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    • 2. 发明授权
    • 표면 저항 측정기
    • 测量表面电阻的装置
    • KR101087828B1
    • 2011-11-30
    • KR1020100084729
    • 2010-08-31
    • 한양대학교 산학협력단
    • 이승백최은석
    • G01R27/02H01L21/66
    • PURPOSE: A surface resistance measuring device is provided to measure the surface resistance distribution and surface resistance without surface damage in a measurement target object. CONSTITUTION: A measurement set(200) includes a spacer plate(220), an output electrode plate(230), a contact electrode plate(240), and a flexible plate(250). The spacer plate is located on a measurement target object and includes a first opening part exposing a partial surface of the measurement target object. The output electrode plate is located on the spacer plate and includes a second opening part corresponding to the first opening part. The contact electrode plate is located on the output electrode plate and at least covers the second opening part. The flexible plate is located on surface the contact electrode plate.
    • 目的:提供表面电阻测量装置,以测量测量目标物体中的表面电阻分布和表面电阻而没有表面损伤。 构成:测量装置(200)包括间隔板(220),输出电极板(230),接触电极板(240)和柔性板(250)。 间隔板位于测量对象物体上,并且包括暴露测量对象物体的局部表面的第一开口部分。 输出电极板位于间隔板上,包括对应于第一开口部的第二开口部。 接触电极板位于输出电极板上,并且至少覆盖第二开口部。 柔性板位于接触电极板的表面上。