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    • 5. 发明授权
    • Radiation-sensitive resin composition
    • 辐射敏感树脂组合物
    • US06623907B2
    • 2003-09-23
    • US09774714
    • 2001-02-01
    • Jun NumataAki SuzukiHiromichi HaraNorihiro NatsumeKiyoshi MurataMasafumi YamamotoAkimasa SoyanoToru KajitaTsutomu Shimokawa
    • Jun NumataAki SuzukiHiromichi HaraNorihiro NatsumeKiyoshi MurataMasafumi YamamotoAkimasa SoyanoToru KajitaTsutomu Shimokawa
    • G03F7004
    • G03F7/0045G03F7/038G03F7/039Y10S430/111Y10S430/128
    • A positive-tone radiation-sensitive resin composition comprising: (A) a low molecular weight compound having at least one amino group in which the nitrogen atom has at least one hydrogen atom bonded thereto and at least one of the hydrogen atoms is replaced by a t-butoxycarbonyl group, (B) a photoacid generator, and (C-1) a resin insoluble or scarcely soluble in alkali which is protected by an acid-dissociable group and becomes soluble in alkali when the acid-dissociable group dissociates or (C-2) an alkali-soluble resin and an alkali solubility control agent is disclosed. Also disclosed is a negative-tone radiation-sensitive resin composition comprising the low molecular weight compound (A), the photoacid generator (B), an alkali-soluble resin (D), and a compound capable of crosslinking with the alkali-soluble resin in the presence of an acid(E). The composition are useful as a chemically amplified resist which effectively responds to various radiations, exhibits superior sensitivity and resolution, forms fine patterns at a high precision and in a stable manner even if the patterns are isolated line patterns.
    • 一种正色辐射敏感性树脂组合物,其包含:(A)具有至少一个氨基的低分子量化合物,其中所述氮原子具有与其键合的至少一个氢原子,并且至少一个氢原子被 叔丁氧基羰基,(B)光酸产生剂和(C-1)不溶于或几乎不溶于碱的树脂,其被酸解离基团保护并且当酸解离基解离时变得可溶于碱,或(C -2)碱溶性树脂和碱溶性控制剂。 还公开了包含低分子量化合物(A),光酸产生剂(B),碱溶性树脂(D)和能够与碱溶性树脂交联的化合物的负色辐射敏感性树脂组合物 在酸(E)的存在下。 该组合物可用作化学放大抗蚀剂,其有效地响应各种辐射,表现出优异的灵敏度和分辨率,即使图案是隔离线图案,也以高精度和稳定的方式形成精细图案。
    • 6. 发明授权
    • Singulation metal mold and method for producing semiconductor device
    • 单金属模具及半导体装置的制造方法
    • US07731764B2
    • 2010-06-08
    • US11954528
    • 2007-12-12
    • Takumi SatoAki Suzuki
    • Takumi SatoAki Suzuki
    • H01L21/67
    • H01L21/4842H01L24/97H01L2224/50Y10T29/41
    • A singulation metal mold for singulating a plurality of semiconductor devices arrayed on a TAB tape has a punch as an upper metal mold of the singulation metal mold, a die block as a lower metal mold of the singulation metal mold, a knockout disposed to be slidable vertically inside a vertical hole formed in the die block, the knockout being operable to press up above the die block each of the singulated semiconductor devices left on the die block after the singulating, a press-up plate positioned under the knockout to support the knockout and linked mechanically to the knockout, and being operable to forcibly move the knockout vertically when the press-up plate moves vertically; and a press-up plate descent forcing mechanism that is operable to forcibly pull down the press-up plate.
    • 用于分离排列在TAB带上的多个半导体器件的单片金属模具具有作为分割金属模具的上金属模具的冲头,作为分割金属模具的下金属模具的模具块,设置成可滑动的敲除 垂直于形成在模具块中的竖直孔内,该敲除器可操作以在切割单元之后向上挤压留在模块上的每个单片化半导体器件的模具块,位于敲除下方的加压板以支撑敲除 并且机械地连接到脱模器,并且当按压板垂直移动时可操作地垂直地移动敲击; 以及可操作以强制拉下压板的压板下降力机构。