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    • 5. 发明授权
    • Information processing in which a simulation of parallelism is achieved
    • 实现并行仿真的信息处理
    • US5579495A
    • 1996-11-26
    • US411406
    • 1995-03-28
    • Kunitaka OzawaTsuneaki KadosawaTakashi NakamuraEiji KogaHitoshi Watanabe
    • Kunitaka OzawaTsuneaki KadosawaTakashi NakamuraEiji KogaHitoshi Watanabe
    • G06F9/46G06F9/48G06F9/40
    • G06F9/4881
    • An information processing system having a memory for storing a plurality of programs executed in a parallel processing manner, an instruction interpretation section for interpreting instructions in the programs, and an instruction execution section for executing the interpreted instructions. Queues for registering the numbers of the steps of the programs to be executed, wherein the numbers of the steps to be executed next are registered in the queues, the number of each step registered in the queues is read out, the processing to be performed in accordance with the step corresponding to the step number read out is interpreted, and instructions are given to the instruction interpretation section according to the content of the step interpreted. The step numbers of other steps to be executed are registered in the queues, and the plurality of programs are executed in parallel based on the order of the queues.
    • 一种具有用于存储以并行处理方式执行的多个程序的存储器的信息处理系统,用于解释程序中的指令的指令解释部分以及用于执行解释指令的指令执行部分。 用于登记要执行的程序的步骤的编号的队列,其中接下来要执行的步骤的编号被登记在队列中,读出登记在队列中的每个步骤的数量,在 根据对应于步骤编号读出的步骤进行解释,并且根据所解释的步骤的内容给出指令解释部分的指令。 要执行的其他步骤的步骤号被登记在队列中,并且基于队列的顺序并行地执行多个程序。
    • 8. 发明授权
    • Exposure apparatus and device manufacturing method
    • 曝光装置和装置制造方法
    • US08373147B2
    • 2013-02-12
    • US12566293
    • 2009-09-24
    • Daisuke ItaiKunitaka Ozawa
    • Daisuke ItaiKunitaka Ozawa
    • G01N21/84G06F17/00
    • H01L21/67288G03F7/70508G03F7/707G03F7/7085G03F7/70916
    • An information processing apparatus, for processing information of a plurality of measured heights respectively corresponding to a plurality of measurement points on a surface of a substrate held by a chuck, includes a processor and an output device. The processor is configured to specify, with respect to the surface, a plurality of areas that are arrayed and a plurality of sections each constituted by a number of the plurality of areas, extract at least two inclinations of a plurality of inclinations respectively corresponding to the number of the plurality of areas based on the plurality of measured heights with respect to each of the plurality of sections, and cause the output device to output information specifying a section of the plurality of sections that satisfies a first condition that a product of two inclinations among the at least two inclinations exceeds a predetermined threshold.
    • 一种用于处理分别对应于由卡盘保持的基板的表面上的多个测量点的多个测量高度的信息的信息处理设备,包括处理器和输出设备。 处理器被配置为相对于表面指定排列的多个区域和由多个区域中的多个区域构成的多个区段,提取分别对应于多个区域的多个倾斜度的至少两个倾斜度 基于多个测量高度的多个区域的数量相对于多个区间中的每一个,并且使得输出设备输出指定满足第一条件的多个区段的一部分的信息,该第一条件是两个倾斜度的乘积 在所述至少两个倾斜度中超过预定阈值。
    • 10. 发明申请
    • INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND MEMORY MEDIUM
    • 信息处理设备,信息处理方法和存储介质
    • US20090187379A1
    • 2009-07-23
    • US12356251
    • 2009-01-20
    • Daisuke ItaiYoshihiro KawauchiKunitaka Ozawa
    • Daisuke ItaiYoshihiro KawauchiKunitaka Ozawa
    • G06F17/18
    • G03F7/70525
    • An information processing apparatus for processing information generated by an exposure apparatus which exposes a substrate to radiant energy, comprises an information collecting unit configured to collect first apparatus information obtained by the exposure apparatus via an operation thereof with respect to each of a plurality of first regions which form a first array defined on the substrate, a converting unit configured to convert at least a part of the first apparatus information collected with respect to each of the plurality of first regions by the information collecting unit into second apparatus information with respect to each of a plurality of second regions which form a second array, a statistical processing unit configured to statistically process the second apparatus information, and an analyzing unit configured to analyze the statistical processing result obtained by the statistical processing unit.
    • 一种信息处理设备,用于处理由曝光基板产生的辐射能量的曝光装置产生的信息,包括信息收集单元,被配置为收集由曝光装置获得的第一装置信息,该信息通过其对多个第一区域 其形成在所述基板上限定的第一阵列,转换单元,被配置为将由所述信息收集单元将针对所述多个第一区域中的每一个收集的所述第一装置信息的至少一部分转换为关于每个所述第一装置信息的第二装置信息 形成第二阵列的多个第二区域,统计处理单元,被配置为统计处理第二装置信息;以及分析单元,被配置为分析由统计处理单元获得的统计处理结果。