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    • 3. 发明公开
    • 압저항 변위센서 및 쉐브론 빔 구조를 가지는 마이크로스테이지
    • 具有PIEZORESISTIVE传感器和CHEVRON束结构的微结构
    • KR1020110077522A
    • 2011-07-07
    • KR1020090134132
    • 2009-12-30
    • 전남대학교산학협력단
    • 이동원최영수
    • B81B3/00B81B7/00
    • B81B3/0035B81B7/0019B81B2201/0292B81B2201/031
    • PURPOSE: A micro-stage having a piezo resistance displacement sensor and a chevron beam structure is provided to amplify displacement of a column driver having a large shift through the chevron beam structure extended from four sides of a platform to vertical and horizontal directions. CONSTITUTION: A micro-stage having a piezo resistance displacement sensor and a chevron beam structure includes a platform(100), an extension beam(200), a chevron beam(300), a piezo resistance displacement sensor, and a column driver(400). The platform has a square shape, and a sample is placed in the center of the platform. The extension beam is extended from one side of the platform. The extension beam includes an electrode for preventing the extension beam from being bent to a specific axis. The chevron beam has a 'V' shape, and the center thereof is connected to the extension beam. The chevron beam draws the extension beam to drive the platform when the piezo resistance displacement sensor is driven. The piezo resistance displacement sensor is driven to a particular direction by generating Joule heat when a voltage is applied thereto. The piezo resistance displacement sensor comprises two integrated column drivers.
    • 目的:提供具有压电阻位移传感器和人字形梁结构的微型平台,用于放大通过从平台的四个侧面延伸到垂直和水平方向的人字形梁结构具有大偏移的列驱动器的位移。 构造:具有压电阻位移传感器和人字形梁结构的微型平台包括平台(100),延伸梁(200),人字形梁(300),压电阻位移传感器和列驱动器(400 )。 该平台具有正方形形状,样品放置在平台的中心。 延伸梁从平台的一侧延伸。 延伸梁包括用于防止延伸梁弯曲到特定轴线的电极。 人字形梁具有“V”形,其中心连接到延伸梁。 当压电阻力位移传感器被驱动时,人字形梁拉伸延伸梁来驱动平台。 当施加电压时,通过产生焦耳热来将压电阻位移传感器驱动到特定的方向。 压电阻位移传感器包括两个集成的列驱动器。