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1. 发明申请

US20080105042A1 MASSIVELY PARALLEL LITHOGRAPHY WITH TWO-DIMENSIONAL PEN ARRAYS 失效
标题翻译：具有两维笔阵列的大规模并行平版印刷
公开(公告)号：US20080105042A1
公开(公告)日：2008-05-08
申请号：US11690738
申请日：2007-03-23
申请人： Chad A. Mirkin , Khalid Salaita , Yuhuang Wang , Joseph S. Fragala , Raymond R. Shile
发明人： Chad A. Mirkin , Khalid Salaita , Yuhuang Wang , Joseph S. Fragala , Raymond R. Shile
IPC分类号： G01B5/28
CPC分类号： G03F7/0002
摘要： Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
摘要翻译：以高分辨率和高质量高结构和纳米结构的大规模平行印刷，使用二维阵列，其包括悬臂和基于尖端的材料转移到表面。该阵列设计为只有尖端触摸表面。这可以通过长尖端和弯曲的悬臂和对准来实现。一种制品，包括：多个悬臂的二维阵列，其中所述阵列包括多个基列，每个基列包括多个悬臂，其中每个所述悬臂包括远离所述基座的所述悬臂端处的尖端，其中所述悬臂的数量大于250，并且其中所述尖端具有相对于至少四微米的所述悬臂的顶点高度，以及所述阵列的支撑。可以制备组合阵列和生物阵列。阵列可以通过微加工方法制造。

2. 发明申请

US20120297509A1 MASSIVELY PARALLEL LITHOGRAPHY WITH TWO-DIMENSIONAL PEN ARRAYS 审中-公开
标题翻译：具有两维笔阵列的大规模并行平版印刷
公开(公告)号：US20120297509A1
公开(公告)日：2012-11-22
申请号：US13530006
申请日：2012-06-21
申请人： Chad A. Mirkin , Khalid Salaita , Yuhuang Wang , Joseph S. Fragala , Raymond R. Shile
发明人： Chad A. Mirkin , Khalid Salaita , Yuhuang Wang , Joseph S. Fragala , Raymond R. Shile
IPC分类号： G01Q70/16 , B82Y40/00
CPC分类号： G03F7/0002
摘要： Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
摘要翻译：以高分辨率和高质量高结构和纳米结构的大规模平行印刷，使用二维阵列，其包括悬臂和基于尖端的材料转移到表面。该阵列设计为只有尖端触摸表面。这可以通过长尖端和弯曲的悬臂和对准来实现。一种制品，包括：多个悬臂的二维阵列，其中所述阵列包括多个基列，每个基列包括多个悬臂，其中每个所述悬臂包括远离所述基座的所述悬臂端处的尖端，其中所述悬臂的数量大于250，并且其中所述尖端具有相对于至少四微米的所述悬臂的顶点高度，以及所述阵列的支撑。可以制备组合阵列和生物阵列。阵列可以通过微加工方法制造。

3. 发明授权

US08220317B2 Massively parallel lithography with two-dimensional pen arrays 失效
标题翻译：大尺寸平行光刻与二维笔阵列
公开(公告)号：US08220317B2
公开(公告)日：2012-07-17
申请号：US11690738
申请日：2007-03-23
申请人： Chad A. Mirkin , Khalid Salaita , Yuhuang Wang , Joseph S. Fragala , Raymond R. Shile
发明人： Chad A. Mirkin , Khalid Salaita , Yuhuang Wang , Joseph S. Fragala , Raymond R. Shile
IPC分类号： G01B5/28
CPC分类号： G03F7/0002
摘要： Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
摘要翻译：以高分辨率和高质量高结构和纳米结构的大规模平行印刷，使用二维阵列，其包括悬臂和基于尖端的材料转移到表面。该阵列设计为只有尖端触摸表面。这可以通过长尖端和弯曲的悬臂和对准来实现。一种制品，包括：多个悬臂的二维阵列，其中所述阵列包括多个基列，每个基列包括多个悬臂，其中每个所述悬臂包括远离所述基座的所述悬臂端处的尖端，其中所述悬臂的数量大于250，并且其中所述尖端具有相对于至少四微米的所述悬臂的顶点高度，以及所述阵列的支撑。可以制备组合阵列和生物阵列。阵列可以通过微加工方法制造。

4. 发明申请

US20080309688A1 Nanolithography with use of viewports 审中-公开
标题翻译：使用视口进行纳米光刻
公开(公告)号：US20080309688A1
公开(公告)日：2008-12-18
申请号：US12073909
申请日：2008-03-11
申请人： Jason Haaheim , Joseph S. Fragala , Raymond R. Shile
发明人： Jason Haaheim , Joseph S. Fragala , Raymond R. Shile
IPC分类号： G01D15/16
CPC分类号： G03F7/0002 , G01Q70/06 , G01Q80/00
摘要： Two dimensional arrays of cantilevers for use in transferring inks from the cantilever tip to substrates are improved with use of viewports to view the cantilevers from a far side. This improves the leveling behavior when large numbers of cantilevers are present. It also provides for better laser access. Bioarrays and combinatorial applications are particularly important. Massively parallel direct write printing with more than 55,000 cantilever tips can be achieved.
摘要翻译：通过使用视口来从远侧观察悬臂，改进了用于将墨水从悬臂尖端转移到基板的二维悬臂阵列。当存在大量的悬臂时，这改善了流平行为。它还提供更好的激光接入。生物芯片和组合应用尤为重要。可以实现具有超过55,000个悬臂尖端的大规模并行直写写入。

5. 发明授权

US08393011B2 Piezoresistor height sensing cantilever 失效
标题翻译：压敏电阻高度检测悬臂
公开(公告)号：US08393011B2
公开(公告)日：2013-03-05
申请号：US12465625
申请日：2009-05-13
申请人： Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
发明人： Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
IPC分类号： G01Q70/14
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译：描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。还提供了制造和使用这种装置的方法。

6. 发明申请

US20100100989A1 PIEZORESISTOR HEIGHT SENSING CANTILEVER 失效
公开(公告)号：US20100100989A1
公开(公告)日：2010-04-22
申请号：US12465625
申请日：2009-05-13
申请人： Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
发明人： Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
IPC分类号： G01Q20/00 , H01C7/00 , G01L1/00 , G01Q70/00 , G01Q70/16
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译：描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。还提供了制造和使用这种装置的方法。

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