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1. 发明公开

KR1020120137237A 압전 진동 디바이스의 제조장치 审中-实审
标题翻译：制造压电振动装置的装置
公开(公告)号：KR1020120137237A
公开(公告)日：2012-12-20
申请号：KR1020120057323
申请日：2012-05-30
申请人： 가부시키가이샤 다이신쿠 , 가부시키가이샤 쇼와 신쿠
发明人： 이이즈카미노루 , 쿠사이츠요시 , 시오노타다히사 , 와다모토키 , 아토베요시히사
IPC分类号： H03H3/02 , H01L41/22
CPC分类号： H03H3/02 , H01L23/10 , H03H9/0519 , H03H9/1035 , H03H9/19
摘要： PURPOSE: An apparatus for manufacturing a piezoelectric vibrating device is provided to reduce sealing inspection time by transporting the piezoelectric vibrating device to a hermetic sealing chamber and an inspection chamber in order. CONSTITUTION: A manufacturing device(7) comprises an introduction chamber(71), a preheating chamber(72), a hermetically sealed chamber(73), and an inspection chamber(75) which are successively arranged along an X-direction of a transmitting direction of a crystal vibrator. One pellet(8) on which a plurality of crystal vibrators is mounted is carried in the X-direction. A gate valve(76) is installed between the outside and the introduction chamber, between the introduction chamber and a first preheating chamber(721), between the hermetically sealed chamber and a temperature control chamber(74), between the temperature control chamber and the inspection chamber, and between the inspection chamber and the outside. The gate valve suppresses pressure changes by controlling atmospheric pressure within each chamber through opening and closing each chamber. [Reference numerals] (71) Introduction area; (721) First preheating chamber; (722) Second preheating chamber; (723) Third preheating chamber; (73) Hermetic sealing chamber; (74) Temperature control chamber; (751) First inspection chamber; (752) Second inspection chamber
摘要翻译：目的：提供一种用于制造压电振动装置的装置，以通过将压电振动装置依次传送到气密密封室和检查室来减少密封检查时间。构成：制造装置（7）包括：引导室（71），预热室（72），气密密封室（73）和检查室（75），其沿着透射的X方向晶体振子的方向。在X方向上承载安装有多个晶体振子的一个颗粒（8）。在所述导入室和所述密封室与温度控制室（74）之间的所述导入室与所述第一预热室（721）之间，在所述温度控制室和所述温度控制室之间，安装有闸阀（76）检查室，检查室和外部之间。闸阀通过打开和关闭每个室来控制每个室内的大气压力来抑制压力变化。（附图标记）（71）介绍区域; （721）第一预热室; （722）第二预热室; （723）第三预热室; （73）密封腔; （74）温控室; （751）第一检查室; （752）第二检查室

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