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    • 4. 发明申请
    • Phase Analyzer, Phase Analysis Method, and Surface Analyzer
    • 相位分析仪,相位分析方法和表面分析仪
    • US20150362446A1
    • 2015-12-17
    • US14716984
    • 2015-05-20
    • JEOL Ltd.
    • Naoki KatoMasaru TakakuraNorihisa MoriShinya FujitaShigeru Honda
    • G01N23/225H01J37/244H01J37/06
    • G01N23/2252H01J37/244H01J2237/2445H01J2237/2448
    • A phase analyzer includes a principal component analysis section that performs principal component analysis on elemental map data that represents an intensity or concentration distribution corresponding to each element to calculate a principal component score corresponding to each unit area of the elemental map data, a scatter diagram generation section that plots the calculated principal component score to generate a scatter diagram of the principal component score, a peak position detection section that detects a peak position from the scatter diagram, a clustering section that calculates a distance between each point and each peak position within the scatter diagram, and classifies each point within the scatter diagram into a plurality of groups based on the distance, and a phase map generation section that generates a phase map based on classification results of the clustering section.
    • 相位分析器包括:主成分分析部,其对表示与各元素对应的强度或浓度分布的元素图数据进行主成分分析,计算与基本图数据的各单位面积对应的主成分分数;散点图生成 绘制计算出的主成分分数以生成主分量分数的散点图,峰值位置检测部分,其根据散点图检测峰值位置;聚类部分,其计算每个点与每个峰值位置之间的距离; 散点图,并且根据距离将散点图内的每个点分类成多个组;以及相位图生成部,其基于聚类部的分类结果生成相位图。
    • 10. 发明授权
    • Phase analyzer, phase analysis method, and surface analyzer
    • 相位分析仪,相位分析法和表面分析仪
    • US09518942B2
    • 2016-12-13
    • US14716984
    • 2015-05-20
    • JEOL Ltd.
    • Naoki KatoMasaru TakakuraNorihisa MoriShinya FujitaShigeru Honda
    • G01N23/222G01N23/225H01J37/244
    • G01N23/2252H01J37/244H01J2237/2445H01J2237/2448
    • A phase analyzer includes a principal component analysis section that performs principal component analysis on elemental map data that represents an intensity or concentration distribution corresponding to each element to calculate a principal component score corresponding to each unit area of the elemental map data, a scatter diagram generation section that plots the calculated principal component score to generate a scatter diagram of the principal component score, a peak position detection section that detects a peak position from the scatter diagram, a clustering section that calculates a distance between each point and each peak position within the scatter diagram, and classifies each point within the scatter diagram into a plurality of groups based on the distance, and a phase map generation section that generates a phase map based on classification results of the clustering section.
    • 相位分析器包括:主成分分析部,其对表示与各元素对应的强度或浓度分布的元素图数据进行主成分分析,计算与基本图数据的各单位面积对应的主成分分数;散点图生成 绘制计算出的主成分分数以生成主分量分数的散点图,峰值位置检测部分,其根据散点图检测峰值位置;聚类部分,其计算每个点与每个峰值位置之间的距离; 散点图,并且根据距离将散点图内的每个点分类成多个组;以及相位图生成部,其基于聚类部的分类结果生成相位图。