专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明公开

KR1020040000689A 화학기상 증착공정의 원료물질 공급장치 无效
标题翻译：用于在化学蒸气沉积过程中提供原料的装置
公开(公告)号：KR1020040000689A
公开(公告)日：2004-01-07
申请号：KR1020020035604
申请日：2002-06-25
申请人： 삼성전자주식회사
发明人： 강구영
IPC分类号： C03B37/018
CPC分类号： C23C16/4482 , C03B19/1415 , C03B37/01413 , C03B37/01807 , C03B2207/86 , C03B2207/88 , C03B2207/89 , Y02P40/57 , Y10S261/65
摘要： PURPOSE: Provided is a device for supplying raw materials in chemical vapor deposition process, which supplies raw materials continuously and easily, prevents the contamination of raw materials, and improves the optical fiber productivity. CONSTITUTION: The device(300) for supplying raw materials in chemical vapor deposition process comprises a bubbler(310) for transforming the liquid raw materials into gas phases and supplying the gaseous raw materials to a deposition part, and a tank(320) for supplying liquid raw materials to the bubbler(310). The device is characterized in that the liquid raw materials to be supplied to the bubbler(310) are stored and pre-heated in the tank(320); the raw materials in the tank(320) are supplied to the bubbler(310) through multiple hollow fine tubes(340); and the pressure inside of the tank(320) are increased as the raw materials in the bubbler(310) are consumed gradually, while the raw materials are supplied to the bubbler(310) continuously, in order to maintain the amount of raw materials and the vapor pressure inside of the bubbler(310) at a constant degree.
摘要翻译：目的：提供化学气相沉积工艺原料供应装置，连续供应原料，防止原料污染，提高光纤生产率。构成：用于在化学气相沉积工艺中供应原料的装置（300）包括用于将液体原料转化为气相并将气态原料供应到沉积部分的起泡器（310）和用于供应液体原料到起泡器（310）。该装置的特征在于，供应到起泡器（310）的液体原料在储罐（320）中被储存和预热; 通过多个中空细管（340）将罐（320）中的原料供应到起泡器（310）; 并且当起泡器（310）中的原料逐渐消耗时，罐（320）内的压力增加，同时将原料连续地供给到起泡器（310）中，以保持原料的量和起泡器（310）内部的蒸气压恒定。

IPRDB

热门服务

关于我们

友情链接

联系方式