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1. 发明申请

US20100071098A1 SCANNING PROBE EPITAXY 审中-公开
标题翻译：扫描探头外观
公开(公告)号：US20100071098A1
公开(公告)日：2010-03-18
申请号：US12465616
申请日：2009-05-13
申请人： Chad A. Mirkin , Chang Liu , Yuhuang Wang , Adam B. Braunschweig , Xing Liao , Louise R. Giam , Byung Y. Lee , Shifeng Li , Joseph S. Fragala , Albert K. Henning
发明人： Chad A. Mirkin , Chang Liu , Yuhuang Wang , Adam B. Braunschweig , Xing Liao , Louise R. Giam , Byung Y. Lee , Shifeng Li , Joseph S. Fragala , Albert K. Henning
IPC分类号： G01Q60/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A dual tip probe for scanning probe epitaxy is disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The dual tip probe further includes a rib disposed on the cantilever arm between the first and second tips. The dual tip probe can also include a strain gauge disposed along the length of the cantilever arm.
摘要翻译：公开了一种用于扫描探针外延的双尖端探针。双尖头探针包括设置在悬臂上的第一和第二尖端。第一和第二提示可以分别是读取器尖端和合成尖端。双尖头探针还包括设置在第一和第二尖端之间的悬臂上的肋条。双尖头探针还可以包括沿着悬臂的长度设置的应变仪。

2. 发明申请

US20120297509A1 MASSIVELY PARALLEL LITHOGRAPHY WITH TWO-DIMENSIONAL PEN ARRAYS 审中-公开
标题翻译：具有两维笔阵列的大规模并行平版印刷
公开(公告)号：US20120297509A1
公开(公告)日：2012-11-22
申请号：US13530006
申请日：2012-06-21
申请人： Chad A. Mirkin , Khalid Salaita , Yuhuang Wang , Joseph S. Fragala , Raymond R. Shile
发明人： Chad A. Mirkin , Khalid Salaita , Yuhuang Wang , Joseph S. Fragala , Raymond R. Shile
IPC分类号： G01Q70/16 , B82Y40/00
CPC分类号： G03F7/0002
摘要： Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
摘要翻译：以高分辨率和高质量高结构和纳米结构的大规模平行印刷，使用二维阵列，其包括悬臂和基于尖端的材料转移到表面。该阵列设计为只有尖端触摸表面。这可以通过长尖端和弯曲的悬臂和对准来实现。一种制品，包括：多个悬臂的二维阵列，其中所述阵列包括多个基列，每个基列包括多个悬臂，其中每个所述悬臂包括远离所述基座的所述悬臂端处的尖端，其中所述悬臂的数量大于250，并且其中所述尖端具有相对于至少四微米的所述悬臂的顶点高度，以及所述阵列的支撑。可以制备组合阵列和生物阵列。阵列可以通过微加工方法制造。

3. 发明授权

US08220317B2 Massively parallel lithography with two-dimensional pen arrays 失效
标题翻译：大尺寸平行光刻与二维笔阵列
公开(公告)号：US08220317B2
公开(公告)日：2012-07-17
申请号：US11690738
申请日：2007-03-23
申请人： Chad A. Mirkin , Khalid Salaita , Yuhuang Wang , Joseph S. Fragala , Raymond R. Shile
发明人： Chad A. Mirkin , Khalid Salaita , Yuhuang Wang , Joseph S. Fragala , Raymond R. Shile
IPC分类号： G01B5/28
CPC分类号： G03F7/0002
摘要： Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
摘要翻译：以高分辨率和高质量高结构和纳米结构的大规模平行印刷，使用二维阵列，其包括悬臂和基于尖端的材料转移到表面。该阵列设计为只有尖端触摸表面。这可以通过长尖端和弯曲的悬臂和对准来实现。一种制品，包括：多个悬臂的二维阵列，其中所述阵列包括多个基列，每个基列包括多个悬臂，其中每个所述悬臂包括远离所述基座的所述悬臂端处的尖端，其中所述悬臂的数量大于250，并且其中所述尖端具有相对于至少四微米的所述悬臂的顶点高度，以及所述阵列的支撑。可以制备组合阵列和生物阵列。阵列可以通过微加工方法制造。

