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91. 发明授权

US4802809A Manipulator for standard mechanical interface apparatus 失效
标题翻译：用于标准机械接口设备的机械手
公开(公告)号：US4802809A
公开(公告)日：1989-02-07
申请号：US49393
申请日：1987-04-20
申请人： Anthony C. Bonora , Andrew W. O'Sullivan
发明人： Anthony C. Bonora , Andrew W. O'Sullivan
IPC分类号： H01L21/677 , B65G65/00
CPC分类号： H01L21/67781 , H01L21/67766 , H01L21/67772 , Y10S414/139 , Y10S414/14
摘要： The present invention provides an apparatus for transferring a cassette holding articles to be processed to and from a container supported at a processing station where the processing station has a cassette port for receiving the cassette when the cassette moves along a central axis extending from outside the processing station through the cassette port, and into the processing station, said apparatus comprising: a platform device including a cassette platform transportable substantially along the central axis for transferring the cassette to and from the container substantially along the central axis; a manipulator device including a first member extending substantially orthogonal to the central axis, the first member including a first portion and a second portion; a pivoting arm including a pivoting portion and a coupling portion, the pivoting portion mounted pivotally adjacent to the second portion of the first member, the pivoting arm operable to pivot about a pivot axis extending substantially through the pivoting portion and substantially perpendicular to the central axis; a coupling device mounted on the coupling portion of the pivoting arm for coupling to the cassette; and a tilt device for tilting the coupling device and the cassette coupled thereto during pivoting by said pivoting arm, such that during the pivoting the cassette tilts relative to the central axis.
摘要翻译： PCT No.PCT / US86 / 01758 Sec。 371日期1987年4月20日 102（e）日期1987年4月20日PCT提交1986年8月25日PCT公布。出版物WO87 / 01361 日期：1987年3月12日。本发明提供了一种用于将待加工物品的盒子保持在处理站的支撑处的处理站的处理站的装置，其中处理站具有用于当盒沿着中心轴从处理站外部通过盒式端口延伸，并且进入处理站，所述设备包括：平台装置，其包括可基本沿着中心轴线移动的盒式平台，用于将盒子基本上沿着中心轴线传送到容器 ; 操纵器装置，包括基本上垂直于所述中心轴延伸的第一构件，所述第一构件包括第一部分和第二部分; 枢转臂，其包括枢转部分和联接部分，所述枢转部分枢转地邻近所述第一部件的第二部分安装，所述枢转臂可操作以围绕枢转轴线枢转，所述枢转轴线基本上延伸穿过所述枢转部分并且基本上垂直于所述中心轴线 ; 连接装置，其安装在所述枢转臂的联接部分上，用于联接到所述盒; 以及倾斜装置，用于在由所述枢转臂枢转期间倾斜联接装置和联接到其上的盒，使得在转动期间，盒相对于中心轴倾斜。

92. 发明授权

US4674936A Short arm manipulator for standard mechanical interface apparatus 失效
标题翻译：用于标准机械接口设备的短臂操纵器
公开(公告)号：US4674936A
公开(公告)日：1987-06-23
申请号：US769850
申请日：1985-08-26
申请人： Anthony C. Bonora
发明人： Anthony C. Bonora
IPC分类号： H01L21/677 , B65G65/00
CPC分类号： H01L21/67766 , H01L21/67772 , Y10S414/139 , Y10S414/14
摘要： Disclosed is a manipulator for removing a cassette holding articles, such as semiconductor wafers, to be processed from a container supported on a processing station in a standard mechanical interface (SMIF) system. The container is supported on an interface port on the canopy of the processing station. A first platform is transportable along a shaft below the interface port. The platform is operable to mate with the interface port and receive the cassette from the container. The first platform is transported down the shaft, thereby removing the cassette from the container. An arm orthogonal to the shaft and mounted in the shaft supports a pivoting arm which swings to engage the cassette on the first platform and support the cassette off of the first platform. The pivoting arm pivots to transport the cassette to a location away from the shaft. The first platform is then transported back up the shaft to the interface port to seal the container to prevent particulate contamination. The pivot arm then pivots to swing the cassette to a host elevator which is located in alignment with the shaft below the first platform.
摘要翻译：公开了一种用于从在标准机械接口（SMIF）系统中的处理站上支撑的容器中移除待加工物品的诸如半导体晶片的盒子的机械手。容器支持在处理站的顶盖上的接口端口上。第一平台可沿着接口端口下方的轴运输。平台可操作以与接口端口配合并从容器接收盒带。第一平台沿着轴传送，从而将盒从容器中取出。与轴垂直并安装在轴中的臂支撑枢转臂，摆动臂摆动以使第一平台上的盒接合并将盒子从第一平台支撑。枢转臂枢转以将盒传送到远离轴的位置。然后将第一平台从轴传回到接口端口以密封容器以防止颗粒污染。枢转臂然后枢转以将盒子摆放到主机电梯，该主电梯位于与第一平台下方的轴对准的位置。

