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1. 发明授权

US5417312A Semiconductor acceleration sensor and vehicle control system using the same 失效
标题翻译：半导体加速度传感器和车辆控制系统使用相同
公开(公告)号：US5417312A
公开(公告)日：1995-05-23
申请号：US147083
申请日：1993-11-03
申请人： Shigeki Tsuchitani , Seiko Suzuki , Tomoyuki Tanaka , Masayuki Miki , Masahiro Matsumoto , Norio Ichikawa , Hiromichi Ebine , Yukiko Sugisawa , Kanemasa Sato , Sadayasu Ueno , Yasuhiro Asano , Masanori Kubota , Masayoshi Suzuki
发明人： Shigeki Tsuchitani , Seiko Suzuki , Tomoyuki Tanaka , Masayuki Miki , Masahiro Matsumoto , Norio Ichikawa , Hiromichi Ebine , Yukiko Sugisawa , Kanemasa Sato , Sadayasu Ueno , Yasuhiro Asano , Masanori Kubota , Masayoshi Suzuki
IPC分类号： G01P1/00 , G01P15/125 , G01P15/13 , B60T8/58 , B60T8/72 , G01P15/08
CPC分类号： G01P15/125 , G01P1/003 , G01P15/131 , G01P2015/0828
摘要： A semiconductor acceleration sensor is formed by a cantilever having a conductive movable electrode of predetermined mass at one end, at least one pair of fixed conductive electrodes which are stationary with respect to the movable electrode located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate to which the fixed electrodes are mounted, a lower melting point material is firstly coated on the substrates. A sensor detector unit processing circuit has the output characteristic of the circuit digitally adjusted by suitable switching of a plurality of resistors, and the sensor chip and the detector unit integrated circuit may be located on a common base and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40.degree. C. or lower is, advantageously, charged into the hermetically sealed chamber.
摘要翻译：半导体加速度传感器由具有在一端具有预定质量的导电可移动电极的悬臂形成，相对于位于可动电极的相对侧上的可动电极固定的至少一对固定导电电极和提供的间隙在可动电极和固定电极之间。为了防止可动电极与被接触的固定电极熔合，在本发明的第一方面中，在可动电极和固定电极之间设置绝缘层，该层位于可动电极上或固定电极上，第二方面，可动电极或优选固定电极由高熔点材料形成。在这样的第二方面，为了提高高熔点材料与安装有固定电极的基板之间的粘附性，首先在基板上涂覆较低熔点的材料。传感器检测器单元处理电路具有通过多个电阻器的合适切换数字调节的电路的输出特性，并且传感器芯片和检测器单元集成电路可以位于公共基座上并且安装在气密密封的室中以防止影响传感器和检测器单元组件运行的不利环境影响。露点为-40℃或更低的气体有利地被装入密封的气室中。

2. 发明授权

US5367429A Electrostatic type micro transducer and control system using the same 失效
标题翻译：静电式微型换能器及使用其的控制系统
公开(公告)号：US5367429A
公开(公告)日：1994-11-22
申请号：US962508
申请日：1992-10-16
申请人： Shigeki Tsuchitani , Seiko Suzuki , Satoshi Shimada , Masayuki Miki , Masahiro Matsumoto , Susumu Murakami , Akira Koide , Masahiro Kurita , Hiromichi Ebine
发明人： Shigeki Tsuchitani , Seiko Suzuki , Satoshi Shimada , Masayuki Miki , Masahiro Matsumoto , Susumu Murakami , Akira Koide , Masahiro Kurita , Hiromichi Ebine
IPC分类号： B60K23/00 , B81B3/00 , G01P15/125 , H01G7/00 , G01P15/08 , H01G13/00
CPC分类号： B81B3/0008 , B81B3/001 , G01P15/125 , G01P2015/0828 , H01H2059/0018 , H01H2059/0072
摘要： An electrostatic type micro accelerometer comprising means for preventing permanent sticking between a movable electrode and a stationary electrode due to residual dielectric polarization, resisual electric charges and water adsorption and condensation around possible contacting portions therebetween when the movable electrode excessively displaces. The sticking preventing means is realized by disposing one of electric field reducing means, water adsorption and condensation reducing means and contacting area limiting means around the possible contacting portions.
摘要翻译：一种静电型微加速度计，包括当可移动电极过度位移时，由于残余电介质极化，电阻和残余电荷以及在其间可能的接触部分的水吸附和冷凝而防止可动电极和固定电极之间的永久性粘附的装置。防粘装置通过在可能的接触部分周围设置电场减小装置，水吸附和冷凝减少装置和接触区域限制装置来实现。

