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    • 10. 发明公开
    • 압력 센서 및 그 제조 방법
    • 压力传感器及其制造方法
    • KR1020140100852A
    • 2014-08-18
    • KR1020130014145
    • 2013-02-07
    • 한국기계연구원
    • 장원석소혜미정소희김덕종
    • H01L29/84G01L9/00G01L9/02
    • A pressure sensor according to one embodiment of the present invention includes a substrate, a transistor formed on the substrate, a pressure sensor layer which is connected to the transistor, and a pressure transmission layer which covers the transistor and the pressure sensor layer. First pressure sensor layers and second pressure sensor are alternately formed in the pressure sensor layer. Therefore, a pressure sensor and a manufacturing method thereof according to one embodiment of the present invention improve durability and bond a pressure sensor to a curved surface by using either a glass substrate or a polymer substrate instead of a silicon substrate having no flexibility.
    • 根据本发明的一个实施例的压力传感器包括衬底,形成在衬底上的晶体管,连接到晶体管的压力传感器层和覆盖晶体管和压力传感器层的压力传递层。 第一压力传感器层和第二压力传感器交替地形成在压力传感器层中。 因此,根据本发明的一个实施例的压力传感器及其制造方法通过使用玻璃基板或聚合物基板代替不具有柔性的硅基板来提高耐久性并将压力传感器结合到弯曲表面。