93. 发明授权

US4132037A Apparatus for polishing semiconductor wafers 失效
标题翻译：用于抛光半导体晶片的装置
公开(公告)号：US4132037A
公开(公告)日：1979-01-02
申请号：US772749
申请日：1977-02-28
申请人： Anthony C. Bonora
发明人： Anthony C. Bonora
IPC分类号： B24B37/00 , H01L21/02 , H01L21/302 , H01L21/304 , B24B37/04
CPC分类号： H01L21/02024 , B24B37/00 , B24B37/30
摘要： Semiconductor wafer polishing apparatus is described having a sheet of wafer mounting material on its carrier to rigidly hold a plurality of wafers to be polished during the polishing operation. The mounting material includes a lamina of a polymeric material which exhibits surface wetting characteristics to aid in adhering the back side of wafers thereto and a lamina of a volume compressible material which absorbs without wafer deformation any asperities on the back side of such wafers.
摘要翻译：描述了半导体晶片抛光装置，其在其载体上具有一片晶片安装材料，以在抛光操作期间刚性地保持待抛光的多个晶片。安装材料包括聚合物材料的层，其表现出表面润湿特性以有助于将晶片的背面粘附到其上，并且可以吸收体积可压缩材料的层，而不会在这种晶片的背面上吸收任何凹凸的晶片。

94. 发明授权

US09275885B2 Horizontal displacement mechanism for cleanroom material transfer systems 有权
标题翻译：洁净室材料输送系统的水平位移机构
公开(公告)号：US09275885B2
公开(公告)日：2016-03-01
申请号：US13457278
申请日：2012-04-26
申请人： Anthony C. Bonora
发明人： Anthony C. Bonora
IPC分类号： H01L21/677 , F16H25/18
CPC分类号： H01L21/67775 , F16H25/186 , H01L21/6773 , Y10T29/49826 , Y10T74/18312
摘要： A spiral cam has a tubular shaped portion defined by an interior cavity and an exterior surface that includes a cam contour. A linear slide assembly having a length defined along a rotational axis is defined to slide lengthwise into the interior cavity of the spiral cam. The linear slide assembly allows for movement of the spiral cam along the rotational axis and prevents rotation of the spiral cam relative to the linear slide assembly. A cam roller is fixed at a position proximate to the exterior surface of the spiral cam. The cam roller is disposed separate from the linear slide assembly and within the cam contour of the spiral cam. The cam roller engages the cam contour to move of the spiral cam along the rotational axis when the linear slide assembly and spiral cam are rotated in unison about the rotational axis relative to the cam roller.
摘要翻译：螺旋凸轮具有由内腔和包括凸轮轮廓的外表面限定的管状部分。具有沿着旋转轴线限定的长度的直线滑动组件被限定为纵向滑动到螺旋凸轮的内部空腔中。线性滑动组件允许螺旋凸轮沿着旋转轴线移动并且防止螺旋凸轮相对于线性滑块组件的旋转。凸轮辊固定在靠近螺旋凸轮的外表面的位置。凸轮辊与线性滑动组件分离并且在螺旋凸轮的凸轮轮廓内。当线性滑块组件和螺旋凸轮围绕旋转轴线相对于凸轮辊一致地旋转时，凸轮滚子接合凸轮轮廓以沿着旋转轴线移动螺旋凸轮。