4. 发明申请

US20080105042A1 MASSIVELY PARALLEL LITHOGRAPHY WITH TWO-DIMENSIONAL PEN ARRAYS 失效
标题翻译：具有两维笔阵列的大规模并行平版印刷
公开(公告)号：US20080105042A1
公开(公告)日：2008-05-08
申请号：US11690738
申请日：2007-03-23
申请人： Chad A. Mirkin , Khalid Salaita , Yuhuang Wang , Joseph S. Fragala , Raymond R. Shile
发明人： Chad A. Mirkin , Khalid Salaita , Yuhuang Wang , Joseph S. Fragala , Raymond R. Shile
IPC分类号： G01B5/28
CPC分类号： G03F7/0002
摘要： Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
摘要翻译：以高分辨率和高质量高结构和纳米结构的大规模平行印刷，使用二维阵列，其包括悬臂和基于尖端的材料转移到表面。该阵列设计为只有尖端触摸表面。这可以通过长尖端和弯曲的悬臂和对准来实现。一种制品，包括：多个悬臂的二维阵列，其中所述阵列包括多个基列，每个基列包括多个悬臂，其中每个所述悬臂包括远离所述基座的所述悬臂端处的尖端，其中所述悬臂的数量大于250，并且其中所述尖端具有相对于至少四微米的所述悬臂的顶点高度，以及所述阵列的支撑。可以制备组合阵列和生物阵列。阵列可以通过微加工方法制造。

5. 发明申请

US20100089869A1 NANOMANUFACTURING DEVICES AND METHODS 失效
标题翻译：纳米制备装置和方法
公开(公告)号：US20100089869A1
公开(公告)日：2010-04-15
申请号：US12465621
申请日：2009-05-13
申请人： John Edward BUSSAN , Michael R. Nelson , Joseph S. Fragala , Albert K. Henning , Jeffrey R. Rendlen
发明人： John Edward BUSSAN , Michael R. Nelson , Joseph S. Fragala , Albert K. Henning , Jeffrey R. Rendlen
IPC分类号： C23F1/00 , B05C11/00 , C23F1/08 , C23C16/52 , F27D21/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： Devices for performing nanofabrication are provided which provide small volume reaction space and high reaction versatility. A device may include a reaction chamber adapted for nanoscale modification of a substrate and vacuum conditions; a scanning probe tip assembly enclosed within the reaction chamber; a first port coupled to the reaction chamber for delivering a gas; a second port coupled to the reaction chamber for applying a vacuum; and a substrate assembly insertedly mounted to the reaction chamber. The reaction chamber may include a body having one or more flexible walls and one or more supports to prevent the reaction chamber from collapsing under a vacuum. The device may further include an electrical conduit for coupling the tips of the scanning probe tip assembly to electrical components outside the reaction chamber. Also provided are apparatuses incorporating the devices and methods of using the devices and apparatuses.
摘要翻译：提供用于进行纳米制造的装置，其提供小体积的反应空间和高反应多功能性。装置可以包括适于对基底进行纳米尺寸改性的反应室和真空条件; 包围在反应室内的扫描探针头组件; 耦合到所述反应室的用于输送气体的第一端口; 耦合到所述反应室的第二端口，用于施加真空; 以及插入安装到反应室的基板组件。反应室可以包括具有一个或多个柔性壁和一个或多个支撑物的主体，以防止反应室在真空下塌缩。该装置还可以包括用于将扫描探针头组件的尖端耦合到反应室外部的电气部件的电导管。还提供了结合装置的装置和使用装置和装置的方法。

6. 发明申请

US20100235954A1 DUAL-TIP CANTILEVER 审中-公开
标题翻译：双线CANTILEVER
公开(公告)号：US20100235954A1
公开(公告)日：2010-09-16
申请号：US12465622
申请日：2009-05-13
申请人： Albert K. HENNING , Joseph S. Fragala , Raymond Roger Shile
发明人： Albert K. HENNING , Joseph S. Fragala , Raymond Roger Shile
IPC分类号： G01Q20/00 , G01Q70/10 , G01Q60/38 , C23F1/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least two tips is described, where the tips have substantially the same tip heights. Methods for making and using such a device are also provided. The height of one tip off of the surface can be more easily determined when the two tips have equal height.
摘要翻译：描述了包括至少一个包括至少两个尖端的悬臂的装置，其中尖端具有基本上相同的尖端高度。还提供了制造和使用这种装置的方法。当两个尖端具有相等的高度时，可以更容易地确定一个尖端离开表面的高度。

