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    • 2. 发明公开
    • 노광 장치 및 노광 방법
    • 노광장치및노광방법
    • KR1020060044940A
    • 2006-05-16
    • KR1020050026048
    • 2005-03-29
    • 후지필름 가부시키가이샤
    • 카타야마토루나카야다이수케조고나오주미
    • G03F7/20
    • G03B27/52G03F7/70258G03F7/70275G03F7/70725
    • An exposure apparatus and method in which an image is formed on a recording medium mounted on a recording stage by irradiating a light beam based on image data from a recording head while the recording head and the recording stage are relatively moved, in the exposure apparatus and method, storing in advance, in a storage section, shift-amount data of a detected displacement of an image-form position with respect to a stage surface of the recording stage in a direction intersecting a direction in which the recording stage moves, which displacement occurs accompanied by movement of the recording stage; carrying out shifting for each of pixels of an image formed by the image data based on the shift-amount data stored in the storage section; and controlling exposure for the recording medium based on image data of the shifted image, is provided to reduce distortion of the image.
    • 一种曝光设备和方法,其中在曝光设备中通过在记录头和记录台相对移动的同时基于来自记录头的图像数据照射光束而在安装在记录台上的记录介质上形成图像, 方法中,预先在存储部中存储检测到的图像形成位置相对于记录台的平台表面在与记录台移动方向相交叉的方向上的位移量的偏移量数据, 伴随记录阶段的移动而发生; 基于存储在存储部分中的偏移量数据执行对由图像数据形成的图像的每个像素的偏移; 并基于移位图像的图像数据控制记录介质的曝光,以减少图像的失真。