 有权
标题翻译：具有有源波长啁啾校正的放电激光器
公开(公告)号：US06621846B1
公开(公告)日：2003-09-16
申请号：US09501160
申请日：2000-02-09
申请人： Richard L. Sandstrom , Palash P. Das , George J. Everage , Frederick G. Erie , William N. Partlo , Igor V. Fomenkov
发明人： Richard L. Sandstrom , Palash P. Das , George J. Everage , Frederick G. Erie , William N. Partlo , Igor V. Fomenkov
IPC分类号： H01S322
CPC分类号： H01S3/104 , G03F7/70025 , G03F7/70333 , G03F7/70575 , G03F7/708 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/225
摘要： Electric discharge laser with active chirp correction. This application discloses techniques for moderating and dispensing these pressure waves. In some lasers small predictable patterns remain which can be substantially corrected with active wavelength control using relatively slow wavelength control instruments of the prior art. In a preferred embodiment a simple learning algorithm is described to allow advance tuning mirror adjustment in anticipation of the learned chirp pattern. Embodiments include stepper motors having very fine adjustments so that size of tuning steps are substantially reduced for more precise tuning. However, complete elimination of wavelength chirp is normally not feasible with structural changes in the laser chamber and advance tuning; therefore, Applicants have developed equipment and techniques for very fast active chirp correction. Improved techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver. In another preferred embodiment chirp correction is made on a pulse-to-pulse basis where the wavelength of one pulse is measured and the wavelength of the next pulse is corrected based on the measurement. This correction technique is able to function at repetition rates as rapid as 2000 Hz and greater.
摘要翻译：具有主动啁啾校正的放电激光器。本申请公开了用于调节和分配这些压力波的技术。在一些激光器中，可以使用现有技术的相对较慢的波长控制装置的主动波长控制基本上校正了小的可预测的图案。在优选实施例中，描述了一种简单的学习算法，以便在预期学习的啁啾模式中允许预调谐镜调节。实施例包括具有非常精细调节的步进电动机，使得调节步骤的尺寸被显着减小以便更精确的调谐。然而，完全消除波长啁啾通常不可行，在激光室的结构变化和提前调谐; 因此，申请人已经开发了用于非常快的主动啁啾校正的设备和技术。改进的技术包括相对较慢的步进电机和非常快的压电驱动器的组合。在另一个优选实施例中，在脉冲对脉冲基础上进行啁啾校正，其中测量一个脉冲的波长，并且基于测量校正下一个脉冲的波长。该校正技术能够以2000Hz及更高的重复速率工作。

93. 发明申请

US20120298838A1 SYSTEMS AND METHODS FOR IMPLEMENTING AN INTERACTION BETWEEN A LASER SHAPED AS LINE BEAM AND A FILM DEPOSITED ON A SUBSTRATE 有权
标题翻译：用于实现激光形成的线束与基板上沉积的膜之间的相互作用的系统和方法
公开(公告)号：US20120298838A1
公开(公告)日：2012-11-29
申请号：US13571129
申请日：2012-08-09
申请人： Palash P. Das , Thomas Hofmann , Jesse D. Davis , Richard L. Sandstrom
发明人： Palash P. Das , Thomas Hofmann , Jesse D. Davis , Richard L. Sandstrom
IPC分类号： G01J1/16
CPC分类号： B23K26/043 , B23K26/04 , B23K26/0622 , B23K26/0738 , C30B1/023 , C30B13/24
摘要： A laser crystallization apparatus and method are disclosed for selectively melting a film such as amorphous silicon that is deposited on a substrate. The apparatus may comprise an optical system for producing stretched laser pulses for use in melting the film. In still another aspect of an embodiment of the present invention, a system and method are provided for stretching a laser pulse. In another aspect, a system is provided for maintaining a divergence of a pulsed laser beam (stretched or non-stretched) at a location along a beam path within a predetermined range. In another aspect, a system may be provided for maintaining the energy density at a film within a predetermined range during an interaction of the film with a shaped line beam.
摘要翻译：公开了一种激光结晶装置和方法，用于选择性地熔融沉积在基底上的诸如非晶硅的膜。该装置可以包括用于产生用于熔化膜的拉伸激光脉冲的光学系统。在本发明实施例的另一方面，提供一种用于拉伸激光脉冲的系统和方法。在另一方面，提供了一种系统，用于在预定范围内沿着光束路径的位置维持脉冲激光束的发散（拉伸或未拉伸）。在另一方面，可以提供一种系统，用于在膜与成形线束的相互作用期间将膜处的能量密度保持在预定范围内。