7. 发明申请

US20100100989A1 PIEZORESISTOR HEIGHT SENSING CANTILEVER 失效
公开(公告)号：US20100100989A1
公开(公告)日：2010-04-22
申请号：US12465625
申请日：2009-05-13
申请人： Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
发明人： Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
IPC分类号： G01Q20/00 , H01C7/00 , G01L1/00 , G01Q70/00 , G01Q70/16
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译：描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。还提供了制造和使用这种装置的方法。

8. 发明授权

US08393011B2 Piezoresistor height sensing cantilever 失效
标题翻译：压敏电阻高度检测悬臂
公开(公告)号：US08393011B2
公开(公告)日：2013-03-05
申请号：US12465625
申请日：2009-05-13
申请人： Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
发明人： Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
IPC分类号： G01Q70/14
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译：描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。还提供了制造和使用这种装置的方法。

9. 发明申请

US20120295030A1 HIGH DENSITY, HARD TIP ARRAYS 审中-公开
标题翻译：高密度，硬尖端阵列
公开(公告)号：US20120295030A1
公开(公告)日：2012-11-22
申请号：US13473533
申请日：2012-05-16
申请人： Albert K. HENNING , Raymond Roger Shile , Joseph S. Fragala , Nabil A. Amro , Jason R. Haaheim
发明人： Albert K. HENNING , Raymond Roger Shile , Joseph S. Fragala , Nabil A. Amro , Jason R. Haaheim
IPC分类号： B05C1/00 , B05D5/00 , B32B37/02 , B32B37/14 , B32B38/10
CPC分类号： B81C99/009 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T156/10 , Y10T156/1052
摘要： Improved high density, hard tip arrays for use in patterning are provided. An article comprises a handle chip; and a silicon nitride membrane bonded to at least a portion of the handle chip. The silicon nitride membrane comprises an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane. Another article comprises an elastomeric backing member; and an array of tips disposed on the elastomeric backing member. The tips of the array comprise a refractory material. Methods of making such articles are also provided.
摘要翻译：提供了用于图案化的改进的高密度硬尖端阵列。一种制品包括手柄芯片; 以及结合到手柄芯片的至少一部分的氮化硅膜。氮化硅膜包括直接从氮化硅膜的表面延伸的多个氮化硅尖端的阵列。另一制品包括弹性体背衬构件; 以及布置在弹性体背衬构件上的尖端阵列。阵列的尖端包括耐火材料。还提供制造这种制品的方法。

10. 发明授权

US08261368B2 Nanomanufacturing devices and methods 失效
标题翻译：纳米制造装置和方法
公开(公告)号：US08261368B2
公开(公告)日：2012-09-04
申请号：US12465621
申请日：2009-05-13
申请人： John Edward Bussan , Michael R. Nelson , Joseph S. Fragala , Albert K. Henning , Jeffrey R. Rendlen
发明人： John Edward Bussan , Michael R. Nelson , Joseph S. Fragala , Albert K. Henning , Jeffrey R. Rendlen
IPC分类号： H01J37/00 , G01N13/16 , C23F1/18 , C23F17/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： Devices for performing nanofabrication are provided which provide small volume reaction space and high reaction versatility. A device may include a reaction chamber adapted for nanoscale modification of a substrate and vacuum conditions; a scanning probe tip assembly enclosed within the reaction chamber; a first port coupled to the reaction chamber for delivering a gas; a second port coupled to the reaction chamber for applying a vacuum; and a substrate assembly insertedly mounted to the reaction chamber. The reaction chamber may include a body having one or more flexible walls and one or more supports to prevent the reaction chamber from collapsing under a vacuum. The device may further include an electrical conduit for coupling the tips of the scanning probe tip assembly to electrical components outside the reaction chamber. Also provided are apparatuses incorporating the devices and methods of using the devices and apparatuses.
摘要翻译：提供用于进行纳米制造的装置，其提供小体积的反应空间和高反应多功能性。装置可以包括适于对基底进行纳米尺寸改性的反应室和真空条件; 包围在反应室内的扫描探针头组件; 耦合到所述反应室的用于输送气体的第一端口; 耦合到所述反应室的第二端口，用于施加真空; 以及插入安装到反应室的基板组件。反应室可以包括具有一个或多个柔性壁和一个或多个支撑物的主体，以防止反应室在真空下塌缩。该装置还可以包括用于将扫描探针头组件的尖端耦合到反应室外部的电气部件的电导管。还提供了结合装置的装置和使用装置和装置的方法。

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