会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明公开
    • 모세관 현상 기반 나노갭을 갖는 금속 나노 패턴 구조 형성 방법
    • 毛细管驱动纳米GAP金属图案
    • KR1020130057276A
    • 2013-05-31
    • KR1020110123109
    • 2011-11-23
    • 한국과학기술원
    • 정기훈강민희
    • B82B3/00G01N21/65
    • PURPOSE: A method of forming metal nanopatterns having nanogap is provided to form ultra-fine metal nanopatterns for Surface Enhanced Raman Scattering by causing the capillary phenomenon of polymer thin film contacted with a polymeric template. CONSTITUTION: A method of forming metal nanopatterns having nanogap comprises the following steps: a metallic thin film(110) of nano level is formed on a substrate(110); a polymer thin film(120) is formed on the metallic thin film; a patterned surface of a polymeric template(130) in which fine nanopatterns have been formed is contacted with the polymer thin film; the structure formed through the previous steps is heat-treated; fine nanopatterns of the polymer thin film having nanogap(150) are formed on the metallic thin film by the capillary phenomenon through the heat-treating step; and fine nanopatterns having nanogap are formed on the metallic thin film by etching with the fine nanopatterns of the polymer thin film as an etching mask. In the fine nanopattern formation step, the nanogap is a narrower gap than the pattern gap of the polymer template.
    • 目的:提供一种形成具有纳米隙的金属纳米图案的方法,以通过使聚合物薄膜与聚合物模板接触的毛细现象形成用于表面增强拉曼散射的超细金属纳米图案。 构成:形成具有纳米凹槽的金属纳米图案的方法包括以下步骤:在基底(110)上形成纳米级的金属薄膜(110); 在金属薄膜上形成聚合物薄膜(120); 已经形成细微纳米图案的聚合物模板(130)的图案化表面与聚合物薄膜接触; 通过前述步骤形成的结构被热处理; 通过热处理步骤,通过毛细管现象,在金属薄膜上形成具有纳米隙(150)的聚合物薄膜的细小纳米图案; 通过用聚合物薄膜的细微纳米图案作为蚀刻掩模蚀刻,在金属薄膜上形成具有纳米隙的细小纳米图案。 在细微纳米图案形成步骤中,纳米间隙比聚合物模板的图案间隙更窄。