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    • 91. 发明授权
    • Devices having horizontally-disposed nanofabric articles and methods of making the same
    • 具有水平布置的纳米制品的装置及其制造方法
    • US07259410B2
    • 2007-08-21
    • US10776059
    • 2004-02-11
    • Venkatachalam C. JaiprakashJonathan W. WardThomas RueckesBrent M. Segal
    • Venkatachalam C. JaiprakashJonathan W. WardThomas RueckesBrent M. Segal
    • H01L27/10
    • G11C13/025B81B2203/0338B81B2203/04B81C1/00142B81C2201/0109B82Y10/00B82Y30/00B82Y40/00C01B32/162C01B2202/02C01B2202/22G11C11/56G11C23/00G11C2213/16G11C2213/77G11C2213/81H01H1/0094H01L21/76838H01L51/0048H01L2221/1094Y10S977/724Y10S977/734Y10S977/742
    • New devices having horizontally-disposed nanofabric articles and methods of making same are described. A discrete electromechanical device includes a structure having an electrically-conductive trace. A defined patch of nanotube fabric is disposed in spaced relation to the trace; and the defined patch of nanotube fabric is electromechanically deflectable between a first and second state. In the first state, the nanotube article is in spaced relation relative to the trace, and in the second state the nanotube article is in contact with the trace. A low resistance signal path is in electrical communication with the defined patch of nanofabric. Under certain embodiments, the structure includes a defined gap into which the electrically conductive trace is disposed. The defined gap has a defined width, and the defined patch of nanotube fabric spans the gap and has a longitudinal extent that is slightly longer than the defined width of the gap. Under certain embodiments, a clamp is disposed at each of two ends of the nanotube fabric segment and disposed over at least a portion of the nanotube fabric segment substantially at the edges defining the gap. Under certain embodiments, the clamp is made of electrically-conductive material. Under certain embodiments, the contact between the nanotube patch and the trace is a non-volatile state. Under certain embodiments, the contact between the nanotube patch and the trace is a volatile state. Under certain embodiments, the at least one electrically conductive trace has an interface material to alter the attractive force between the nanotube fabric segment and the electrically conductive trace.
    • 描述了具有水平布置的纳米制品的新器件及其制造方法。 分立的机电装置包括具有导电迹线的结构。 定义的纳米管织物贴片与痕迹间隔开设置; 并且所述限定的纳米管织物片在第一和第二状态之间是机电偏转的。 在第一状态下,纳米管制品相对于迹线具有间隔的关系,并且在第二状态下,纳米管制品与痕迹接触。 低电阻信号路径与所定义的纳米片段电连通。 在某些实施例中,该结构包括限定的导电迹线设置的间隙。 限定的间隙具有限定的宽度,并且限定的纳米管织物片段跨过间隙并且具有比限定的间隙宽度稍长的纵向范围。 在某些实施例中,夹具设置在纳米管织物片段的两端中的每一个处,并且在纳米管织物片段的至少一部分上大致位于限定间隙的边缘处。 在某些实施例中,夹具由导电材料制成。 在某些实施方案中,纳米管贴片和迹线之间的接触是非挥发性状态。 在某些实施方案中,纳米管贴片和迹线之间的接触是挥发性状态。 在某些实施例中,至少一个导电迹线具有界面材料,以改变纳米管织物片段和导电迹线之间的吸引力。
    • 92. 发明授权
    • Devices having vertically-disposed nanofabric articles and methods of making the same
    • 具有垂直布置的纳米制品的装置及其制造方法
    • US07112464B2
    • 2006-09-26
    • US11158217
    • 2005-06-21
    • Venkatachalam C. JaiprakashJonathan W. WardThomas RueckesBrent M. Segal
    • Venkatachalam C. JaiprakashJonathan W. WardThomas RueckesBrent M. Segal
    • H01L21/00
    • G11C13/025B81B2203/0338B81B2203/04B81C1/00142B81C2201/0109B82Y10/00B82Y30/00B82Y40/00C01B32/162C01B2202/02C01B2202/22G11C11/56G11C13/0033G11C23/00G11C2213/16G11C2213/77G11C2213/81H01H1/0094H01L21/76838H01L51/0048H01L2221/1094Y10S977/943
    • Electro-mechanical switches and memory cells using vertically-disposed nanofabric articles and methods of making the same are described. An electro-mechanical device, includes a structure having a major horizontal surface and a channel formed therein. A conductive trace is in the channel; and a nanotube article vertically suspended in the channel, in spaced relation to a vertical wall of the channel. The article is electro-mechanically deflectable in a horizontal direction toward the conductive trace. Under certain embodiments, the vertically suspended extent of the nanotube article is defined by a thin film process. Under certain embodiments, the vertically suspended extent of the nanotube article is about 50 nanometers or less. Under certain embodiments, the nanotube article is clamped with a conducting material disposed in porous spaces between some nanotubes of the nanotube article. Under certain embodiments, the nanotube article is formed from a porous nanofabric. Under certain embodiments, the nanotube article is electromechanically deflectable into contact with the conductive trace and the contact is either a volatile state or non-volatile state depending on the device construction. Under certain embodiments, the vertically oriented device is arranged into various forms of three-trace devices. Under certain embodiments, the channel may be used for multiple independent devices, or for devices that share a common electrode.
    • 描述了使用垂直布置的纳米制品的机电开关和存储单元及其制造方法。 机电装置包括具有主要水平表面和形成在其中的通道的结构。 通道中有导电迹线; 以及垂直悬挂在所述通道中的与所述通道的垂直壁成间隔开的纳米管制品。 该物品在水平方向上可电导向导电迹线偏转。 在某些实施方案中,纳米管制品的垂直悬浮程度由薄膜工艺限定。 在某些实施方案中,纳米管制品的垂直悬浮程度为约50纳米或更小。 在某些实施例中,纳米管制品被夹持在布置在纳米管制品的一些纳米管之间的多孔空间中的导电材料上。 在某些实施方案中,纳米管制品由多孔纳米纤维形成。 在某些实施例中,取决于器件结构,纳米管制品在机电上可偏转成与导电迹线接触,并且触点是易失性状态或非易失性状态。 在某些实施例中,垂直取向的装置被布置成各种形式的三轨迹装置。 在某些实施例中,信道可以用于多个独立设备,或者可以用于共享公共电极的设备。