94. 发明申请

US20120170112A1 Multi-Pass Optical Apparatus 有权
标题翻译：多通道光学仪器
公开(公告)号：US20120170112A1
公开(公告)日：2012-07-05
申请号：US12980939
申请日：2010-12-29
申请人： Richard L. Sandstrom
发明人： Richard L. Sandstrom
IPC分类号： H01S3/081 , G02B5/10 , H01S3/086 , G02B5/08
CPC分类号： G02B17/004 , G02B7/1815 , G02B7/1825 , H01S3/076 , H01S3/2325
摘要： An apparatus includes a first plurality of concave reflecting surfaces; a second plurality of reflecting surfaces facing the first plurality of concave reflecting surfaces such that a region is defined between the first and second pluralities; and an input for an optical beam to enter the region and an output for the optical beam to exit the region. The first and second pluralities of reflecting surfaces are arranged relative to each other so that the optical beam is re-imaged at a reflecting surface of one of the pluralities after only one reflection from a reflecting surface of the other of the pluralities and so that overlap of two or more optical beams on each of the reflecting surfaces is avoided.
摘要翻译：一种装置包括：第一多个凹面反射面; 面对所述第一多个凹反射表面的第二多个反射表面，使得在所述第一和第二多个之间限定区域; 以及用于进入该区域的光束的输入和用于使光束离开该区域的输出。第一和第二多个反射表面相对于彼此布置，使得光束在仅一次反射之后的多个反射表面中从多个另一个的反射表面重新成像，并且重叠避免了在每个反射表面上的两个或更多个光束。

95. 发明申请

US20090256057A1 Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrate 有权
标题翻译：用于实现激光成形为线束和沉积在基底上的膜之间的相互作用的系统和方法
公开(公告)号：US20090256057A1
公开(公告)日：2009-10-15
申请号：US12386771
申请日：2009-04-21
申请人： Palash P. Das , Thomas Hofmann , Jesse D. Davis , Richard L. Sandstrom
发明人： Palash P. Das , Thomas Hofmann , Jesse D. Davis , Richard L. Sandstrom
IPC分类号： G02B27/40 , G01B9/00
CPC分类号： B23K26/043 , B23K26/04 , B23K26/0622 , B23K26/0738 , C30B1/023 , C30B13/24
摘要： A laser crystallization apparatus and method are disclosed for selectively melting a film such as amorphous silicon that is deposited on a substrate. The apparatus may comprise an optical system for producing stretched laser pulses for use in melting the film. In still another aspect of an embodiment of the present invention, a system and method are provided for stretching a laser pulse. In another aspect, a system is provided for maintaining a divergence of a pulsed laser beam (stretched or non-stretched) at a location along a beam path within a predetermined range. In another aspect, a system may be provided for maintaining the energy density at a film within a predetermined range during an interaction of the film with a shaped line beam.
摘要翻译：公开了一种激光结晶装置和方法，用于选择性地熔融沉积在基底上的诸如非晶硅的膜。该装置可以包括用于产生用于熔化膜的拉伸激光脉冲的光学系统。在本发明实施例的另一方面，提供一种用于拉伸激光脉冲的系统和方法。在另一方面，提供了一种系统，用于在预定范围内沿着光束路径的位置维持脉冲激光束的发散（拉伸或未拉伸）。在另一方面，可以提供一种系统，用于在膜与成形线束的相互作用期间将膜处的能量密度保持在预定范围内。

