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    • 3. 发明公开
    • 반도체 장치 및 그 제조 방법
    • 半导体器件及其制造方法
    • KR1020090084825A
    • 2009-08-05
    • KR1020097008283
    • 2007-12-03
    • 가부시끼가이샤 도시바
    • 다까기,가즈따까
    • H01L27/095H01L21/338
    • H01L29/772H01L21/76898H01L23/481H01L29/41758H01L29/812H01L2224/48091H01L2224/49175H01L2924/1305H01L2924/00014H01L2924/00
    • Provided are a semiconductor device having a reduced earthing inductance, and a method for manufacturing the semiconductor device. This semiconductor device comprises a gate electrode, a source electrode and a drain electrode arranged on a first surface of a semi-insulating substrate (11) and having a plurality of fingers, an earthing conductor (26) arranged on a second surface on the opposite side of the first surface, a gate terminal electrode (14), a source terminal electrode (18) and a drain terminal electrode (12) formed by bundling a plurality of fingers individually for the gate electrode, the source electrode and the drain electrode, action layers formed over the semi-insulating substrate (11) below the gate electrode, the source electrode and the drain electrode, multistage VIA holes composed of a smaller-diameter VIA hole (30) near the first surface and a larger-diameter VIA hole (20) near the second surface, and earth electrodes (23) formed in the inner wall face of the multistage VIA holes and in the second surface and connected with the source terminal electrode (18) from the earthing conductor on the second surface side. ® KIPO & WIPO 2009
    • 提供了具有减小的接地电感的半导体器件,以及用于制造半导体器件的方法。 该半导体器件包括设置在半绝缘基板(11)的第一表面上并具有多个指状物的栅电极,源电极和漏电极,布置在相对的第二表面上的接地导体(26) 第一表面的侧面,栅极端子电极(14),源极端子电极(18)和漏极端子电极(12),其通过将多个指状物分别捆扎在栅电极,源电极和漏电极上而形成, 形成在栅电极,源电极和漏电极下方的半绝缘基板(11)上的动作层,由第一表面附近的较小直径的VIA孔(30)构成的多级VIA孔和大直径VIA孔 (20)和形成在多级VIA孔的内壁面中的第二表面中的接地电极(23),并且与源极端子电极(18)从接地导体连接在第二表面上 第二表面侧。 ®KIPO&WIPO 2009
    • 5. 发明公开
    • 쇼트키 포토다이오드
    • 肖特照片二极管
    • KR1020080013389A
    • 2008-02-13
    • KR1020060074850
    • 2006-08-08
    • 쌍신전자통신주식회사이재빈김형준
    • 김형준이재빈문정현임정혁이종호
    • H01L31/10H01L29/872H01L27/095
    • H01L31/108H01L27/095H01L29/872H01L31/0224
    • A schottky photodiode is provided to minimize light loss absorbed in a metal thin film and to maximize optical energy reaching a semiconductor epi layer by forming a schottky-junction metal thin film only on a partial region of an upper portion of the semiconductor epi layer. A first electrode(120) is formed on a lower portion of a semiconductor substrate(110). A semiconductor epi layer(130) is formed on an upper portion of the semiconductor substrate. A metal thin film(240) is formed on only a partial region of an upper portion of the semiconductor epi layer by schottky junction. A second electrode(150) is formed on an upper portion of the metal thin film. The metal thin film is formed on 70 % - 90 % region of the upper surface of the semiconductor epi layer. The metal thin film is made of platinum(Pt). A thickness of the metal thin film is 5 nm to 10 nm. The semiconductor substrate and the semiconductor epi layer are silicon carbide(SiC) or gallium nitride(GaN).
    • 提供一种肖特基光电二极管以最小化在金属薄膜中吸收的光损失并且通过仅在半导体外延层的上部的部分区域上形成肖特基结金属薄膜来最大化到达半导体外延层的光能。 第一电极(120)形成在半导体衬底(110)的下部。 半导体外延层(130)形成在半导体衬底的上部。 金属薄膜(240)仅通过肖特基结而形成在半导体外延层的上部的仅部分区域上。 第二电极(150)形成在金属薄膜的上部。 金属薄膜形成在半导体外延层的上表面的70%-90%的区域上。 金属薄膜由铂(Pt)制成。 金属薄膜的厚度为5nm〜10nm。 半导体衬底和半导体外延层是碳化硅(SiC)或氮化镓(GaN)。