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    • 3. 发明公开
    • 화합물, 수지, 포토레지스트 조성물 및 포토레지스트 패턴의 제조방법
    • 化合物,树脂,光电组合物和生产光电子图案的方法
    • KR1020120129828A
    • 2012-11-28
    • KR1020120053099
    • 2012-05-18
    • 스미또모 가가꾸 가부시키가이샤
    • 이치카와고지요시다이사오
    • C07C22/08C07C69/618G03F7/004
    • C07C22/08C07C69/618G03F7/004G03F7/0045G03F7/0046
    • PURPOSE: A compound, resin and photoresist composition are provided to form photoresist patterns with improved durability against dry etching and excellent resolution, thereby being suitable for KrF excimer laser lithography, ArF excimer laser lithography, EUV light-exposure lithography and electron beam lithography. CONSTITUTION: A compound is represented by chemical formula 1. In chemical formula 1, T^1 is a single bond or C6-14 aromatic hydrocarbon group, L^1 is a C1-17 divalent saturated hydro carbon group, each of L^2 and L^3 is single bond or C1-6 divalent saturated hydro carbon group, each of ring W^1 and ring W^2 is C3-36 hydro carbon group. Each of R^1 and R^2 is hydrogen, a hydroxy group, or C1-C6 alkyl group, each R^3 and R^4 is hydroxyl group or C1-6 alkyl group, R^5 is a hydroxyl group or methyl group, m is 0 or 1, and each of t and u is an integer from 0-2. A resin comprises a unit structure derived from the compound. A photoresist composition comprises the resin, an acid generator, and a solvent.
    • 目的:提供化合物,树脂和光致抗蚀剂组合物以形成具有改进的抗干蚀刻耐久性和优异分辨率的光致抗蚀剂图案,从而适用于KrF准分子激光光刻,ArF准分子激光光刻,EUV曝光光刻和电子束光刻。 化学式1化学式1中,T ^ 1为单键或C6-14芳烃基,L ^ 1为C1-17二价饱和烃基,L ^ 2为 L ^ 3为单键或C1-6二价饱和碳氢基,环W ^ 1和环W ^ 2各为C3-36碳氢基。 R 1和R 2中的每一个是氢,羟基或C 1 -C 6烷基,每个R 3和R 4是羟基或C 1-6烷基,R 5是羟基或甲基 组,m为0或1,t和u分别为0-2的整数。 树脂包含衍生自化合物的单元结构。 光致抗蚀剂组合物包含树脂,酸产生剂和溶剂。