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    • 91. 发明申请
    • Linear motor for use in machine tool
    • 用于机床的直线电机
    • US20060033386A1
    • 2006-02-16
    • US11200784
    • 2005-08-10
    • Masanobu UchidaKoji MiyataKen Ohashi
    • Masanobu UchidaKoji MiyataKen Ohashi
    • H02K41/00
    • H02K41/03H02K1/34
    • Provided is a linear motor for use in a machine tool having high positioning accuracy. A linear motor 10 for use in a machine tool comprises: a stator 13 comprising a plurality of permanent magnets 12 which are arranged on both faces of a plate-like yoke 11 at equal intervals in a direction in which a mover moves, wherein the permanent magnets have the same shape, are magnetized in a direction perpendicular to the faces of the yoke 11, and an adjacent permanent magnet 12 has a different magnetization orientation; and a pair of movers 16 comprising armature cores 14 wound with armature coils 15 which are opposed to rows of the permanent magnets 12 provided on both the faces of the plate-like yoke 11 such that central axes of the armature cores 15 are parallel to the magnetization direction of the permanent magnets 12. A surface treatment film can be preferably formed on an exposed surface of the permanent magnets after the plurality of permanent magnets 12 is arranged on both the faces of the plate-like yoke 11.
    • 提供一种用于具有高定位精度的机床中的线性马达。 用于机床的直线电动机10包括:定子13,其包括多个永久磁铁12,它们在移动件移动的方向上以等间隔布置在板状磁轭11的两个面上,其中永磁体 磁体具有相同的形状,在垂直于磁轭11的表面的方向上被磁化,并且相邻的永磁体12具有不同的磁化取向; 以及一对移动体16,其包括缠绕有电枢线圈15的电枢芯14,电枢线圈15与设置在板状磁轭11的两个表面上的永久磁铁12的行相对,使得电枢铁芯15的中心轴平行于 永久磁铁12的磁化方向。 在多个永磁体12布置在板状磁轭11的两个表面上之后,表面处理膜可以优选地形成在永磁体的暴露表面上。
    • 93. 发明授权
    • Magnetron plasma processing apparatus
    • 磁控管等离子体处理装置
    • US06764575B1
    • 2004-07-20
    • US10069512
    • 2002-03-04
    • Tomomi YamasakiHidetoshi KimuraJunichi AramiHiroo OnoAkira KoshiishiKoji Miyata
    • Tomomi YamasakiHidetoshi KimuraJunichi AramiHiroo OnoAkira KoshiishiKoji Miyata
    • C23C1434
    • H01J37/3266H01J37/3408
    • When a substrate 30 is to be subjected to a magnetron plasma process, a dipole ring magnet 21 is provided, in which a large number of anisotropic segment magnets 22 are arranged in a ring-like shape around the outer wall of a chamber 1. A magnetic field gradient, wherein the magnetic field strength decreases from the E pole side toward the W pole side in a direction perpendicular to a magnetic field direction B, is formed in a plane perpendicular to the direction of an electric field between a pair of electrodes separated from each other. The anisotropic segment magnets have a first section a including anisotropic segment magnets arranged in the vicinity of a region A located outside an E pole side end of the process substrate with an N pole thereof being directed toward this region, and a second portion b including anisotropic segment magnets arranged with an S pole thereof being directed toward this region, to locally increase the magnetic field strengths of the first and second regions.
    • 当对基板30进行磁控管等离子体处理时,设置偶极环磁体21,其中大量的各向异性磁体22围绕室1的外壁排列成环状。 其磁场强度在与磁场方向B垂直的方向从E极侧朝向W极侧的磁场强度形成在与分离的一对电极之间的电场方向垂直的面内 从彼此。 各向异性区段磁体具有第一区段a,其包括各向异性区段磁体,其布置在位于处理衬底的E极侧端外侧的区域A的附近,其N极指向该区域,第二部分b包括各向异性 将其S极布置的段磁体指向该区域,以局部地增加第一和第二区域的磁场强度。
    • 95. 发明授权
    • Method of manufacturing a semiconductor device
    • US06503830B2
    • 2003-01-07
    • US09897472
    • 2001-07-03
    • Koji Miyata
    • Koji Miyata
    • H01L214763
    • H01L21/76811H01L21/76813H01L21/76835
    • In a method of manufacturing a semiconductor device, an enlargement phenomenon of a wiring groove pattern is suppressed which is produced when a wiring groove and a connection hole are formed with the aid of hard masks of two layers and when the wiring groove pattern is formed by etching in the lower layer hard mask with the aid of the upper layer hard mask, wiring groove working with high accuracy and high reliability is realized, and short circuit failure of groove wiring lines is eliminated. In the method of manufacturing the semiconductor device in which the connection hole is formed in a first insulating film while mask layers of plural layers are used, and the wiring groove is formed in a second insulating film, the mask layers of the plural layers are formed in such a manner that a first mask layer is formed of the same material as the first insulating film on the second insulating film, and after a second mask layer is formed thereon, a wiring groove pattern is formed in the second mask layer, and further, after a third mask layer is formed of the same material as the first mask layer thereon, a connection hole pattern is formed to extend through the third mask layer and the first mask layer.
