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1. 发明公开

KR1020140118751A 진동자의 제조 방법, 진동자 및, 발진기 审中-实审
标题翻译：制造振动器，振动器和振荡器的方法
公开(公告)号：KR1020140118751A
公开(公告)日：2014-10-08
申请号：KR1020140028110
申请日：2014-03-11
申请人： 세이코 엡슨 가부시키가이샤
发明人： 요시자와타카히코
IPC分类号： H03H3/02 , H03H9/17
CPC分类号： H03H9/17 , H03B5/02 , H03B5/30 , H03B5/32 , H03H3/02 , H03H9/02338 , H03H9/2447 , H03H2003/021 , H03H2003/022 , H03H2009/02291
摘要： A method for manufacturing a vibrator, according to the present invention, includes: forming a coating layer that covers a silicon substrate; patterning the coating layer; forming a semiconductor layer that covers the silicon substrate and the coating layer; forming a vibrating portion having a beam shape on the coating layer and a support portion that supports the vibrating portion by patterning the semiconductor layer; forming an opening that exposes the silicon substrate; forming a recess portion by removing the silicon substrate through the opening; and removing the coating layer. In the step of forming the vibrating portion and the support portion, the support portion having a first portion that is located on the silicon substrate and a second portion that is located on the coating layer to connect the first portion and the vibrating portion is formed.
摘要翻译：根据本发明的制造振动器的方法包括：形成覆盖硅衬底的涂层; 图案化涂层; 形成覆盖硅衬底和涂层的半导体层; 在所述涂层上形成具有光束形状的振动部分，以及通过对所述半导体层进行构图来支撑所述振动部分的支撑部分; 形成露出硅衬底的开口; 通过所述开口去除所述硅衬底而形成凹部; 并除去涂层。在形成振动部分和支撑部分的步骤中，形成具有位于硅衬底上的第一部分的支撑部分和位于涂层上以连接第一部分和振动部分的第二部分。

2. 发明授权

KR101724488B1 MEMS 공진기 有权
公开(公告)号：KR101724488B1
公开(公告)日：2017-04-07
申请号：KR1020150177465
申请日：2015-12-11
申请人： 현대자동차주식회사
发明人： 유일선
IPC分类号： H03H9/24 , B81B7/02 , B81B3/00
CPC分类号： H03H9/02244 , B81B3/0021 , B81B2201/0271 , B81B2203/0118 , B81B2203/0136 , B81B2207/015 , G01C19/5719 , G01P15/097 , H03H9/02393 , H03H2009/02165 , H03H2009/02291
摘要： MEMS 공진기가개시된다. 본발명의실시예에따른 MEMS 공진기는중앙에수용부를형성하는메인기판; 상기메인기판상의수용부중앙에위치하여상기메인기판에제1탄성부재와제2탄성부재를통하여일단부및 중앙부의각 양측이탄성적으로지지되는질량체; 상기메인기판상의수용부일측에구성되어상기질량체의일단부양측에전압에의한구동력을작용하여상기메인기판에대하여질량체의위치를이동시키는구동부; 및상기제2탄성부재를기준으로튜닝유닛이대칭으로구비되어한 쌍을이루어상기질량체의중앙부양측에대응하여상기수용부에각각구성되며, 각튜닝유닛의액추에이팅작동에의해빔부재가제2탄성부재의길이를변화시키며주파수를조절하는튜닝부를포함한다.

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