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    • 8. 发明申请
    • Pick-up heads and systems for die bonding and related applications
    • 拾取头和芯片接合系统及相关应用
    • US20080128081A1
    • 2008-06-05
    • US11633701
    • 2006-12-04
    • Ya Ping WangJian Ming YangGuo Qiang ShenChee Keong Chin
    • Ya Ping WangJian Ming YangGuo Qiang ShenChee Keong Chin
    • B32B38/18B32B38/00B32B37/12
    • H01L21/6838B32B2038/1891Y10T156/10Y10T156/17Y10T156/1744
    • Pick-up heads and systems including such heads are disclosed. The pick-up heads and systems are especially useful for picking up, transporting, and placing semiconductor dies at bond sites on packaging substrates. Alternatively, the heads and systems are useful for performing these tasks with any of various other planar objects. An exemplary head includes a shank and a body. The body includes a compliant end portion contactable by the shank, and the end portion includes a face. The shank is movable relative to the end portion such that, whenever the shank is retracted, the face has a substantially planar contour, and whenever the shank is extended, the shank contacts and urges the end portion to provide the face with a convex contour. The end portion desirably defines at least one vacuum orifice connected to an evacuation device (e.g., a vacuum pump) that evacuates the vacuum orifice sufficiently to cause the planar object to adhere to the face.
    • 公开了包括这种头的拾取头和系统。 拾取头和系统特别适用于拾取,运输和将半导体管芯放置在封装基板上的结合位置。 或者,头部和系统对于用各种其他平面物体中的任何一个来执行这些任务是有用的。 示例性的头包括柄和身体。 主体包括可由柄接触的顺应性端部,并且端部包括面。 柄部相对于端部部分是可移动的,使得每当柄部缩回时,面部具有基本上平面的轮廓,并且每当柄部延伸时,柄部接触并推动端部部分,以向脸部提供凸形轮廓。 端部部分期望地限定连接到排气装置(例如,真空泵)的至少一个真空孔,其将真空孔充分抽出以使平面物体粘附到面上。