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    • 4. 发明公开
    • 압전 진동 디바이스의 제조장치
    • 制造压电振动装置的装置
    • KR1020120137237A
    • 2012-12-20
    • KR1020120057323
    • 2012-05-30
    • 가부시키가이샤 다이신쿠가부시키가이샤 쇼와 신쿠
    • 이이즈카미노루쿠사이츠요시시오노타다히사와다모토키아토베요시히사
    • H03H3/02H01L41/22
    • H03H3/02H01L23/10H03H9/0519H03H9/1035H03H9/19
    • PURPOSE: An apparatus for manufacturing a piezoelectric vibrating device is provided to reduce sealing inspection time by transporting the piezoelectric vibrating device to a hermetic sealing chamber and an inspection chamber in order. CONSTITUTION: A manufacturing device(7) comprises an introduction chamber(71), a preheating chamber(72), a hermetically sealed chamber(73), and an inspection chamber(75) which are successively arranged along an X-direction of a transmitting direction of a crystal vibrator. One pellet(8) on which a plurality of crystal vibrators is mounted is carried in the X-direction. A gate valve(76) is installed between the outside and the introduction chamber, between the introduction chamber and a first preheating chamber(721), between the hermetically sealed chamber and a temperature control chamber(74), between the temperature control chamber and the inspection chamber, and between the inspection chamber and the outside. The gate valve suppresses pressure changes by controlling atmospheric pressure within each chamber through opening and closing each chamber. [Reference numerals] (71) Introduction area; (721) First preheating chamber; (722) Second preheating chamber; (723) Third preheating chamber; (73) Hermetic sealing chamber; (74) Temperature control chamber; (751) First inspection chamber; (752) Second inspection chamber
    • 目的:提供一种用于制造压电振动装置的装置,以通过将压电振动装置依次传送到气密密封室和检查室来减少密封检查时间。 构成:制造装置(7)包括:引导室(71),预热室(72),气密密封室(73)和检查室(75),其沿着透射的X方向 晶体振子的方向。 在X方向上承载安装有多个晶体振子的一个颗粒(8)。 在所述导入室和所述密封室与温度控制室(74)之间的所述导入室与所述第一预热室(721)之间,在所述温度控制室和所述温度控制室之间,安装有闸阀(76) 检查室,检查室和外部之间。 闸阀通过打开和关闭每个室来控制每个室内的大气压力来抑制压力变化。 (附图标记)(71)介绍区域; (721)第一预热室; (722)第二预热室; (723)第三预热室; (73)密封腔; (74)温控室; (751)第一检查室; (752)第二检查室
    • 7. 发明公开
    • 진동편, 주파수 조정 방법, 진동자, 진동 디바이스 및, 전자 기기
    • 振动元件,振动器,振动装置,电子装置和频率调整方法
    • KR1020110134272A
    • 2011-12-14
    • KR1020110051104
    • 2011-05-30
    • 세이코 엡슨 가부시키가이샤
    • 가와이히로키
    • H03H9/15H03B5/30
    • H03H9/21H03H3/04H03H9/0519H03H9/1021H03H2003/0428H03H2003/0492
    • PURPOSE: A vibrating piece, a frequency control method, a vibrator, a vibration device, and an electronic device are provided to glue a film on a first mass part or second mass part using a sputtering or evaporation process, thereby increasing the mass of a mass part. CONSTITUTION: A vibrating piece comprises a base part, a vibration arm(28), a first mass part(51), and a second mass part(54). The vibration arm vibrates with bending along Z-axis which is orthogonal to Y-axis. The first mass part and second mass part are arranged in the upper part of the vibration arm. A part or all of the first mass part and second mass part are eliminated by energy beam projection. The first mass part and second mass part adjust a resonant frequency of the vibration arm. The first mass part is arranged in the upper part of a first surface of the vibration arm. The second mass part is arranged in the upper part of a second surface of the vibration arm. The first mass part and second mass part include a part which is not overlapped when observed along the Z-axis.
    • 目的:提供一种振动片,频率控制方法,振动器,振动装置和电子装置,用于使用溅射或蒸发工艺将膜粘合在第一质量部分或第二质量部分上,从而增加了 质量部分。 构成:振动片包括基部,振动臂(28),第一质量部分(51)和第二质量部分(54)。 振动臂沿着与Y轴正交的Z轴弯曲振动。 第一质量部件和第二质量部件布置在振动臂的上部。 第一质量部分和第二质量部分的一部分或全部通过能量射束投影而消除。 第一质量部分和第二质量部分调节振动臂的共振频率。 第一质量部件布置在振动臂的第一表面的上部。 第二质量部件布置在振动臂的第二表面的上部。 第一质量部分和第二质量部分包括当沿Z轴观察时不重叠的部分。
    • 8. 发明公开
    • 압전 진동편 및 압전 장치
    • 压电谐振器元件和压电器件
    • KR1020070096991A
    • 2007-10-02
    • KR1020070084672
    • 2007-08-22
    • 세이코 엡슨 가부시키가이샤
    • 다나야히데오
    • H03H9/19H03B5/32
    • H03H9/02102G01C19/5607H03H9/02086H03H9/0519H03H9/0595H03H9/1021H03H9/21H03H2003/026H03H2003/0492
    • A piezoelectric resonator element and a piezoelectric apparatus are provided to obtain a characteristic suitable for the change of surrounding temperature when implementing miniaturization. A piezoelectric resonator element(32) includes a base unit(51), first and second resonator arms(35,36), first and second supporting arms(61,62), and first and second lead-out electrodes(37a,38a). The base unit(51) is made of a piezoelectric material. The first and second resonator arms(35,36) are extended from one stage side of the base unit(51). The first and second supporting arms(61,62) are extended from a joint of the first and second resonator arms(35,36), in a direction to which the first and second resonator arms(35,36) are extended, and from a portion separated in the opposite direction to a width direction, and are extended along the first and second resonator arms(35,36) outside the first and second resonator arms(35,36). The first and second lead-out electrodes(37a,38a) are arranged on the first and second supporting arms(61,62) from excitation electrodes(37,38) separately formed on a side surface of the first and second resonator arms(35,36).
