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    • 92. 发明授权
    • Method for making high-performance RF integrated circuits
    • 制造高性能RF集成电路的方法
    • US07973629B2
    • 2011-07-05
    • US11930664
    • 2007-10-31
    • Mou-Shiung LinJin-Yuan Lee
    • Mou-Shiung LinJin-Yuan Lee
    • H01F5/00
    • H01L23/544H01L21/6835H01L21/6836H01L21/78H01L23/5227H01L28/10H01L2221/68327H01L2221/6834H01L2221/6835H01L2924/0002H01L2924/12044H01L2924/1423H01L2924/19041H01L2924/19042H01L2924/19043H01L2924/30105H01L2924/3011H01L2924/00
    • A new method and structure is provided for the creation of a semiconductor inductor. Under the first embodiment of the invention, a semiconductor substrate is provided with a scribe line in a passive surface region and active circuits surrounding the passive region. At least one bond pad is created on the passive surface of the substrate close to and on each side of the scribe line. A layer of insulation is deposited, a layer of dielectric is deposited over the layer of insulation, at least one bond pad is provided on the surface of the layer of dielectric on each side of the scribe line. At least one inductor is created on each side of the scribe line on the surface of the layer of dielectric. A layer of passivation is deposited over the layer of dielectric. The substrate is attached to a glass panel by interfacing the surface of the layer of passivation with the glass panel. The substrate is sawed from the backside of the substrate in alignment with the scribe line. The silicon that remains in place in the passive surface of the substrate underneath the scribe lines is removed by etching, the glass panel is separated along the scribe line. Under the second embodiment of the invention, the inductor is created on the surface of a thick layer of polymer that is deposited over the layer of passivation.
    • 提供了一种新的制造半导体电感器的方法和结构。 在本发明的第一实施例中,半导体衬底在无源表面区域中设有划线,并且在被动区域周围设有有源电路。 在基板的被动表面上至少形成一个接合垫,该接合垫靠近划线的每侧。 沉积一层绝缘层,在该绝缘层上沉积一层电介质,至少一个接合焊盘设置在刻划线两边的电介质层的表面上。 在电介质层的表面上的划线的每侧形成至少一个电感器。 一层钝化层沉积在电介质层上。 通过将钝化层的表面与玻璃面板接合来将衬底附接到玻璃面板。 衬底从衬底的背面锯切,与划刻线对准。 通过蚀刻去除在划线下面的衬底的被动表面中残留的位置的硅,沿着划线分离玻璃面板。 在本发明的第二个实施例中,电感器被形成在沉积在钝化层上的聚合物厚层的表面上。