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    • 5. 发明授权
    • Optimized waveguide structure
    • 优化波导结构
    • US5719976A
    • 1998-02-17
    • US547767
    • 1995-10-24
    • Charles Howard HenryEdward John LaskowskiYuan P. LiHenry Howard Yaffe
    • Charles Howard HenryEdward John LaskowskiYuan P. LiHenry Howard Yaffe
    • G02B6/30G02B6/12G02B6/122G02B6/126G02B6/34G02B6/26
    • G02B6/12009G02B6/12004G02B6/122G02B6/1228G02B2006/12119G02B2006/12169
    • An optimized waveguide structure enables the functional integration of various passive optic components on a single substrate. The optimized waveguide structure is characterized by a thicker core layer than used for square core waveguides and a core width that changes according to different functional regions of the optic circuit within which it is incorporated. The height (H) of the waveguide core is determined by the thickness of the core layer defined during the fabrication process and is ideally uniform across the circuit. The width (W) of the core, however, is changed between functional regions by the photo-lithographic mask and the chemical etching during the fabrication process. By way of example, an optimized waveguide structure for a P-doped silica planar waveguide with a .DELTA. approximately 0.6% for wavelength .lambda.=1.2-1.7 .mu.m, has a single uniform height of H=6.7 .mu.m and a width that changes between W=4 .mu.m in a coupler region, W=5.5 .mu.m in a bend region, W=9 .mu.m in a fiber coupling region, and W=10 .mu.m in a phase grating region of a Dragone router. Adiabatic tapers are used as transition regions between regions of different core widths.
    • 优化的波导结构使得能够在单个基板上的各种无源光学元件的功能集成。 优化的波导结构的特征在于比用于方芯波导的核心层更厚,并且根据其所结合的光电路的不同功能区域而变化的芯宽度。 波导芯的高度(H)由在制造过程中限定的芯层的厚度确定,并且在整个电路上理想地是均匀的。 然而,通过光刻掩模和制造过程中的化学蚀刻在功能区域之间改变芯的宽度(W)。 作为示例,用于波长λ=1.2-1.7μm的DELTA约0.6%的P掺杂二氧化硅平面波导的优化波导结构具有H =6.7μm的单一均匀高度,并且宽度在 在耦合器区域中W =4μm,在弯曲区域中W =5.5μm,在光纤耦合区域中W =9μm,在Dragone路由器的相位光栅区域中W =10μm。 绝热锥度用作不同芯宽的区域之间的过渡区域。