    • 提供压电谐振元件和压电装置,以在实现小型化时获得适合于周围温度变化的特性。 压电谐振元件(32)包括基座单元(51),第一和第二谐振器臂(35,36),第一和第二支撑臂(61,62)以及第一和第二引出电极(37a,38a) 。 基座单元(51)由压电材料制成。 第一和第二谐振器臂(35,36)从基本单元(51)的一个一侧延伸。 第一和第二支撑臂(61,62)沿着第一和第二谐振器臂(35,36)延伸的方向从第一和第二谐振器臂(35,36)的接头延伸,并且从 沿与宽度方向相反的方向分开的部分,并且沿着第一和第二共振臂(35,36)外的第一和第二共振臂(35,36)延伸。 第一和第二引出电极(37a,38a)从分开形成在第一和第二谐振器臂(35)的侧表面上的激励电极(37,38)布置在第一和第二支撑臂(61,62)上 ,36)。
    • 9. 发明公开
    • 진동 디바이스 및 발진기
    • 振荡器件和振荡器
    • KR1020130087355A
    • 2013-08-06
    • KR1020120127455
    • 2012-11-12
    • 에스아이아이 크리스탈 테크놀로지 가부시키가이샤
    • 요시다요시후미
    • H01L41/09
    • H03H9/0519H03H9/1021
    • PURPOSE: An oscillation device and an oscillator are provided to reduce the degradation of frequency characteristics by supporting an oscillation piece through a first connection unit and a second connection unit even though an ambient temperature changes. CONSTITUTION: A cover (4) is bonded to a base material (3) to form a cavity (5). The base material includes a first connection part (12a) and a second connection part (12b). An oscillation piece (6) is received in the cavity and includes a body part (7) and an extension part (8). The extension part includes a first terminal (10a) which is electrically connected to an excitation electrode. The body part includes two excitation electrodes to excite an oscillation.
    • 目的:提供振荡装置和振荡器,以便即使环境温度改变,通过支撑振荡片通过第一连接单元和第二连接单元来降低频率特性的劣化。 构成:将盖(4)结合到基材(3)以形成空腔(5)。 基材包括第一连接部分(12a)和第二连接部分(12b)。 振荡片(6)容纳在腔体中,并包括主体部分(7)和延伸部分(8)。 延伸部包括与激励电极电连接的第一端子(10a)。 身体部分包括两个激发电极以激发振荡。
    • 10. 发明公开
    • 압전 진동편 및 압전 진동편을 이용한 압전 디바이스
    • PIEZO振动片和PIEZO器件使用PIEZO振动片
    • KR1020130072530A
    • 2013-07-02
    • KR1020110139996
    • 2011-12-22
    • 삼성전기주식회사
    • 이종필차상엽
    • H03H9/15H03B5/32
    • H03H9/15H03B5/32H03H9/0519H03H9/0595H03H9/2484
    • PURPOSE: A piezoelectric vibration piece and a piezoelectric device using the piezoelectric vibration piece are provided to be kept in a small size by an arm structure and keep frequency stable. CONSTITUTION: A piezoelectric vibration piece comprises a base (10) and the first and the second arm parts (20,25). The first and the second arm parts are extended from the base. The first and the second arm parts are divided into a curved part (A) and a parallel part (B) the curved part distance the first and the second arm parts. The first and the second electrodes are prepared in a base part and the upper and the lower part of the first and the second arm parts. When voltage is conveyed into the piezoelectric vibration with the electrode, AC voltage with certain frequency is generated by a piezoelectric effect generated between the first and the second arm parts.
    • 目的:使用压电振动片的压电振动片和压电元件通过臂结构保持在较小的尺寸并保持频率稳定。 构成:压电振动片包括基座(10)和第一和第二臂部件(20,25)。 第一和第二臂部分从基座延伸。 第一和第二臂部分分成弯曲部分(A)和平行部分(B),弯曲部分距离第一和第二臂部分。 第一和第二电极准备在第一和第二臂部分的基部和上部和下部中。 当用电极将电压输送到压电振动中时,通过在第一和第二臂部件之间产生的压电效应产生具有一定频率的交流电压。