3. 发明授权

US5392651A Capacitance type accelerometer 失效
标题翻译：电容式加速度计
公开(公告)号：US5392651A
公开(公告)日：1995-02-28
申请号：US161456
申请日：1993-12-06
申请人： Seiko Suzuki , Shigeki Tsuchitani , Masayuki Miki , Masahiro Matsumoto
发明人： Seiko Suzuki , Shigeki Tsuchitani , Masayuki Miki , Masahiro Matsumoto
IPC分类号： G01L9/00 , G01L9/12 , G01P15/08 , G01P15/125 , G01P15/13 , H01L29/84 , H01L21/283
CPC分类号： B81C1/00301 , G01P15/0802 , G01P15/125 , G01P15/131 , B81B2201/0235 , B81B2207/095 , B81B2207/096 , G01P2015/0828
摘要： A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate formed a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are sticked to the both side of the silicon plate except the movable electrode and leading wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates respectively deriving. These capacitance type accelerometers are made by processing and cutting a wafer by dicing saw without coming into the accelerometer of cutting chips or cutting water.
摘要翻译：一种电容式加速度计，其具有形成根据加速度移动的可动电极的第一硅板，分隔设置在第一硅板两侧的两个第二硅板和分别设置的热氧化膜在除了可移动电极之外的第一硅板和两个第二硅板之间的第一硅板之间，并将除可移动电极之外的第一硅板和两个第二硅板粘合在一起。此外，电容型加速度计具有形成有根据加速度移动的可移动电极的硅板，分别在其上分别安装与硅板相对的导电层的玻璃板，并且粘附到两者上除了可移动电极之外的硅板的侧面以及分别通过形成在硅板和玻璃板之间的槽分别连接到导电层的导线。这些电容式加速度计是通过切割锯切割晶片而不进入切割芯片或切割水的加速度计来制造的。

4. 发明授权

US5243861A Capacitive type semiconductor accelerometer 失效
标题翻译：电容式半导体加速度计
公开(公告)号：US5243861A
公开(公告)日：1993-09-14
申请号：US755838
申请日：1991-09-06
申请人： Benjamin Kloeck , Seiko Suzuki , Shigeki Tsuchitani , Masayuki Miki , Masahiro Matsumoto , Kazuo Sato , Akira Koide , Norio Ichikawa , Yukiko Kawai , Hiromichi Ebine
发明人： Benjamin Kloeck , Seiko Suzuki , Shigeki Tsuchitani , Masayuki Miki , Masahiro Matsumoto , Kazuo Sato , Akira Koide , Norio Ichikawa , Yukiko Kawai , Hiromichi Ebine
IPC分类号： B81B3/00 , B81B7/00 , G01P15/08 , G01P15/125
CPC分类号： B81B7/007 , G01P15/0802 , G01P15/125 , G01P2015/0828 , H01L2224/45144 , H01L2224/48463
摘要： A capacitive type semiconductor accelerometer has an intermediate silicon plate of n type conductivity including a movable electrode constituting a pendulum mass formed within the intermediate silicon plate and supported thereby via a beam so as to permit movement in a direction perpendicular to its plane. A first conductive island is formed within the intermediate plate and is immovably supported thereby via a first insulating leg so as to be isolated therefrom, and an upper glass plate is anodic bonded to the intermediate silicon plate. A first stationary electrode is formed on the upper glass plate at the position facing one face of the movable electrode with a predetermined gap. A lower glass plate is anodic bonded to the intermediate silicon plate and a second stationary electrode is formed on the lower glass plate at the position facing the other face of the movable electrode with a predetermined gap. First, second and third pads are disposed in common on the lower glass plate at the outside of the intermediate silicon plate, the first pad being electrically connected to the first stationary electrode via a first thin film lead formed on the lower glass plate and the first conductive island, the second pad being electrically connected to the movable electrode via a second thin film lead formed on the lower glass plate and the intermediate silicon plate and the third pad being electrically connected to the second stationary electrode via a third thin film lead formed on the lower glass plate.
摘要翻译：电容式半导体加速度计具有n型导电性的中间硅板，其包括形成在中间硅板内的摆锤块的可动电极，并通过光束被支撑，以允许沿垂直于其平面的方向移动。第一导电岛形成在中间板内，并通过第一绝缘腿不可移动地支撑，以便与之隔离，并且上玻璃板阳极接合到中间硅板。第一固定电极形成在上玻璃板上，以与预定间隙相对的可移动电极的一个面的位置。下玻璃板阳极接合到中间硅板上，并且在与可移动电极的另一面相对的位置处以预定间隙形成在下玻璃板上的第二固定电极。首先，第二和第三焊盘共同设置在中间硅板的外侧的下玻璃板上，第一焊盘通过形成在下玻璃板上的第一薄膜引线和第一焊盘电连接到第一固定电极所述第二焊盘通过形成在所述下玻璃板上的第二薄膜引线电连接到所述可动电极，并且所述中间硅板和所述第三焊盘通过形成在所述导电岛上的第三薄膜引线电连接到所述第二固定电极，下玻璃板。