95. 发明申请

US20120301260A1 Horizontal Displacement Mechanism for Cleanroom Material Transfer Systems 有权
标题翻译：无尘室物料输送系统水平位移机构
公开(公告)号：US20120301260A1
公开(公告)日：2012-11-29
申请号：US13457278
申请日：2012-04-26
申请人： Anthony C. Bonora
发明人： Anthony C. Bonora
IPC分类号： F16H25/12 , B23P11/00 , H01L21/677
CPC分类号： H01L21/67775 , F16H25/186 , H01L21/6773 , Y10T29/49826 , Y10T74/18312
摘要： A spiral cam has a tubular shaped portion defined by an interior cavity and an exterior surface that includes a cam contour. A linear slide assembly having a length defined along a rotational axis is defined to slide lengthwise into the interior cavity of the spiral cam. The linear slide assembly allows for movement of the spiral cam along the rotational axis and prevents rotation of the spiral cam relative to the linear slide assembly. A cam roller is fixed at a position proximate to the exterior surface of the spiral cam. The cam roller is disposed separate from the linear slide assembly and within the cam contour of the spiral cam. The cam roller engages the cam contour to move of the spiral cam along the rotational axis when the linear slide assembly and spiral cam are rotated in unison about the rotational axis relative to the cam roller.
摘要翻译：螺旋凸轮具有由内腔和包括凸轮轮廓的外表面限定的管状部分。具有沿着旋转轴线限定的长度的直线滑动组件被限定为纵向滑动到螺旋凸轮的内部空腔中。线性滑动组件允许螺旋凸轮沿着旋转轴线移动并且防止螺旋凸轮相对于线性滑块组件的旋转。凸轮辊固定在靠近螺旋凸轮的外表面的位置。凸轮辊与线性滑动组件分离并且在螺旋凸轮的凸轮轮廓内。当线性滑块组件和螺旋凸轮围绕旋转轴线相对于凸轮辊一致地旋转时，凸轮滚子接合凸轮轮廓以沿着旋转轴线移动螺旋凸轮。

96. 发明授权

US07661919B2 Discontinuous conveyor system 失效
标题翻译：不连续输送机系统
公开(公告)号：US07661919B2
公开(公告)日：2010-02-16
申请号：US11238030
申请日：2005-09-28
申请人： Anthony C. Bonora , Ted Rogers
发明人： Anthony C. Bonora , Ted Rogers
IPC分类号： H01L21/677
CPC分类号： H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67775
摘要： The present invention generally comprises a transport system for transporting containers throughout a fabrication facility, and more specifically through a tool bay in the fabrication facility. The present invention generally includes a first container transport system for transporting a container from an interbay conveyor towards the first tool bay, a second container transport system for moving a container away from the first tool bay and a tool loading device to move containers between the first and second container transport systems and a load port. A merged return conveyor for transporting a container between the second container transport system and the interbay conveyor may also be included.
摘要翻译：本发明通常包括用于在整个制造设备中运输容器的运输系统，并且更具体地，通过制造设备中的工具托架。本发明通常包括用于将容器从间隔式输送机运送到第一工具架的第一容器运输系统，用于使容器远离第一工具托架移动的第二容器运输系统和用于在第一工具托架之间移动容器的工具装载装置和第二个集装箱运输系统和一个装货港。还可以包括用于在第二容器运输系统和间隔间输送机之间运输集装箱的合并返回输送机。

97. 发明申请

US20080156679A1 ENVIRONMENTAL ISOLATION SYSTEM FOR FLAT PANEL DISPLAYS 审中-公开
标题翻译：平板显示屏的环境隔离系统
公开(公告)号：US20080156679A1
公开(公告)日：2008-07-03
申请号：US11953020
申请日：2007-12-08
申请人： Anthony C. Bonora , Michel Pharand , Richard Gould
发明人： Anthony C. Bonora , Michel Pharand , Richard Gould
IPC分类号： B65D85/00
CPC分类号： B65D81/2076 , B65D85/30 , B65D2585/6837 , H01L21/67017 , H01L21/6734 , H01L21/67363 , H01L21/67379 , H01L21/67383 , H01L21/67393 , H01L21/67772 , H01L21/67775
摘要： The present invention generally comprises a system for FPD material storage and transport. The FPD system may contain environmental protection, material tracking and/or workstation loading capabilities. One of the components of the system includes a transportable, sealable container. Another component of the system includes a sealable load port against which a container is docked so that the substrates may be processed.
摘要翻译：本发明通常包括用于FPD材料储存和运输的系统。 FPD系统可能包含环境保护，材料跟踪和/或工作站加载功能。该系统的一个部件包括一个可运输，可密封的容器。该系统的另一个部件包括可密封的负载端口，容器对准该负载端口，使得可以处理衬底。