96. 发明授权

US07079556B2 Bandwidth control technique for a laser 失效
标题翻译：激光带宽控制技术
公开(公告)号：US07079556B2
公开(公告)日：2006-07-18
申请号：US10670406
申请日：2003-09-24
申请人： Igor V. Fomenkov , Armen Kroyan , Jesse D. Buck , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John Martin Algots , Gamaralalage G. Padmabandu
发明人： Igor V. Fomenkov , Armen Kroyan , Jesse D. Buck , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John Martin Algots , Gamaralalage G. Padmabandu
IPC分类号： H01S3/09 , H01S3/10
CPC分类号： G03F7/70575 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70933 , H01S3/036 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/22 , H01S3/2207 , H01S3/225
摘要： A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodiment wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second within a very narrow range of pivot angles to cause a dither in nominal wavelength values to produce a desired effective bandwidth of series of laser pulses.
摘要翻译：一种用于放电激光器带宽控制的技术。提供线窄设备具有至少一个压电驱动器和快速带宽检测装置以及具有小于约1.0毫秒的时间响应的带宽控制。在优选实施例中，波长调谐镜在非常窄的转角范围内以每秒超过500次抖动的抖动速率抖动，以使标称波长值的抖动产生期望的一系列激光脉冲的有效带宽。

97. 发明授权

US06005879A Pulse energy control for excimer laser 失效
标题翻译：准分子激光脉冲能量控制
公开(公告)号：US06005879A
公开(公告)日：1999-12-21
申请号：US34870
申请日：1998-03-04
申请人： Richard L. Sandstrom , Herve Andre Besaucele , Igor V. Fomenkov , Palash P. Das
发明人： Richard L. Sandstrom , Herve Andre Besaucele , Igor V. Fomenkov , Palash P. Das
IPC分类号： H01S3/038 , G03F7/20 , H01S3/03 , H01S3/034 , H01S3/036 , H01S3/08 , H01S3/081 , H01S3/0971 , H01S3/134 , H01S3/225 , H01S3/00
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70216 , G03F7/70558 , G03F7/70575 , H01S3/03 , H01S3/134 , H01S3/225 , H01S3/036 , H01S3/08009 , H01S3/0812 , H01S3/09713 , H01S3/2251 , H01S3/2256
摘要： A process for controlling pulse energy and integrated energy dose in bursts of pulses produced by an excimer laser. The energy of each pulse in each burst is measured. The rate of change of pulse energy with charging voltage is determined. A pulse energy error is determined for a previous pulse of the present burst. An integrated dose error is also determined for all previous pulses in the current burst. A charging voltage for the next pulse is determined using the pulse energy error, the integrated dose error, the rate of change of energy with charging voltage and a reference voltage. In a preferred embodiment, the rate of change of energy with voltage is determined by dithering the voltage during two pulses of each burst, once lower and once higher. The reference voltage is a voltage calculated using prior energy and voltage data. In this embodiment, the method of determining the reference voltage during a first portion of the pulse is different from the method used during a latter portion of the burst. During the first set of pulses (40 in this embodiment), for each pulse, a specified voltage calculated using voltage and energy data from a corresponding pulse in a previous burst is utilized as a prediction of the voltage needed to produce a pulse energy converging on a target pulse energy. For pulses 41 and thereafter the reference voltage for each pulse is the specified voltage for the previous pulse.
摘要翻译：用于在由准分子激光器产生的脉冲脉冲中控制脉冲能量和积分能量剂量的过程。测量每个脉冲中每个脉冲的能量。确定脉冲能量随充电电压的变化率。针对当前脉冲串的先前脉冲确定脉冲能量误差。还针对当前突发中的所有先前脉冲确定积分剂量误差。使用脉冲能量误差，积分剂量误差，带充电电压的能量变化率和参考电压确定下一个脉冲的充电电压。在优选实施例中，通过在每个脉冲串的两个脉冲期间抖动电压来确定能量与电压的变化率，一旦较低和一次较高。参考电压是使用先前的能量和电压数据计算的电压。在本实施例中，在脉冲的第一部分期间确定参考电压的方法与在脉冲串的后一部分期间使用的方法不同。在第一组脉冲（在本实施例中为40）中，对于每个脉冲，使用从先前脉冲串中的对应脉冲的电压和能量数据计算的指定电压作为产生脉冲能量收敛所需的电压的预测目标脉冲能量。对于脉冲41，此后每个脉冲的参考电压是先前脉冲的指定电压。