5. 发明授权

US5559290A Capacitance type accelerometer 失效
标题翻译：电容式加速度计
公开(公告)号：US5559290A
公开(公告)日：1996-09-24
申请号：US457491
申请日：1995-06-01
申请人： Seiko Suzuki , Shigeki Tsuchitani , Masayuki Miki , Masahiro Matsumoto
发明人： Seiko Suzuki , Shigeki Tsuchitani , Masayuki Miki , Masahiro Matsumoto
IPC分类号： G01L9/00 , G01L9/12 , G01P15/08 , G01P15/125 , G01P15/13 , H01L29/84 , H01L21/283
CPC分类号： B81C1/00301 , G01P15/0802 , G01P15/125 , G01P15/131 , B81B2201/0235 , B81B2207/095 , B81B2207/096 , G01P2015/0828
摘要： A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate formed a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are sticked to the both side of the silicon plate except the movable electrode and leeding wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates respectively deriving. These capacitance type accelerometers are made by processing and cutting a wafer by dicing saw without coming into the accelerometer of cutting chips or cutting water.
摘要翻译：一种电容式加速度计，其具有形成根据加速度移动的可动电极的第一硅板，分隔设置在第一硅板两侧的两个第二硅板和分别设置的热氧化膜在除了可移动电极之外的第一硅板和两个第二硅板之间的第一硅板之间，并将除可移动电极之外的第一硅板和两个第二硅板粘合在一起。此外，电容型加速度计具有形成有根据加速度移动的可移动电极的硅板，分别在其上分别安装与硅板相对的导电层的玻璃板，并且粘附到两者上除了可移动电极之外的硅板的侧面以及分别通过形成在硅板和玻璃板之间的凹槽连接到导电层的引线。这些电容式加速度计是通过切割锯切割晶片而不进入切割芯片或切割水的加速度计来制造的。

6. 发明授权

US5350189A Capacitance type accelerometer for air bag system 失效
标题翻译：用于气囊系统的电容式加速度计
公开(公告)号：US5350189A
公开(公告)日：1994-09-27
申请号：US918021
申请日：1992-07-24
申请人： Shigeki Tsuchitani , Seiko Suzuki , Masayuki Miki , Masahiro Matsumoto
发明人： Shigeki Tsuchitani , Seiko Suzuki , Masayuki Miki , Masahiro Matsumoto
IPC分类号： B60R21/16 , G01P1/00 , G01P15/125 , H01L21/302
CPC分类号： G01P1/003 , G01P15/125 , G01P2015/0828
摘要： In a capacitance type accelerometer used for an air bag system etc., a plurality of grooves crossing each other are provided on the surface of a movable electrode which is arranged to face a fixed electrode at a portion having a gap thereinbetween, and end portions of each groove open to an outside space at the portion between the movable electrode and the fixed electrode. The grooves can be provided on surface of the fixed electrodes. Ventilation between inside and outside of the facing portion is improved by opening of the grooves to outside space, and air damping which is caused at operation of the movable electrode at the gap between the electrodes is reduced, and, consequently, response speed of the movable electrode is increased.
摘要翻译：在用于气囊系统等的电容型加速度计等中，在可动电极的表面上设置有多个彼此交叉的槽，该可动电极的表面设置成在其间具有间隙的部分和固定电极的一部分每个槽在可动电极和固定电极之间的部分处向外部空间开放。沟槽可以设置在固定电极的表面上。通过将凹槽打开到外部空间来改善面对部分的内部和外部之间的通风，并且在可动电极在电极之间的间隙操作时引起的空气阻尼减小，因此可移动的响应速度电极增加。

7. 发明授权

US5095752A Capacitance type accelerometer 失效
标题翻译：电容式加速度计
公开(公告)号：US5095752A
公开(公告)日：1992-03-17
申请号：US429546
申请日：1989-10-31
申请人： Seiko Suzuki , Shigeki Tsuchitani , Masayuki Miki , Masahiro Matsumoto
发明人： Seiko Suzuki , Shigeki Tsuchitani , Masayuki Miki , Masahiro Matsumoto
IPC分类号： G01L9/00 , G01L9/12 , G01P15/08 , G01P15/125 , G01P15/13 , H01L29/84
CPC分类号： B81C1/00301 , G01P15/0802 , G01P15/125 , G01P15/131 , B81B2201/0235 , B81B2207/095 , B81B2207/096 , G01P2015/0828
摘要： A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate forming a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are connected to both sides of the silicon plate except the movable electrode and lead wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates.