98. 发明授权

US06575687B2 Wafer transport system 失效
公开(公告)号：US06575687B2
公开(公告)日：2003-06-10
申请号：US09729737
申请日：2000-12-04
申请人： Anthony C. Bonora , Robert R. Netsch , Richard Gould
发明人： Anthony C. Bonora , Robert R. Netsch , Richard Gould
IPC分类号： B65G4907
CPC分类号： G03F7/70525 , G03F7/70541 , G03F7/70741 , G03F7/7075 , H01L21/67769 , Y10S414/14
摘要： A wafer transport mechanism is disclosed capable of transferring workpiece cassettes between lot boxes and SMIF pods. The transport mechanism includes a frame having a first support platform on a first side of the frame for supporting a SMIF pod, and a second support platform on a second side of the frame for supporting a lot box. The frame further includes a carrier transfer mechanism which resides completely within the frame when in a home position. The transfer mechanism includes an arm and a gripper pivotally mounted to the arm. Once a SMIF pod and lot box are seated on their respective support platforms, the transfer mechanism transfers a cassette between the two containers.

99. 发明授权

US06308818B1 Transport system with integrated transport carrier and directors 失效
标题翻译：具有综合运输承运人和董事的运输系统
公开(公告)号：US06308818B1
公开(公告)日：2001-10-30
申请号：US09365457
申请日：1999-08-02
申请人： Anthony C. Bonora , Richard H. Gould
发明人： Anthony C. Bonora , Richard H. Gould
IPC分类号： B65G3700
CPC分类号： H01L21/67706 , B65G19/02 , B65G35/06 , B65G37/02 , B65G2201/0297 , H01L21/67715 , H01L21/67727 , H01L21/6773
摘要： A director assembly for selectively directing a transport carrier from one conveyor path portion to another. The director assembly having a pair of spaced director rails positioned below and in between drive and support rails of the conveyor. The pair of spaced director rails can be selectively raised and rotated and then lowered to direct the carrier to the new path portion.
摘要翻译：用于选择性地将运输工具从一个输送机路径部分引导到另一个的导向器组件。导向器组件具有位于输送机的驱动和支撑轨道下方并位于输送机的支撑轨道之间的一对间隔的导轨。一对间隔的导轨可以选择性地升高和旋转，然后降低以将载体引导到新的路径部分。

100. 发明授权

US06223886B1 Integrated roller transport pod and asynchronous conveyor 失效
公开(公告)号：US06223886B1
公开(公告)日：2001-05-01
申请号：US09103479
申请日：1998-06-24
申请人： Anthony C. Bonora , Richard H. Gould
发明人： Anthony C. Bonora , Richard H. Gould
IPC分类号： B65G2500
CPC分类号： H01L21/67706 , B65G13/04 , B65G37/02 , H01L21/67727 , H01L21/6773 , Y10S414/14
摘要： A system for transporting articles. The transport system includes a conveyor system which includes a transport device for carrying articles between workstations and a drive rail and a support rail for supporting the transport device. The drive rail includes a drive system for propelling the transport device between workstations. At least one shoe carried by the transport device rides on the support rail for movably supporting the transport device on the support rail. The transport system also includes a protective container including a housing having an interior compartment for supporting a plurality of articles. The bottom surface of the housing is configured to engage the drive system such that actuation of the drive system propels the housing along the drive and support rails. At least one shoe carried by the housing is configured to ride on the support rail of the conveyor system to movably support the housing on the support rail. The transport system also includes the method of transporting articles including the steps of providing a transport device for holding at least one article and having at least one shoe, positioning the transport device with the base of the device supported on a drive rail and the shoe supported on a support rail, and actuating a drive system carried by the drive rail to propel the transport device along the drive rail and support rail.

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