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    • 4. 发明公开
    • 실리카계 광학 도파관 및 이의 제조방법
    • 光波导
    • KR1020010070514A
    • 2001-07-25
    • KR1020010001614
    • 2001-01-11
    • 스미토모덴키고교가부시키가이샤
    • 사사키다카시히라이시게루아카사카노부히로다나카시게루히로세치사이
    • G02B6/12
    • G02B6/12023G02B6/105G02B6/122G02B6/132
    • PURPOSE: An optical waveguide is provided to achieve a high density arrangement of a core waveguide by eliminating crystals generated on the interface between the core waveguide and the over cladding part and preventing formation of a thin film layer having a refractive index larger than that of the other part in the over cladding part, on the interface between the core waveguide and the over cladding part. CONSTITUTION: The optical waveguide comprises a substrate(1), a core waveguide(2) formed thereon, and an over cladding part(3b) comprising a silica based glass with a refractive index lowering dopant and a refractive index increasing dopant added, formed on the substrate so as to cover the core waveguide. The segregation layer(3a) with a higher concentration of the refractive index increasing dopant is formed in contact with the substrate and the core waveguide. The over cladding part(3) is provided by forming a porous silica based glass layer by accumulating glass fine particles and a dopant such as B2O3 or P2O5 on the substrate(1) by a FHD method so as to cover the core waveguide(2), then, sintering the porous silica based glass layer for transmitting the light in the core.
    • 目的:提供一种光波导,通过消除在芯波导和上包层部分之间的界面上产生的晶体来实现芯波导的高密度布置,并且防止形成折射率大于 在上包层部分的另一部分,在芯波导和上包层部分之间的界面上。 构成:光波导包括基板(1),形成在其上的芯波导(2)和包括部分(3b)的上包层部分(3b),其包括具有折射率降低掺杂剂的二氧化硅基玻璃和添加的折射率增加掺杂剂,形成在 该衬底以覆盖芯波导。 具有较高浓度的折射率增加掺杂剂的偏析层(3a)形成为与衬底和芯波导接触。 通过以FHD方法在基板(1)上积聚玻璃微粒和B 2 O 3或P 2 O 5等掺杂物以覆盖芯波导(2),形成多孔二氧化硅基玻璃层来提供上包层部分(3) ,然后烧结多孔二氧化硅基玻璃层,用于透过芯中的光。