8. 发明授权

US5228341A Capacitive acceleration detector having reduced mass portion 失效
标题翻译：具有减少质量部分的电容式加速度检测器
公开(公告)号：US5228341A
公开(公告)日：1993-07-20
申请号：US596367
申请日：1990-10-12
申请人： Shigeki Tsuchitani , Seiko Suzuki , Satoshi Shimada , Masayuki Miki , Masahiro Matsumoto , Yoshihiro Yokota , Shotaro Naito
发明人： Shigeki Tsuchitani , Seiko Suzuki , Satoshi Shimada , Masayuki Miki , Masahiro Matsumoto , Yoshihiro Yokota , Shotaro Naito
IPC分类号： G01D5/241 , G01P15/08 , G01P15/125 , H01G5/16 , H01L21/3065
CPC分类号： G01P15/125 , G01D5/2417 , G01P15/0802 , H01G5/16 , H01L21/3065 , G01P2015/0828
摘要： Disclosed is an acceleration detector which has an electrically conductive mass portion formed at a free end of a cantilever, and fixed electrodes arranged opposite to the mass portion through a gap so that the value of acceleration is detected on the basis of the change of capacitance between the mass portion and the fixed electrodes, and in which at least one space is formed in the inside of the mass portion to lighten the weight of the mass portion to thereby widen the range of measurement.
摘要翻译：公开了一种加速度检测器，其具有形成在悬臂的自由端的导电质量部分，以及通过间隙与质量部分相对布置的固定电极，使得基于电容值的变化来检测加速度值质量部分和固定电极，并且其中在质量部分的内部中形成至少一个空间以减轻质量部分的重量，从而扩大测量范围。

9. 发明授权

US5365768A Sensor 失效
标题翻译：传感器
公开(公告)号：US5365768A
公开(公告)日：1994-11-22
申请号：US166148
申请日：1993-12-14
申请人： Seiko Suzuki , Kazuo Kato , Masahiro Matsumoto , Shigeki Tsuchitani , Masayuki Miki , Yoshihiro Yokota
发明人： Seiko Suzuki , Kazuo Kato , Masahiro Matsumoto , Shigeki Tsuchitani , Masayuki Miki , Yoshihiro Yokota
IPC分类号： G01D3/02 , G01L1/22 , G01L27/00 , G01P21/00 , G01D5/252 , G01D3/04
CPC分类号： G01L27/005 , G01D3/022 , G01L1/2268 , G01P21/00 , H01L2224/48091 , H01L2224/48137 , H01L2924/16152
摘要： A signal processor (5) is coupled to a detector (6) for detecting a physical quantity. The signal processor has a zero adjustment memory (14) and a sensitivity adjustment memory (16). The zero adjustment memory and the sensitivity adjustment memory have a number of switches (20, 20A, 20', 20"), respectively. These switches are changed over digitally using a zener zapping method or a polysilicon fuse method at each switch to adjust the characteristics of the detector.
摘要翻译：信号处理器（5）耦合到用于检测物理量的检测器（6）。信号处理器具有零调节存储器（14）和灵敏度调整存储器（16）。零调整存储器和灵敏度调节存储器分别具有多个开关（20,20A，20'，20“）。这些开关在每个开关处使用齐纳切换方法或多晶硅熔丝方法进行数字转换，以调整检测器的特性。

10. 发明授权

US5095750A Accelerometer with pulse width modulation 失效
标题翻译：带脉冲宽度调制的加速度计
公开(公告)号：US5095750A
公开(公告)日：1992-03-17
申请号：US542823
申请日：1990-06-25
申请人： Seikou Suzuki , Shigeki Tsuchitani , Satoshi Shimada , Masayuki Miki , Shigeyuki Kobori , Masahiro Matsumoto
发明人： Seikou Suzuki , Shigeki Tsuchitani , Satoshi Shimada , Masayuki Miki , Shigeyuki Kobori , Masahiro Matsumoto
IPC分类号： G01P15/125 , G01P15/13
CPC分类号： G01P15/131 , G01P15/125 , G01P2015/0828
摘要： An accelerometer having a movable electrode which is moved according to acceleration with respect to a fixed electrode disposed in opposition to the movable electrode. An output device generates an output voltage which is proportional to the acceleration by measuring a gap between the movable electrode and the fixed electrode. A pulse width modulator generates pulses, wherein a pulse width of the pulses is modulated according to the output voltage, and a feedback device feeds back an electrostatic force which is proportional to the pulse width of the pulses from the pulse modulator between the movable electrode and the fixed electrode. As the acceleration in the acceleration sensor is linearly detected, the acceleration sensor is easily adjusted.

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