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    • 5. 发明授权
    • Liquid-particle analysis of metal materials
    • 金属材料的液 - 液分析
    • US08030082B2
    • 2011-10-04
    • US11331489
    • 2006-01-13
    • Susan D. StrothersJanine K. KardokusBrett M. Clark
    • Susan D. StrothersJanine K. KardokusBrett M. Clark
    • G01N33/20G01N33/53
    • G01N33/20
    • The invention includes a method of detecting impurities in a metal-containing article. A portion of metal material is removed from a metal article and is solubilized in an acid or base-comprising liquid to produce a liquid sample. The liquid sample is subjected to an incident laser beam and light scattered from the sample is detected. The invention includes a method of analyzing a physical vapor deposition target material. A portion of target material is removed from the target and is rinsed with an acid-comprising solution. The portion of target material is dissolved to produce a liquid sample. The sample is subjected to an incident laser beam and scatter of the laser beam is detected to determine the number of particles present in the sample within a particular size range.
    • 本发明包括检测含金属物品中的杂质的方法。 将一部分金属材料从金属制品中除去并溶解在含酸或碱的液体中以产生液体样品。 对液体样品进行入射的激光束,并且检测从样品散射的光。 本发明包括分析物理气相沉积靶材料的方法。 将目标材料的一部分从靶上除去并用含酸溶液冲洗。 将目标材料的部分溶解以产生液体样品。 对样品进行入射激光束,并且检测激光束的散射以确定在特定尺寸范围内存在于样品中的颗粒的数量。