    • 96. 发明授权
    • Magnetic field generator for magnetron plasma generation
    • 用于磁控管等离子体产生的磁场发生器
    • US06377149B1
    • 2002-04-23
    • US09684323
    • 2000-10-10
    • Koji Miyata
    • Koji Miyata
    • H01F702
    • H01J37/3266H01F7/0278H01J37/3408
    • An improvement is provided in a dipole-ring magnet as a magnetic field generator in a magnetron plasma treatment apparatus relative to the height of the plane in which the magnetic field consists only of the component in the horizontal direction perpendicular to the length of the magnetically anisotropic columnar segment magnets of which the dipole-ring magnet is constituted. While the height of the plane of horizontal magnetic field is the half height of the length of the segment magnets in a conventional dipole-ring magnet, the plane of horizontal magnetic field shifts downwardly by mounting a ring member of a ferromagnetic material on or above the upper end surfaces of the columnar segment magnets so as to enable a more compact and more economical design of the magnetron plasma treatment apparatus.
    • 在磁控管等离子体处理装置中作为磁场发生器的偶极环磁体相对于平面的高度提供了改进,其中磁场仅由垂直于磁各向异性的水平方向的水平方向的分量组成 构成偶极环磁体的柱状磁铁。 虽然水平磁场的平面的高度是常规偶极环磁体中的段磁体的长度的一半高度,但是水平磁场的平面通过将铁磁材料的环构件安装在其上或之上而向下移动 柱状段磁体的上端表面,以便能够实现更加紧凑和更经济的磁控管等离子体处理装置的设计。
    • 97. 发明授权
    • Permanent magnet motor and rotor thereof
    • 永磁电动机及其转子
    • US06262507B1
    • 2001-07-17
    • US09396420
    • 1999-09-15
    • Koji SatoTakehisa MinowaKoji Miyata
    • Koji SatoTakehisa MinowaKoji Miyata
    • H02K2100
    • H02K1/2733H02K21/14Y10T29/49009
    • Disclosed is a permanent magnet motor consisting of a rotor which is a multi polar-magnetized cylindrical permanent magnet such as a neodymium/iron/boron magnet, and a stator having a plurality of stator teeth. Different from conventional but expensive multi-radial orientation of the magnetic anisotropy, the cylindrical permanent magnet has a direction of orientation along a single diameter of the cylinder that is perpendicular to the cylinder axis when a definite relationship is held between the number of the multipolar magnetic poles and the number of the stator teeth. Even when using such a simple and inexpensive cylindrical permanent magnet as the rotor, high performance of the permanent magnet motor can be ensured with regard to a large induced voltage and small torque ripples. When such a rotor having an increased height is desired, two or more of the cylindrical unit permanent magnets each having a single diametrical orientation are coaxially stacked one on the other into a block in such a relative disposition that the directions of two adjacent cylindrical unit permanent magnets make a rotational displacement angle of 180° divided by the number of the unit magnets.
    • 公开了一种永磁电动机,其由诸如钕/铁/硼磁体的多极化磁性圆柱形永磁体的转子和具有多个定子齿的定子组成。 与磁各向异性的常规但昂贵的多径向取向不同,圆柱形永磁体具有垂直于气缸轴线的圆筒单一直径的取向方向,当在多极磁极的数量之间保持一定关系时 极数和定子齿数。 即使使用这种简单且廉价的圆柱形永久磁铁作为转子,也可以确保针对大的感应电压和小的扭矩波动的永磁电动机的高性能。 当需要具有增加的高度的这种转子时,两个或更多个具有单个直径取向的圆柱形单元永磁体以这样的相对位置同轴地堆叠成块,即相邻的两个圆柱形单元的方向永久地 磁体使得旋转位移角为180°除以单位磁体的数量。
    • 99. 发明授权
    • Magnetic circuit system with opposite permanent magnets
    • 具有相对永久磁铁的磁路系统
    • US5825187A
    • 1998-10-20
    • US843053
    • 1997-04-11
    • Ken OhashiYuhito YonedaKoji MiyataDai Higuchi
    • Ken OhashiYuhito YonedaKoji MiyataDai Higuchi
    • H01F7/02A61B5/055G01R33/383G01R33/3873G01V3/00
    • G01R33/383G01R33/3873
    • The present invention provides is an improvement in a magnetic circuit system with a pair of opposite permanent magnets to construct an MRI instrument comprising a pair of upper and lower permanent magnets connected with yokes to form an air gap space therebetween, in which the patient under MRI inspection is kept lying, a pair of shimmed pole pieces each mounted on the permanent magnet to face the air gap and a pair of gradient coils each mounted on the shimmed pole piece to face the air gap. The improvement comprises mounting a cancellation magnetic plate, which is a thin plate of a magnetic material having a coercive force of 0.1 to 500 Oe, on the gradient coil to face the air gap with an object to cancel the residual magnetization of the shimmed pole piece by the gradient magnetic field. The cancellation magnetic plate has a thickness not exceeding 0.5 mm and has a base area which is 5 to 75% relative to the base area of the gradient coil.
    • 本发明提供了具有一对相对的永磁体的磁路系统的改进,以构造MRI仪器,其包括一对与轭架连接的上下永磁体,以在其间形成气隙空间,患者在MRI下 检查保持躺着,一对分别安装在永久磁铁上以面对气隙的垫片极片和一对梯度线圈,每个梯度线圈都安装在垫片极片上以面对气隙。 改进之处在于,将梯度线圈上具有矫顽力为0.1〜500Oe的磁性材料的薄板的抵消磁性板安装在与物体相对的气隙上,以抵消该偏振极片的剩余磁化强度 通过梯度磁场。 取消磁性板的厚度不超过0.5mm,基底面积相对于梯度线圈的基面积为5〜75%。