98. 发明授权

US5048041A Compact excimer laser 失效
公开(公告)号：US5048041A
公开(公告)日：1991-09-10
申请号：US550389
申请日：1990-07-10
申请人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
发明人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/036 , H01S3/0305 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.

99. 发明授权

US08811440B2 System and method for seed laser mode stabilization 有权
标题翻译：种子激光模式稳定的系统和方法
公开(公告)号：US08811440B2
公开(公告)日：2014-08-19
申请号：US13607623
申请日：2012-09-07
申请人： Richard L. Sandstrom
发明人： Richard L. Sandstrom
IPC分类号： H01S3/00 , H01S3/13
CPC分类号： H01S3/13 , H01S3/0085 , H01S3/11 , H01S3/1305 , H01S3/136 , H01S3/1398 , H01S3/2366 , H01S3/2383 , H05G2/005 , H05G2/008
摘要： A method and apparatus for stabilizing the seed laser in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system are disclosed. In one embodiment, the cavity length of the laser may be adjusted by means of a movable mirror forming one end of the cavity. The time delay from the release of an output pulse to the lasing threshold next being reached is measured at different mirror positions, and a mirror position selected which results in a cavity mode being aligned with the gain peak of the laser, thus producing a minimum time delay from an output pulse of the laser to the next lasing threshold. A Q-switch in the laser allows for pre-lasing and thus jitter-free timing of output pulses. Feedback loops keep the laser output at maximum gain and efficiency, and the attenuation and timing at a desired operating point.
摘要翻译：公开了一种用于在激光产生的等离子体（LPP）极紫外（EUV）光系统中稳定种子激光的方法和装置。在一个实施例中，可以通过形成空腔的一端的可移动镜来调节激光器的腔体长度。在不同的反射镜位置处测量从输出脉冲释放到激光阈值的时间延迟，并且选择导致腔模式与激光器的增益峰值对准的反射镜位置，从而产生最小时间从激光器的输出脉冲到下一个激光阈值的延迟。激光器中的Q开关允许预激光，从而使输出脉冲无抖动定时。反馈回路将激光输出保持在最大的增益和效率，以及在所需工作点的衰减和时序。

100. 发明授权

US08526481B2 Extendable electrode for gas discharge laser 有权
标题翻译：气体放电激光可扩展电极
公开(公告)号：US08526481B2
公开(公告)日：2013-09-03
申请号：US13469009
申请日：2012-05-10
申请人： Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
发明人： Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
IPC分类号： H01S3/097
CPC分类号： H01S3/038 , H01S3/0381 , H01S3/09705 , H01S3/0971 , H01S3/225 , H01S3/2366
摘要： A movable electrode assembly for use in a laser system, includes a first electrode having a first discharge surface, a second electrode having a second discharge surface. The second electrode being arranged opposite from the first electrode. The second discharge surface being spaced apart from the first discharge surface by a discharge gap. A discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A method of adjusting a discharge gap is also disclosed.
摘要翻译：一种用于激光系统的可动电极组件，包括具有第一放电表面的第一电极，具有第二放电表面的第二电极。第二电极布置成与第一电极相对。第二放电表面与第一放电表面间隔开放电间隙。放电间隙调节器与第二电极或第一电极中的至少一个接合，放电间隙调节器被配置为调节放电间隙。还公开了一种调节放电间隙的方法。

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