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    • 91. 发明申请
    • COMPARING DEVICE
    • 比较装置
    • US20120288164A1
    • 2012-11-15
    • US13468345
    • 2012-05-10
    • Sei NagashimaHiroshi Nakajima
    • Sei NagashimaHiroshi Nakajima
    • G06K9/68G06K9/46
    • G06K9/00281G06K9/6215G06K9/6857
    • When comparing a reference image and a registered image, a reference image is defined as a high-resolution image of the highest resolution and a first low-resolution image is generated on a lower level, and a second low-resolution image is generated on a lower level. Registered images are read one-at-a-time, feature regions are set in the hierarchical images of the registered images, and corresponding regions are found in the reference image through hierarchical searching from the low-resolution image towards the high-resolution image. An evaluation is made as to whether to select the registered image that has been read out, based on a similarity between the low-resolution hierarchical image, for example, a feature region of the hierarchical image of the registered image, and the corresponding region of the hierarchical image of the reference image, to narrow down the registered images to be compared to the reference image.
    • 当比较参考图像和登记图像时,将参考图像定义为最高分辨率的高分辨率图像,并且在较低级别上生成第一低分辨率图像,并且在第一低分辨率图像上生成第二低分辨率图像 低等级。 注册的图像被一一读取,特征区​​域被设置在登记图像的分层图像中,并且通过从低分辨率图像到高分辨率图像的分层搜索,在参考图像中找到对应的区域。 基于低分辨率分层图像(例如,登记图像的分层图像的特征区域)与相应区域的相似度,判断是否选择已读出的登记图像 参考图像的分层图像,以缩小登记图像以与参考图像进行比较。
    • 92. 发明授权
    • Surface defect inspection method and apparatus
    • 表面缺陷检查方法及装置
    • US08294888B2
    • 2012-10-23
    • US12855873
    • 2010-08-13
    • Kenichi ShitaraHiroshi Nakajima
    • Kenichi ShitaraHiroshi Nakajima
    • G01N21/00
    • G01N21/9501G01N21/47
    • The present invention provides an apparatus and method which enable detecting a microscopic defect sensitively by efficiently collecting and detecting scattering light from a defect in a wider region without enlarging the apparatus. In the apparatus for inspecting a defect on a surface of a sample, including illumination means which irradiates a surface of a sample with laser, reflected light detection means which detects reflected light from the sample, and signal processing means which processes a detected signal and detecting a defect on the sample, the reflected light detection means is configured to include a scattering light detection unit which collects scattering light components of the reflected light from the sample by excluding specularly reflected light components by using an aspheric flannel lens and detecting the scattering light components.
    • 本发明提供了一种能够通过在不扩大设备的情况下有效地收集和检测来自较宽区域的缺陷的散射光而敏感地检测微观缺陷的装置和方法。 在用于检查样品表面上的缺陷的装置中,包括用激光照射样品表面的照射装置,检测来自样品的反射光的反射光检测装置和处理检测信号的信号处理装置, 反射光检测装置被配置为包括:散射光检测单元,其通过使用非球面法兰绒透镜排除镜面反射光分量并且检测散射光分量来收集来自样品的反射光的散射光分量 。
    • 93. 发明授权
    • Optical checking method and apparatus for defects in magnetic disks
    • 磁盘缺陷的光学检查方法和装置
    • US08208356B2
    • 2012-06-26
    • US12975405
    • 2010-12-22
    • Ayumu IshiharaHiroshi Nakajima
    • Ayumu IshiharaHiroshi Nakajima
    • G11B7/00G01N21/00
    • G11B20/18G11B2020/1826G11B2220/2516
    • An apparatus for optically checking magnetic disk defects that makes possible more accurate determination of positions of minute defects by illuminating an area greater than a checkup area with an illuminating beam having a Gaussian distribution is to be provided. The apparatus is configured of a specular reflection detecting device including a detector having a detecting face including an array of multiple pixels, and a processing device that figures out the position of each defect by using, in addition to the output signal from each of the pixels of the detector that detected a specular reflection from the checkup area, also output signals of some pixels out of the multiple pixels having detected the specular reflection from the checkup area of one turn before and the checkup area of one turn after, both adjoining in the radial direction, and determines the type of the defect.
    • 提供一种用于光学检查磁盘缺陷的装置,其能够通过用具有高斯分布的照明光束照射大于检查区域的区域来更精确地确定微小缺陷的位置。 该装置由包括具有包括多个像素的阵列的检测面的检测器的镜面反射检测装置构成,以及处理装置,除了来自每个像素的输出信号之外,还使用除去每个缺陷的位置 检测到来自检验区域的镜面反射的检测器的输出信号也输出从已经检测到来自前一轮的检查区域的检测区域的检测区域的多个像素中的一些像素的输出信号以及一匝之后的检验区域 径向,并确定缺陷的类型。
    • 95. 发明申请
    • OPTICAL CHECKING METHOD AND APPARATUS FOR DEFECTS IN MAGNETIC DISKS
    • 光学检测方法和磁性缺陷的装置
    • US20110158073A1
    • 2011-06-30
    • US12975405
    • 2010-12-22
    • Ayumu ISHIHARAHiroshi Nakajima
    • Ayumu ISHIHARAHiroshi Nakajima
    • G11B27/36
    • G11B20/18G11B2020/1826G11B2220/2516
    • An apparatus for optically checking magnetic disk defects that makes possible more accurate determination of positions of minute defects by illuminating an area greater than a checkup area with an illuminating beam having a Gaussian distribution is to be provided. The apparatus is configured of a specular reflection detecting device including a detector having a detecting face including an array of multiple pixels, and a processing device that figures out the position of each defect by using, in addition to the output signal from each of the pixels of the detector that detected a specular reflection from the checkup area, also output signals of some pixels out of the multiple pixels having detected the specular reflection from the checkup area of one turn before and the checkup area of one turn after, both adjoining in the radial direction, and determines the type of the defect.
    • 提供一种用于光学检查磁盘缺陷的装置,其能够通过用具有高斯分布的照明光束照射大于检查区域的区域来更精确地确定微小缺陷的位置。 该装置由包括具有包括多个像素的阵列的检测面的检测器的镜面反射检测装置构成,以及处理装置,除了来自每个像素的输出信号之外,还使用除去每个缺陷的位置 检测到来自检验区域的镜面反射的检测器的输出信号也输出从已经检测到来自前一轮的检查区域的检测区域的检测区域的多个像素中的一些像素的输出信号以及一匝之后的检验区域 径向,并确定缺陷的类型。